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    Multiplexing EUV sources in reticle inspection
    61.
    发明授权
    Multiplexing EUV sources in reticle inspection 有权
    在掩模版检查中复用EUV源

    公开(公告)号：US08917432B2

    公开(公告)日：2014-12-23

    申请号：US13563850

    申请日：2012-08-01

    Applicant: Daniel Wack ,  Daimian Wang ,  Karl R. Umstadter ,  Ed Ma ,  Frank Chilese

    Inventor： Daniel Wack ,  Daimian Wang ,  Karl R. Umstadter ,  Ed Ma ,  Frank Chilese

    IPC: G02B26/08 ,  G03F7/20 ,  G02B26/12

    CPC classification number: G02B26/123 ,  G01N21/8806 ,  G01N2021/95676 ,  G01N2201/105 ,  G03F1/24 ,  G03F1/84 ,  G03F7/7005

    Abstract: The present disclosure is directed to an illumination system. The illumination system may include a base member rotatable about a rotation axis and a plurality of mirrors disposed on an outer surface of the base member along a perimeter of the base member. The mirrors may be oriented at a predetermined angle. The illumination system also includes at least two illumination sources. Each of the mirrors of the first plurality of mirrors is configured to receive radiation from the first illumination source at a first portion of each mirror at a first time. The mirror is configured to reflect the radiation to an optical path. Each of the mirrors is further configured to receive radiation from the second illumination source at a second portion of the mirror at a second time. The mirrors reflect the radiation from the second illumination source to the common optical path.

    Abstract translation: 本公开涉及一种照明系统。 照明系统可以包括可围绕旋转轴线旋转的基座构件和沿着基座构件的周边设置在基座构件的外表面上的多个反射镜。 反射镜可以以预定角度定向。 照明系统还包括至少两个照明源。 第一多个反射镜的每个反射镜被配置为在第一时间在每个反射镜的第一部分处接收来自第一照明源的辐射。 镜被配置为将辐射反射到光路。 每个反射镜被进一步配置成在第二时间在反射镜的第二部分处接收来自第二照明光源的辐射。 反射镜将从第二照明源的辐射反射到公共光路。

    LASER SCANNING METHOD FOR MEASURING IN VIVO SUBSTANCES
    62.
    发明申请
    LASER SCANNING METHOD FOR MEASURING IN VIVO SUBSTANCES 审中-公开
    用于测量体内物质的激光扫描方法

    公开(公告)号：US20140357969A1

    公开(公告)日：2014-12-04

    申请号：US14365609

    申请日：2012-12-17

    Applicant: RIKEN

    Inventor： Satoshi Wada ,  Kazuo Tsubota ,  Atsushi Shinjo

    IPC: A61B5/1455 ,  A61B5/145 ,  A61B3/12 ,  G01N21/65

    CPC classification number: A61B5/1455 ,  A61B3/1025 ,  A61B3/12 ,  A61B5/0068 ,  A61B5/0071 ,  A61B5/0075 ,  A61B5/14546 ,  G01N21/65 ,  G01N2021/5957 ,  G01N2021/653 ,  G01N2201/06113 ,  G01N2201/105

    Abstract: In a laser scanning method for measuring in vivo substances, wavelength of the anti-Stokes line is made greater than wavelength absorption band of the specific substance, the wavelength of the probe light is shifted from the wavelength of the anti-Stokes line by a shift amount of Raman scattering of the specific substance, and the wavelength of the Stokes light is shifted from the wavelength of the probe light by the shift amount of the Raman scattering of the specific substance. According to this, density (concentration and distribution) of lutein in an eye fundus is measured quantitatively and non-invasively from a signal strength level of the anti-Stokes line.1

    Abstract translation: 在用于体内物质测量的激光扫描方法中，反斯托克斯线的波长比特定物质的波长吸收带宽大，探针光的波长从反斯托克斯线的波长偏移了一个偏移 特定物质的拉曼散射量和斯托克斯光的波长从探测光的波长偏移特定物质的拉曼散射的偏移量。 据此，从反斯托克斯线的信号强度水平定量和非侵入地测量眼底中叶黄素的浓度（浓度和分布）。

    ILLUMINATION SYSTEM FOR DETECTING THE DEFECT IN A TRANSPARENT SUBSTRATE AND A DETECTION SYSTEM INCLUDING THE SAME
    63.
    发明申请
    ILLUMINATION SYSTEM FOR DETECTING THE DEFECT IN A TRANSPARENT SUBSTRATE AND A DETECTION SYSTEM INCLUDING THE SAME 有权
    用于检测透明基板中的缺陷的照明系统和包括其的检测系统

    公开(公告)号：US20140347657A1

    公开(公告)日：2014-11-27

    申请号：US14369384

    申请日：2011-12-31

    Applicant: Xiaofeng Guo ,  Huifen Li ,  Xiaofeng Lin ,  Xiaowei Sun ,  Wenhua Deng

