公开(公告)号：US20140060118A1

公开(公告)日：2014-03-06

申请号：US13685782

申请日：2012-11-27

Applicant: Steven Bruce Dawes ,  Dominick Fiordimalva ,  Timothy Leonard Hunt ,  Douglas Hull Jennings

Inventor： Steven Bruce Dawes ,  Dominick Fiordimalva ,  Timothy Leonard Hunt ,  Douglas Hull Jennings

IPC: C03B37/018 ,  G02B6/036

CPC classification number: C03B37/01853 ,  C03B37/01282 ,  C03B37/014 ,  C03B2201/08 ,  C03B2201/20 ,  C03B2201/30 ,  C03B2203/22 ,  C03B2203/23 ,  G02B6/036

Abstract: Manufacturing an optical fiber by using an outside vapor deposition technique for making a substrate, applying one or more layers to the substrate using a radial pressing technique to form a soot blank, sintering the soot blank in the presence of a gaseous refractive index-modifying dopant, and drawing the sintered soot blank, provides a more efficient and cost effective process for generating complex refractive index profiles.

Abstract translation: 通过使用外部气相沉积技术制造光纤以制造基板，使用径向压制技术将一个或多个层施加到基板以形成烟灰坯料，在气体折射率修正掺杂剂的存在下烧结烟炱坯料 ，并且拉制烧结的烟炱坯料，提供了一种更有效和成本有效的生成复合折射率分布的方法。

公开(公告)号：US08629071B2

公开(公告)日：2014-01-14

申请号：US13761881

申请日：2013-02-07

Applicant: Shin-Etsu Chemical Co., Ltd.

Inventor： Shigeru Maida ,  Hisatoshi Otsuka

IPC: C03C3/06 ,  C03C3/04

CPC classification number: G03F1/22 ,  C03B19/1423 ,  C03B2201/20 ,  C03B2201/42 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/20 ,  C03C2201/42 ,  Y02P40/57

Abstract: A titania and sulfur co-doped quartz glass member is provided. Due to co-doping of titania and sulfur, the quartz glass member undergoes zero expansion at a certain temperature and low thermal expansion over a wide temperature range, and is thus suited for use in a commercial EUV lithography tool. A manufacturing method and an optical member for EUV lithography are also provided.

Abstract translation: 提供二氧化钛和硫共掺杂石英玻璃构件。 由于二氧化钛和硫的共掺杂，石英玻璃构件在宽温度范围内在一定温度下经历零膨胀和低热膨胀，因此适用于商业EUV光刻工具。 还提供了用于EUV光刻的制造方法和光学构件。

公开(公告)号：US20130115391A1

公开(公告)日：2013-05-09

申请号：US13809231

申请日：2011-07-08

Applicant: Richard Benjamin Coapes ,  Alan Mundy ,  Ian George Sayce

Inventor： Richard Benjamin Coapes ,  Alan Mundy ,  Ian George Sayce

IPC: C03B19/14

CPC classification number: C03B19/1492 ,  C03B19/1438 ,  C03B19/1453 ,  C03B19/1484 ,  C03B2201/03 ,  C03B2201/04 ,  C03B2201/20 ,  C03B2201/24 ,  C03B2201/32 ,  C03B2201/34 ,  C03B2201/36 ,  C03B2207/34 ,  C03B2207/52 ,  C03C3/06 ,  C03C2201/11 ,  C03C2201/23 ,  Y02P40/57 ,  Y10T428/131

Abstract: Hollow ingots of transparent synthetic vitreous silica glass of external diameter greater than 400 mm and internal diameter greater than 300 mm are disclosed. The ingots are substantially free from bubbles or inclusions greater than 100 μm in diameter, have no more than 100 ppB of any individual metallic impurity, and have chlorine concentration less than 5 ppM. Also disclosed are methods for producing such ingots, in which a porous soot body of density greater than 0.4 g/cm3 is deposited on an oxidation resistant mandrel. The soot body is dehydrated on a mandrel comprising graphite, carbon fibre reinforced carbon, silicon carbide, silicon impregnated silicon carbide, silicon carbide-coated graphite or vitreous silica, either under vacuum or in the presence of a reducing gas, and then sintered to transparent pore-free glass under vacuum or in an atmosphere of helium.

