公开(公告)号：US08616791B2

公开(公告)日：2013-12-31

申请号：US13247869

申请日：2011-09-28

Applicant: Robert J. Calvet ,  Roman C. Gutierrez

Inventor： Robert J. Calvet ,  Roman C. Gutierrez

IPC: G03B17/00

CPC classification number: H02N1/006 ,  B81B3/0037 ,  B81B2201/033 ,  B81B2203/053 ,  G03B2205/0084

Abstract: A method for making an actuator device includes forming a substantially planar structure, including an outer frame with a latch foot, a fixed frame coupled to the outer frame, a latch mass coupled to the fixed frame, a latch block coupled to the latch mass by a latch block flexure, a moveable frame coupled to the outer frame, and an actuator incorporating a plurality of interdigitated teeth alternately attached to the fixed and moving frames. For operation, the latch mass is rotated downward until an upper surface of the latch block is disposed below and held in latching contact with a lower surface of the latch foot by the latch block flexure.

Abstract translation: 用于制造致动器装置的方法包括形成基本上平面的结构，包括具有闩锁脚的外框架，耦合到外框架的固定框架，耦合到固定框架的闩锁块，通过 锁定块挠曲件，联接到外框架的可移动框架，以及包括交替地附接到固定和移动框架的多个叉指齿轮的致动器。 为了操作，闩锁块向下旋转直到闩锁块的上表面设置在下方并通过闩锁块弯曲保持与闩锁脚的下表面闩锁接触。

公开(公告)号：US20130037512A1

公开(公告)日：2013-02-14

申请号：US13652851

申请日：2012-10-16

Applicant: Yu SUN ,  Keekyoung KIM

Inventor： Yu SUN ,  Keekyoung KIM

IPC: H05K13/00

CPC classification number: B81C99/002 ,  B25J9/104 ,  B81B2201/0292 ,  B81B2201/031 ,  B81B2201/033

Abstract: The present invention relates to a design and microfabrication method for microgrippers that are capable of grasping micro and nano objects of a large range of sixes and two-axis force sensing capabilities. Gripping motion is produced by one or more electrothermal actuators. Integrated force sensors along x and y directions enable the measurement of gripping forces as well as the forces applied at the end of microgripper arms along the normal direction, both with a resolution down to nanoNewton. The microfabrication method enables monolithic integration of the actuators and the force sensors.

Abstract translation: 本发明涉及一种微抓爪的设计和微细加工方法，该方法能够抓住六点和二轴力感测能力的大范围的微纳米物体。 夹持运动由一个或多个电热致动器产生。 沿x和y方向的集成力传感器可以测量夹紧力以及沿着法向方向施加在微夹臂末端的力，并且分辨率低至纳摩顿。 微加工方法可实现致动器和力传感器的整体集成。

公开(公告)号：US08317245B2

公开(公告)日：2012-11-27

申请号：US12305468

申请日：2007-06-21

Applicant: Yu Sun ,  Keekyoung Kim

Inventor： Yu Sun ,  Keekyoung Kim

IPC: B25J7/00

CPC classification number: B81C99/002 ,  B25J9/104 ,  B81B2201/0292 ,  B81B2201/031 ,  B81B2201/033

Abstract: The present invention relates to a design and microfabrication method for microgrippers that are capable of grasping micro and nano objects of a large range of sizes and two-axis force sensing capabilities. Gripping motion is produced by one or more electrothermal actuators. Integrated force sensors along x and y directions enable the measurement of gripping forces as well as the forces applied at the end of microgripper arms along the normal direction, both with a resolution down to nanoNewton. The microfabrication method enables monolithic integration of the actuators and the force sensors.

Abstract translation: 本发明涉及一种微抓爪的设计和微细加工方法，其能够抓住大范围尺寸和双轴力感测能力的微型和纳米物体。 夹持运动由一个或多个电热致动器产生。 沿x和y方向的集成力传感器可以测量夹紧力以及沿着法向方向施加在微夹臂末端的力，并且分辨率低至纳摩顿。 微加工方法可实现致动器和力传感器的整体集成。

公开(公告)号：US20120208343A1

公开(公告)日：2012-08-16

申请号：US13456990

申请日：2012-04-26

Applicant: Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

Inventor： Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

IPC: H01L21/311

CPC classification number: H01L21/76898 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00484 ,  B81C1/00896 ,  B81C2201/019 ,  G02B6/357 ,  G02B6/3584

Abstract: A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.

