MUELLER MATRIX ELLIPSOMETER
    64.
    发明公开

    公开(公告)号:US20240011894A1

    公开(公告)日:2024-01-11

    申请号:US18218692

    申请日:2023-07-06

    CPC classification number: G01N21/211 G01N2021/215 G01N2021/214 G01N2201/126

    Abstract: Embodiments of the present invention relate to an ellipsometer that includes a combination of a plurality of reflective devices to measure a Mueller matrix reflectance of a material in the VUV and EUV region. Ellipsometer in accordance with embodiments of the present invention relate to an ellipsometer that includes a multi-mirror polarization state generator combined with a multi-mirror polarization state analyzer and a detector to realize a Mueller matrix ellipsometer. Embodiments of the present invention utilize two rotating assemblies with each assembly including multiple mirrors that combine to act as amplitude and phase retarders.

    Auto-focussing LIBS system
    66.
    发明授权

    公开(公告)号:US11781990B2

    公开(公告)日:2023-10-10

    申请号:US17441910

    申请日:2020-04-05

    Abstract: A LIBS analysis system comprises a focusing lens arrangement having a focal plane; a laser for propagating a laser beam through the focusing lens arrangement to be focused at the focal plane; a detector for generating an output that is proportional to an intensity of incident electromagnetic radiation that is incident on the detector; a translation mechanism configured to cause a relative movement of the sample holder and the focusing lens arrangement to vary a position of the focal plane along the optical path with respect to the sample holder; and a controller configured to automatically control the translation mechanism to cause the relative movement of the sample holder and the focusing lens arrangement to achieve an optimum position at which the focal plane and an analysis region of the upper surface intersecting the optical path are at or are close to coincidence.

    STATE DETECTION SYSTEM
    67.
    发明公开

    公开(公告)号:US20230147767A1

    公开(公告)日:2023-05-11

    申请号:US17918813

    申请日:2021-04-02

    CPC classification number: G01N21/55 G01N22/04 G01N2201/126

    Abstract: A state detection system includes a sensor (10) that includes an electromagnetic wave reflecting material (13) and a resonator (11) disposed adjacent to or integrally with the electromagnetic wave reflecting material (13), and that detects a state change of a surrounding object or surrounding environment as a change in its own electromagnetic wave reflection characteristic, a reader (20) that transmits an electromagnetic wave to the sensor (10), that receives a reflected wave of the electromagnetic wave, and that acquires reflected wave spectrum information of the sensor (10), and an analysis device (30) that estimates a current state of a detection target of the sensor (10) by applying information regarding reflected wave intensities at a plurality of frequency positions of the reflected wave spectrum to a learning model (30D) generated in advance on a basis of training data of a reflected wave spectrum for each state of the sensor (10).

    SPECTRUM DISPLAY METHOD AND SYSTEM WITH PHOTOGRAPHIC FUNCTION

    公开(公告)号:US20180097998A1

    公开(公告)日:2018-04-05

    申请号:US15817194

    申请日:2017-11-18

    Abstract: A spectrum display method with photographic function includes collecting spectrum data and image data of a sample measurement device, controlling to display the spectrum data and the image data, recording the image data of the sample measurement device according to commands of shooting or recording the sample measurement device, associating the image data with the spectrum data, putting the associated data into an experiment image storage window, and performing operations of viewing, comparing, or editing the associated data; or saving the associated data as a record file; and loading the saved record file for performing the operations of viewing, comparing, or editing the record file. The image data includes photo data generated by shooting the sample measurement device or recorded video data generated by recording of the sample measurement device. A spectrum display system with photographic function is also provided.

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