Abstract translation: 公开了外径大于400mm，内径大于300mm的透明合成玻璃石英玻璃的中空铸锭。 锭基本上没有直径大于100um的气泡或夹杂物，具有不超过100ppB的任何单独的金属杂质，并且氯浓度小于5ppM。 还公开了生产这种锭的方法，其中密度大于0.4g / cm 3的多孔烟灰体沉积在抗氧化心轴上。 在真空下或在还原气体存在下，烟灰体在包括石墨，碳纤维增强碳，碳化硅，硅浸渍的碳化硅，碳化硅涂覆的石墨或玻璃状二氧化硅的心轴上脱水，然后烧结成透明 无孔玻璃在真空或氦气氛中。

公开(公告)号：US08381549B2

公开(公告)日：2013-02-26

申请号：US11921418

申请日：2007-06-21

Applicant: Tetsuya Nakanishi ,  Tetsuya Haruna ,  Shinji Ishikawa

Inventor： Tetsuya Nakanishi ,  Tetsuya Haruna ,  Shinji Ishikawa

IPC: C03B37/018

CPC classification number: C03B37/01807 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/28 ,  C03B2201/31 ,  C03B2201/32 ,  C03B2207/86 ,  C03B2207/87 ,  C03C3/06 ,  C03C13/046 ,  C03C2203/40

Abstract: The present invention relates to an optical fiber preform fabricating method that makes it possible to implement a reduction in iron impurities at a low cost. The optical fiber preform fabricating method comprises a glass synthesis step for forming a glass region constituting at least a part of the core area of the optical fiber. The glass synthesis step includes a deposition step of depositing glass particles containing the Al-element inside the glass pipe by means of chemical vapor deposition, and a consolidation step of obtaining a transparent glass body from the glass soot body thus obtained. In other words, the deposition step synthesizes glass particles on the inside wall of a glass pipe by feeding raw material gas, in which the content ratio (O/Al) of the O-element and Al-element is 20 or less, into the glass pipe. Furthermore, the consolidation step obtains a transparent glass body from the glass soot body by heating the glass soot body. The transparent glass body that is formed in the consolidation step constitutes part of the core region.

Abstract translation: 本发明涉及能够以低成本实现铁杂质的还原的光纤预制体的制造方法。 光纤预制体制造方法包括玻璃合成步骤，用于形成构成光纤的核心区域的至少一部分的玻璃区域。 玻璃合成步骤包括通过化学气相沉积在玻璃管内沉积含有Al元素的玻璃颗粒的沉积步骤，以及从由此获得的玻璃烟灰体获得透明玻璃体的固结步骤。 换句话说，沉积步骤通过将O元件和Al元素的含量比（O / Al）为20以下的原料气体进料到玻璃管的内壁上而合成玻璃粒子。 玻璃管。 此外，固结步骤通过加热玻璃烟灰体从玻璃烟灰体获得透明玻璃体。 在固结步骤中形成的透明玻璃体构成核心区域的一部分。

公开(公告)号：US20130034654A1

公开(公告)日：2013-02-07

申请号：US13557248

申请日：2012-07-25

Applicant: Tetsuya Haruna ,  Masaaki Hirano ,  Yoshiaki Tamura

Inventor： Tetsuya Haruna ,  Masaaki Hirano ,  Yoshiaki Tamura

IPC: G02B6/036

CPC classification number: C03B37/01807 ,  C03B37/01211 ,  C03B37/014 ,  C03B2201/20 ,  C03B2201/50 ,  C03B2203/22 ,  C03C13/04 ,  G02B6/02014 ,  G02B6/02242 ,  G02B6/02266 ,  G02B6/03627

Abstract: A method for the manufacture of an optical fiber preform for producing a low attenuation optical fiber with high yield, comprising preparing a core rod and adding a cladding region. At the step of preparing a core rod, the core rod is produced including a first core region with Cl density of less than 600 atm-ppm, a second core region with Cl density of less than 600 atm-ppm around the first core region, and a third core region with Cl density of 3000 atm-ppm or more around the second core region. An alkali metal is selectively added to the first core region among the first, second, and third core regions. A cladding region is formed around the core rod by heating at a temperature of 1200° C. or higher for 7 hours or less.