Abstract translation: 一种具有支撑部件和操作部件的微电子机械装置的制造方法，包括提供具有第一半导体材料层的第一半导体晶片和配置在第一层顶部的第二半导体材料层，形成 在第二层中的装置的第一支撑部分和第一操作部分，在第一层中形成临时锚固件，以及将第一晶片结合到第二晶片，第二层面向第二晶片。 在将第一晶片和第二晶片接合在一起之后，所述器件的第二支撑部件和第二操作部分形成在第一层中。 将临时锚固件从第一层移除以释放其中形成的操作部件。

公开(公告)号：US20120206785A1

公开(公告)日：2012-08-16

申请号：US13365087

申请日：2012-02-02

Applicant: Sason SOURANI ,  Moshe Medina

Inventor： Sason SOURANI ,  Moshe Medina

IPC: G02B26/08 ,  H05K13/00 ,  H02N1/00

CPC classification number: H02N1/006 ,  B81B3/0043 ,  B81B7/00 ,  B81B7/008 ,  B81B2201/033 ,  B81B2201/034 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0181 ,  B81B2203/058 ,  G02B7/1821 ,  G02B26/0841 ,  H02N1/008

Abstract: A Micro Electro Mechanical Systems (MEMS) device comprising: a rotor, comprising a first plurality of rotor teeth and a second plurality of rotor teeth, formed in at least two layers of silicon-on-insulator (SOI) substrate, wherein each rotor tooth belonging to the first plurality of rotor teeth is formed in a first layer and each rotor tooth of the second plurality of rotor teeth is formed in a second layer; and a stator comprising a first plurality of stator teeth and a second plurality of stator teeth, formed in at least two layers of SOI substrate, wherein each stator tooth belonging to the first plurality of stator teeth is formed in a first layer, and each stator tooth of the second plurality of stator teeth is formed in a second layer.

Abstract translation: 一种微机电系统（MEMS）装置，包括：转子，包括形成在至少两层绝缘体上硅（SOI）衬底中的第一多个转子齿和第二多个转子齿，其中每个转子齿 属于第一多个转子齿的第一多个转子齿形成在第一层中，并且第二多个转子齿的每个转子齿形成在第二层中; 以及定子，其包括形成在至少两层SOI衬底中的第一多个定子齿和第二多个定子齿，其中属于所述第一多个定子齿的每个定子齿形成在第一层中，并且每个定子 第二多个定子齿的齿形成在第二层中。

公开(公告)号：US08193550B2

公开(公告)日：2012-06-05

申请号：US12136722

申请日：2008-06-10

Applicant: Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

Inventor： Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

IPC: H01L31/0352 ,  G02B26/10

CPC classification number: H01L21/76898 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00484 ,  B81C1/00896 ,  B81C2201/019 ,  G02B6/357 ,  G02B6/3584

Abstract: A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.

Abstract translation: 一种具有支撑部件和操作部件的微电子机械装置的制造方法，包括提供具有第一层半导体材料的第一半导体晶片和布置在第一层顶部的第二半导体材料层，形成 在第二层中的装置的第一支撑部分和第一操作部分，在第一层中形成临时锚固件，以及将第一晶片结合到第二晶片，第二层面向第二晶片。 在将第一晶片和第二晶片接合在一起之后，所述器件的第二支撑部件和第二操作部分形成在第一层中。 将临时锚固件从第一层移除以释放其中形成的操作部件。

公开(公告)号：US08049944B2

公开(公告)日：2011-11-01

申请号：US12389399

申请日：2009-02-20

Applicant: Abdul Jaleel K. Moidu

Inventor： Abdul Jaleel K. Moidu

IPC: G02B26/08

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/058 ,  G02B6/2931 ,  G02B6/3518 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584

Abstract: A two-axis tiltable linear array of MEMS micromirrors is described. The individual micromirrors of the array are flexibly suspended over a common substrate by using two pairs of serpentine hinges coupled by a gimbal ring and are actuated by using tilt and roll electrodes. The tilt actuator regions of the micromirrors are disposed within the gimbal rings, the roll hinges connecting the tilt actuator regions to the micromirrors, which provides for decoupling of the tilt and the roll of the micromirror. The structure allows for considerable decoupling of the tilt and the roll and, or the pistoning effects observed upon micromirror actuation. The structure is suitable for application in a wavelength selective optical switch.

