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    MODE-TUNING SENSE INTERFACE
    64.
    发明申请
    MODE-TUNING SENSE INTERFACE 有权
    模式调节感应界面

    公开(公告)号：US20160178393A1

    公开(公告)日：2016-06-23

    申请号：US15058084

    申请日：2016-03-01

    Applicant: Invensense, Inc.

    Inventor： Baris Cagdaser ,  Derek Shaeffer ,  Joseph Seeger

    IPC: G01C25/00 ,  G01C19/5726

    CPC classification number: G01C25/00 ,  G01C19/5726 ,  G01D5/24 ,  G01R27/2605

    Abstract: A MEMS capacitive sensing interface includes a sense capacitor having a first terminal and a second terminal, and having associated therewith a first electrostatic force. Further included in the MEMS capacitive sensing interface is a feedback capacitor having a third terminal and a fourth terminal, the feedback capacitor having associated therewith a second electrostatic force. The second and the fourth terminals are coupled to a common mass, and a net electrostatic force includes the first and second electrostatic forces acting on the common mass. Further, a capacitance measurement circuit measures the sense capacitance and couples the first terminal and the third terminal. The capacitance measurement circuit, the sense capacitor, and the feedback capacitor define a feedback loop that substantially eliminates dependence of the net electrostatic force on a position of the common mass.

    Abstract translation: MEMS电容感测接口包括具有第一端子和第二端子的感测电容器，并且具有与其相关联的第一静电力。 还包括在MEMS电容感测接口中的是具有第三端子和第四端子的反馈电容器，所述反馈电容器具有与其相关联的第二静电力。 第二和第四端子耦合到共同的质量，净静电力包括作用在公共质量上的第一和第二静电力。 此外，电容测量电路测量感测电容并耦合第一端子和第三端子。 电容测量电路，感测电容器和反馈电容器定义了基本上消除了净静电力对共同质量位置的依赖性的反馈回路。

    METHOD OF INCREASING MEMS ENCLOSURE PRESSURE USING OUTGASSING MATERIAL
    65.
    发明申请
    METHOD OF INCREASING MEMS ENCLOSURE PRESSURE USING OUTGASSING MATERIAL 有权
    使用外加材料增加MEMS外壳压力的方法

    公开(公告)号：US20150360939A1

    公开(公告)日：2015-12-17

    申请号：US14832786

    申请日：2015-08-21

    Applicant: InvenSense, Inc.

    Inventor： Cerina Zhang ,  Martin Lim ,  Jongwoo Shin ,  Joseph Seeger

    IPC: B81C1/00

    CPC classification number: B81C1/00301 ,  B81B7/007 ,  B81B7/02 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81C1/0023 ,  B81C1/00238 ,  B81C1/00246 ,  B81C1/00269 ,  B81C2201/0104 ,  B81C2201/0132 ,  B81C2203/0145 ,  B81C2203/019 ,  B81C2203/035 ,  B81C2203/0792

    Abstract: Semiconductor manufacturing processes include providing a first substrate having a first passivation layer disposed above a patterned top-level metal layer, and further having a second passivation layer disposed over the first passivation layer; the second passivation layer has a top surface. The processes further include forming an opening in a first portion of the second passivation layer, and the opening exposes a portion of a surface of the first passivation layer. The processes further include patterning the second and first passivation layers to expose portions of the patterned top-level metal layer and bonding a second substrate and the first substrate to each other. The bonding occurs within a temperature range in which at least the exposed portion of the first passivation layer undergoes outgassing.

    Abstract translation: 半导体制造工艺包括提供第一衬底，其具有设置在图案化顶层金属层上方的第一钝化层，并且还具有设置在第一钝化层上的第二钝化层; 第二钝化层具有顶表面。 所述方法还包括在第二钝化层的第一部分中形成开口，并且开口暴露第一钝化层的表面的一部分。 所述方法还包括图案化第二钝化层和第一钝化层以暴露图案化顶层金属层的部分并将第二基板和第一基板彼此接合。 接合发生在至少第一钝化层的暴露部分经历脱气的温度范围内。

    Extension-mode angular velocity sensor
    66.
    发明授权
    Extension-mode angular velocity sensor 有权
    扩展模式角速度传感器

    公开(公告)号：US09052194B2

    公开(公告)日：2015-06-09

    申请号：US13966026

    申请日：2013-08-13

    Applicant: InvenSense, Inc.

    Inventor： Joseph Seeger ,  Bruno Borovic

    IPC: G01C19/00 ,  G01C19/56 ,  G01C19/5719

    CPC classification number: G01C19/5712 ,  G01C19/56 ,  G01C19/5719 ,  G01C19/574

    Abstract: An angular velocity sensor including a drive extension mode. In one aspect, an angular rate sensor includes a base and at least three masses disposed substantially in a plane parallel to the base, the masses having a center of mass. At least one actuator drives the masses in an extension mode, such that in the extension mode the masses move in the plane simultaneously away or simultaneously towards the center of mass. At least one transducer senses at least one Coriolis force resulting from motion of the masses and angular velocity about at least one input axis of the sensor. Additional embodiments can include a linkage that constrains the masses to move in the extension mode.

    Abstract translation: 包括驱动器扩展模式的角速度传感器。 一方面，角速度传感器包括基部和基本上设置在平行于基部的平面中的至少三个质量，质量块具有质心。 至少一个致动器以延伸模式驱动质量，使得在延伸模式中，质量在平面中同时移动或同时移向质心。 至少一个换能器感测由质量的运动和围绕传感器的至少一个输入轴的角速度产生的至少一个科里奥利力。 另外的实施例可以包括限制质量以伸展模式移动的连杆。

    Drive and sense balanced, semi-coupled 3-axis gyroscope
    70.
    发明授权
    Drive and sense balanced, semi-coupled 3-axis gyroscope 有权

    公开(公告)号：US11815354B2

    公开(公告)日：2023-11-14

    申请号：US17138392

    申请日：2020-12-30

    Applicant: INVENSENSE, INC.

    Inventor： Doruk Senkal ,  Robert Hennessy ,  Houri Johari-Galle ,  Joseph Seeger

    IPC: G01C19/5712 ,  G01C19/5747 ,  G01C19/5762

    CPC classification number: G01C19/5712 ,  G01C19/5747 ,  G01C19/5762

    Abstract: In a first aspect, the angular rate sensor comprises a substrate and a rotating structure anchored to the substrate. The angular rate sensor also includes a drive mass anchored to the substrate and an element coupling the drive mass and the rotating structure. The angular rate sensor further includes an actuator for driving the drive mass into oscillation along a first axis in plane to the substrate and for driving the rotating structure into rotational oscillation around a second axis normal to the substrate; a first transducer to sense the motion of the rotating structure in response to a Coriolis force in a sense mode; and a second transducer to sense the motion of the sensor during a drive mode. In a second aspect the angular rate sensor comprises a substrate and two shear masses which are parallel to the substrate and anchored to the substrate via flexible elements. In further embodiments, a dynamically balanced 3-axis gyroscope architecture is provided. Various embodiments described herein can facilitate providing linear and angular momentum balanced 3-axis gyroscope architectures for better offset stability, vibration rejection, and lower part-to-part coupling.

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