Abstract translation: 一种用于制造用于以高产率制造低衰减光纤的光纤预制棒的方法，包括制备芯棒并添加包层区域。 在制备芯棒的步骤中，制造芯棒，其包括Cl密度小于600atm-ppm的第一芯区域，在第一芯区域附近具有小于600atm-ppm的Cl密度的第二芯区域， 以及围绕第二芯区域的Cl密度为3000atm-ppm以上的第三核心区域。 在第一，第二和第三芯区域中的第一芯区域中选择性地添加碱金属。 通过在1200℃以上的温度加热7小时以下，在芯棒周围形成包层区域。

公开(公告)号：US20120192593A1

公开(公告)日：2012-08-02

申请号：US13356984

申请日：2012-01-24

Applicant: Tetsuya HARUNA ,  Masaaki Hirano ,  Yoshiaki Tamura

Inventor： Tetsuya HARUNA ,  Masaaki Hirano ,  Yoshiaki Tamura

IPC: C03C25/12 ,  C03C25/42

CPC classification number: C03B37/01211 ,  C03B37/01413 ,  C03B37/01807 ,  C03B37/01861 ,  C03B37/01869 ,  C03B2201/07 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/50 ,  G02B6/02019 ,  G02B6/02242 ,  G02B6/02266 ,  G02B6/03611 ,  G02B6/03627

Abstract: There is provided a method for producing an optical fiber preform used in producing an optical fiber having low attenuation. The production method includes (1) a rod formation step of forming a glass rod of a silica glass containing an alkali metal element, the average concentration of the alkali metal element being 5 at·ppm or more, (2) a heat treatment step of heat-treating the glass rod, (3) a core part formation step of forming an alkali metal element-free silica glass layer having a chlorine concentration of 6000 at·ppm or more around the perimeter of the glass rod heat-treated in the heat treatment step to form a core part including the glass rod and the silica glass layer, and (4) a cladding part formation step of forming a cladding part of a silica-based glass having a lower refractive index than the core part around the perimeter of the core part.

Abstract translation: 提供了用于制造具有低衰减的光纤的光纤预制件的制造方法。 制造方法包括：（1）形成含有碱金属元素的石英玻璃的玻璃棒的棒形成工序，碱金属元素的平均浓度为5atppm以上，（2）热处理工序 对玻璃棒进行热处理，（3）在热处理的玻璃棒的周边周围形成氯浓度为6000以上的碱金属元素的二氧化硅玻璃层的芯部形成工序 处理步骤以形成包括玻璃棒和石英玻璃层的核心部分，以及（4）包层部分形成步骤，形成具有比围绕周边的核心部分的折射率低的二氧化硅基玻璃的包层部分 核心部分。

公开(公告)号：US08156761B2

公开(公告)日：2012-04-17

申请号：US13023262

申请日：2011-02-08

Applicant: Tatsuhiro Sato

Inventor： Tatsuhiro Sato

IPC: C03B19/00 ,  C03B19/01 ,  C03B19/09 ,  C03B19/06 ,  C03C3/06 ,  C03C3/11 ,  C03C3/112

CPC classification number: C03C1/00 ,  C03B19/063 ,  C03B32/005 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/24 ,  C03B2201/36 ,  C03C3/06 ,  C03C3/112 ,  C03C4/20 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/26 ,  C03C2201/32 ,  C03C2201/3411 ,  C03C2201/3435 ,  C03C2201/36

Abstract: A mixed quartz powder contains quartz powder and two or more types of doping element in an amount of from 0.1 to 20 mass %. The aforementioned doped elements include a first dope element selected from the group consisting of N, C and F, and a second dope element selected from the group consisting of Mg, Ca, Sr, Ba, Sc, Y, Ti, Zr, Hf, the lanthanides and the actinides. The “quartz powder” is a powder of crystalline quartz or it is a powder of glassy SiO2 particles. It is made form natural occurring quartz or it is fabricated synthetically. The “quartz powder” may be doped. The compounding ratio of the total amount (M1) of the aforementioned first elements and the total amount (M2) of the aforementioned second elements as the ratio of the number of atoms (M1)/(M2) is preferably from 0.1 to 20. Al as well as the aforementioned doped elements is preferably included in a mixed quartz powder of this invention.

Abstract translation: 混合石英粉含有0.1〜20质量％的石英粉和2种以上的掺杂元素。 上述掺杂元素包括选自N，C和F的第一掺杂元素和选自Mg，Ca，Sr，Ba，Sc，Y，Ti，Zr，Hf的第二掺杂元素， 镧系元素和锕系元素。 “石英粉”是结晶石英粉，或是玻璃状SiO 2粉末的粉末。 它由天然石英制成，或者由合成制成。 可以掺杂“石英粉”。 上述第一元素的总量（M1）与上述第二元素的总量（M2）的配位比优选为0.1〜20。作为原子数（M1）/（M2）的比例，优选为0.1〜20。 以及上述掺杂元素优选包括在本发明的混合石英粉末中。