Abstract translation: 描述了MEMS微镜的两轴可倾斜线性阵列。 通过使用由万向环联接的两对蛇形铰链，阵列的各个微镜可以灵活地悬挂在共同的基板上，并通过使用倾斜和滚动电极来驱动。 微镜的倾斜致动器区域设置在万向环内，辊铰链将倾斜致动器区域连接到微镜，其提供微镜的倾斜和辊的解耦。 该结构允许倾斜和辊的显着解耦，或者在微镜驱动时观察到的活塞效应。 该结构适用于波长选择光开关。

公开(公告)号：US08018118B2

公开(公告)日：2011-09-13

申请号：US12145063

申请日：2008-06-24

Applicant: Osamu Tsuboi ,  Norinao Kouma ,  Hiromitsu Soneda ,  Hisao Okuda ,  Yoshihiro Mizuno ,  Tsuyoshi Matsumoto ,  Ippei Sawaki

Inventor： Osamu Tsuboi ,  Norinao Kouma ,  Hiromitsu Soneda ,  Hisao Okuda ,  Yoshihiro Mizuno ,  Tsuyoshi Matsumoto ,  Ippei Sawaki

IPC: H02N1/00 ,  G02B26/08

CPC classification number: B81B3/0078 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/0181 ,  B81B2203/058 ,  G02B26/0841

Abstract: A micro-oscillation element includes a base frame, an oscillating portion, and a link portion connecting the base frame and the oscillating portion to each other. The oscillating portion has a movable functional portion, a first driving electrode connected to the movable functional portion, and a weight portion joined to the first driving electrode. The link portion defines an axis of the oscillating motion of the oscillating portion. The second driving electrode, fixed to the base frame, generates driving force for the oscillating motion in cooperation with the first driving electrode.

Abstract translation: 微振荡元件包括基架，振荡部和将基架和振荡部彼此连接的连杆部。 振荡部分具有可移动功能部分，连接到可移动功能部分的第一驱动电极和连接到第一驱动电极的配重部分。 连杆部分限定摆动部分的摆动运动的轴线。 固定在基架上的第二驱动电极与第一驱动电极协作产生用于振荡运动的驱动力。

公开(公告)号：US20110198202A1

公开(公告)日：2011-08-18

申请号：US12708265

申请日：2010-02-18

Applicant: John E. Rogers

Inventor： John E. Rogers

IPC: H01H57/00

CPC classification number: B81B3/0056 ,  B81B3/0054 ,  B81B2201/033

Abstract: A gap closing actuator (GCA) device (200) is provided. The GCA device includes at least one device drive comb structure (202a, 202b), at least one input/output (I/O) comb structure (216a, 216b) defining an output of the GCA device, and at least one device truss comb structure (204) interdigitating the device drive comb structure and the I/O comb structure, the truss comb structure configured to move along a first motion axis (205) between a plurality of interdigitated positions based on a first bias voltage (VBIAS) applied between the truss comb structure and the device drive comb structure. The GCA device also includes a brake portion (230) configured for selectively physically engaging the device truss comb structure to fix a position of the device truss comb structure along the first motion axis.

Abstract translation: 提供间隙关闭致动器（GCA）装置（200）。 GCA设备包括至少一个设备驱动梳结构（202a，202b），限定GCA设备的输出的至少一个输入/输出（I / O）梳结构（216a，216b）和至少一个设备桁架梳 结构（204）交错设备驱动梳结构和I / O梳结构，桁架梳结构被配置为基于施加在多个叉指位置之间的第一偏置电压（VBIAS）沿第一运动轴线（205）移动 桁架梳结构和装置驱动梳结构。 GCA装置还包括制动部分（230），其构造成用于选择性地物理地接合装置桁架梳结构以固定装置桁架梳结构沿着第一运动轴的位置。

公开(公告)号：US20110186944A1

公开(公告)日：2011-08-04

申请号：US13055298

申请日：2009-06-15

Applicant: Thomas Friedrich ,  Daniel Christoph Meisel ,  Carsten Raudzis

Inventor： Thomas Friedrich ,  Daniel Christoph Meisel ,  Carsten Raudzis

IPC: H01L29/84 ,  H01L21/02

CPC classification number: B81B3/0037 ,  B81B2201/033 ,  H02N1/008

Abstract: A micromechanical structure, includes at least two structure sections configured to bound a working gap, the at least two structure sections being movable relative to one another, and a working gap width setting device configured to broaden the at least one working gap by movement of a first structure section of the at least two structure sections relative to a second structure section of the at least two structure section, the first structure section is stationary relative to a reference point during operation of the micromechanical structure and (ii) the second structure section is movable relative to the reference point during operation.

Abstract translation: 微机械结构包括至少两个构造成结合工作间隙的结构部分，所述至少两个结构部分可相对于彼此移动;以及工作间隙宽度设定装置，其经配置以通过移动所述至少一个工作间隙 所述至少两个结构部分的第一结构部分相对于所述至少两个结构部分的第二结构部分，所述第一结构部分在所述微机械结构的操作期间相对于参考点是静止的，并且所述第二结构部分是 在运行期间相对于参考点可移动。