    Inventor： Xiaofeng Guo ,  Huifen Li ,  Xiaofeng Lin ,  Xiaowei Sun ,  Wenhua Deng

    IPC: G01N21/88 ,  F21K99/00 ,  G01N21/958

    CPC classification number: G01N21/8806 ,  F21K9/27 ,  F21Y2103/10 ,  F21Y2115/10 ,  G01N21/896 ,  G01N21/958 ,  G01N2021/8816 ,  G01N2201/0633 ,  G01N2201/105

    Abstract: An illumination device for providing near isotropic illumination, and particularly an illumination system for detecting the defect in a transparent substrate and a detection system including the same are presented, An illumination system includes: an illumination system for detecting the defect in a transparent substrate, including light source receptacle in bar shape; first spot light sources, each emitting a respective first light, the respective first lights being substantially parallel to each other and the first spot light sources being arranged to a first line of spot light sources along the longitudinal direction of the receptacle; and second spot light sources, each emitting a respective second light, the respective second lights being substantially parallel to each other and the second spot light sources being arranged to a second line of spot light sources along the longitudinal direction of the receptacle.

    Abstract translation: 一种用于提供近似各向同性照明的照明装置，特别是用于检测透明基板中的缺陷的照明系统和包括其的检测系统。一种照明系统，包括：用于检测透明基板中的缺陷的照明系统，包括 光源插座为棒状; 第一点光源，每个发射各自的第一光，各个第一光基本上彼此平行，并且第一点光源沿着插座的纵向布置到第一线点光源; 以及第二点光源，每个发射各自的第二光，所述各个第二光基本上彼此平行，并且所述第二点光源沿着所述插座的纵向布置到第二线点光源。

    Motion Control Systems and Methods For Biosensor Scanning
    65.
    发明申请
    Motion Control Systems and Methods For Biosensor Scanning 有权
    运动控制系统和生物传感器扫描方法

    公开(公告)号：US20130063724A1

    公开(公告)日：2013-03-14

    申请号：US13613141

    申请日：2012-09-13

    Applicant: Cameron John Tovey

    Inventor： Cameron John Tovey

    IPC: G01B11/00

    CPC classification number: G01N21/253 ,  G01N21/774 ,  G01N2021/7773 ,  G01N2021/7793 ,  G01N2021/7796 ,  G01N2201/10 ,  G01N2201/1042 ,  G01N2201/105

    Abstract: Motion control system and method for biosensor scanning that include inputting to a multi-axis motion controller move commands associated with the scan path as defined by multiple axes. The multiple axes including an x-baseline coordinate x0, a y-baseline coordinate y0, an x-direction oscillation amplitude x1, a y-direction oscillation amplitude y1, an oscillation frequency f and a phase φ. The multi-axis motion controller outputs digital commanded positions for each of the multiple axes. A post-processor receives the commanded positions and generates parameterized commanded positions x and y that each include a baseline motion component and an oscillating motion component. The parameterized commanded positions cause the scanning optical system to deflect the light beam to scan the beam spot over the scan path to scan the biosensor.

    Abstract translation: 用于生物传感器扫描的运动控制系统和方法包括向多轴运动控制器输入移动与由多个轴定义的扫描路径相关联的命令。 多个轴包括x基线坐标x0，y基线坐标y0，x方向振荡振幅x1，y方向振荡振幅y1，振荡频率f和相位＆phgr。 多轴运动控制器为每个多轴输出数字指令位置。 后处理器接收命令位置并产生每个包括基线运动分量和振荡运动分量的参数化指令位置x和y。 参数化的命令位置使得扫描光学系统偏转光束以扫描扫描路径上的束斑以扫描生物传感器。

    IN-LINE ANGULAR OPTICAL MULTI-POINT SCATTEROMETRY FOR NANOMANUFACTURING SYSTEMS
    70.
    发明公开
    IN-LINE ANGULAR OPTICAL MULTI-POINT SCATTEROMETRY FOR NANOMANUFACTURING SYSTEMS 审中-公开

    公开(公告)号：US20240159669A1

    公开(公告)日：2024-05-16

    申请号：US17773115

    申请日：2020-10-30

    Applicant: UNM RAINFOREST INNOVATIONS

    Inventor： Steven R.J. BRUECK ,  Alexander NEUMANN ,  Juan Jose FARIA BRICENO

    IPC: G01N21/47

    CPC classification number: G01N21/47 ,  G01N2021/4735 ,  G01N2021/4792 ,  G01N2201/105

    Abstract: A method and system for high-speed 2Θ multi-point scatterometry is disclosed. The method includes directing a laser beam from a laser light source to a collimation optical system that collimates the laser beam to a collimated laser beam; adjusting a polarization of the collimated laser beam using a polarization control optics; directing the collimated laser beam that is polarized by a first optical system to illuminate a focal area on a sample surface; receiving reflected light from the focus of the laser light source at the sample surface by a second optical system; detecting the reflected light by a detector system to produce detection signals; and processing the detection signals to measure parameters of the sample surface.

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