公开(公告)号：US07823416B2

公开(公告)日：2010-11-02

申请号：US10576291

申请日：2004-10-19

Applicant: Shigeaki Aoki ,  Hiroki Nagai ,  Masataka Takagi

Inventor： Shigeaki Aoki ,  Hiroki Nagai ,  Masataka Takagi

IPC: C03B5/16 ,  C03B5/18 ,  C03B5/193

CPC classification number: C03C3/00 ,  C03B5/16 ,  C03B5/193 ,  C03B5/235 ,  C03B2201/20 ,  C03C1/00 ,  C03C13/00 ,  C03C2201/06 ,  C03C2203/10 ,  C03C2203/52 ,  C03C2203/54

Abstract: The glass composition of the present invention is an inorganic glass composition in which the volume ratio of helium with a mass number of 3 to helium with a mass number of 4, namely 3He/4He in the glass (0° C., 1 atm) is smaller than the volume ratio 3He/4He in the atmosphere. The method of producing a glass article of the present invention includes the steps of: melting a glass raw material by heating; homogenizing molten glass; forming the molten glass into a desired shape; and cooling the shaped glass to room temperature, in which helium with a certain mass ratio is dissolved in the glass material so that the glass article of the present invention is obtained.

Abstract translation: 本发明的玻璃组合物是玻璃（0℃，1atm）中质量数为4的氦质量数为3的氦的体积比为3He / 4He的无机玻璃组合物， 小于体积比3He / 4He在大气中。 本发明的玻璃制品的制造方法包括以下步骤：通过加热熔化玻璃原料; 均质化熔融玻璃; 将所述熔融玻璃形成为期望的形状; 将成形玻璃冷却至室温，将具有一定质量比的氦溶解在玻璃材料中，得到本发明的玻璃制品。

公开(公告)号：US07805039B2

公开(公告)日：2010-09-28

申请号：US11744327

申请日：2007-05-04

Applicant: Paul E. Sanders ,  Edward M. Dowd ,  Brian J. Pike

Inventor： Paul E. Sanders ,  Edward M. Dowd ,  Brian J. Pike

IPC: G02B6/02

CPC classification number: G02B6/03605 ,  C03B37/01853 ,  C03B2201/02 ,  C03B2201/12 ,  C03B2201/20 ,  G02B6/03627 ,  Y02P40/57

Abstract: Methods and apparatus relate to optical fibers suitable for use in sensing applications exposed to radiation environments. The fibers include a core of pure silica or chlorine doped silica surrounded by a fluorinated silica cladding. These glasses for the core and cladding utilize dopants that resist radiation-induced attenuation. A two step process for forming the cladding can achieve necessary concentrations of the fluorine by performing a soot deposition process in a different environment from a consolidation process where the soot is sintered into a glass. Concentration of fluorine doped into the cladding layer enables obtaining a numerical aperture that confines a mono-mode of the fiber to resist bend-induced attenuation. Dimensions of the fiber further facilitate bending ability of the fiber.

Abstract translation: 方法和装置涉及适用于感测暴露于辐射环境的应用的光纤。 纤维包括由氟化石英包层包围的纯二氧化硅核心或掺杂氯的二氧化硅。 用于芯和包层的这些玻璃利用了抵抗辐射诱导衰减的掺杂剂。 用于形成包层的两步法可以通过在将烟灰烧结成玻璃的固结过程的不同环境中进行烟灰沉积工艺来实现所需的氟浓度。 掺杂到包层中的氟的浓度使得能够获得限制光纤的单模以抵抗弯曲引起的衰减的数值孔径。 纤维尺寸进一步提高了纤维的弯曲能力。

公开(公告)号：US07693378B2

公开(公告)日：2010-04-06

申请号：US12170822

申请日：2008-07-10

Applicant: Kazunori Mukasa

Inventor： Kazunori Mukasa

IPC: G02B6/032 ,  B29D11/00

CPC classification number: B29D11/00663 ,  C03B37/02781 ,  C03B2201/20 ,  C03B2201/31 ,  C03B2203/14 ,  C03B2203/42 ,  G02B6/02019 ,  G02B6/02333 ,  G02B6/02338

Abstract: A holey fiber has a core region, a cladding region surrounding the core region, air holes arranged around the core region, and a connection section extending from at least one end portion of the holey fiber. A refractive index of the core region in the connection section is higher than a refractive index of the cladding region without air holes in the connection section.

Abstract translation: 多孔纤维具有芯区域，围绕芯区域的包层区域，围绕芯区域布置的气孔和从有孔纤维的至少一个端部延伸的连接部分。 连接部中的芯部区域的折射率高于连接部中没有气孔的包层区域的折射率。