公开(公告)号：US20130169140A1

公开(公告)日：2013-07-04

申请号：US13667203

申请日：2012-11-02

Applicant: Samsung Electronics Co., Ltd.

Inventor： Woo-Seok KO ,  Yu-Sin YANG ,  Sue-Jin CHO ,  Won-Don JOO ,  Min-Kook KIM ,  Sang-Kil LEE ,  Byeong-Hwan JEON

IPC: H05H1/46 ,  H01J65/04

CPC classification number: H01J65/04

Abstract: A broadband light illuminator of an optical inspector for optically detecting defects of an inspection object may include an electrode-less chamber including a plasma area from which broadband light is generated; a first energy provider, exterior to the chamber, configured to provide first energy for ionizing high pressure gases to form ionized gases in the chamber; a second energy provider, exterior to the chamber, configured to provide second energy for transforming the ionized gases into a plasma state to form the plasma area at a central portion of the chamber; an elliptical reflector having a first focus at which the chamber is positioned and a second focus such that the broadband light is reflected from the elliptical reflector toward the second focus; and a lens unit focusing the reflected broadband light onto the inspection object to form an inspection light for detecting the defects of the inspection object.

Abstract translation: 用于光学检测检查对象的缺陷的光学检查器的宽带照明器可以包括：无电极室，包括产生宽带光的等离子体区域; 第一能量提供者，在室外，被配置为提供第一能量，用于离子化高压气体以在室中形成离子化气体; 第二能量供应器，室外，被配置为提供第二能量，用于将电离气体转换成等离子体状态，以在室的中心部分形成等离子体区域; 具有第一焦点的椭圆形反射器，室被定位，第二焦点使得宽带光从椭圆形反射器反射到第二焦点; 以及透镜单元，将反射的宽带光聚焦到检查对象上，以形成用于检测检查对象的缺陷的检查光。

公开(公告)号：US20120176028A1

公开(公告)日：2012-07-12

申请号：US13004868

申请日：2011-01-11

Applicant: Douglas A. Doughty

Inventor： Douglas A. Doughty

IPC: H01J65/04 ,  H01J9/38 ,  H01J61/20 ,  H01J9/00 ,  H01J61/16 ,  H01J61/12

CPC classification number: H01J9/34 ,  H01J9/385 ,  H01J9/395 ,  H01J9/40 ,  H01J9/42 ,  H01J61/12 ,  H01J61/33 ,  H01J65/042

Abstract: A plasma lamp apparatus. The apparatus has an arc tube structure having an inner region and an outer region in one or more embodiments. The arc tube structure has a first end comprising an associated first end diameter and a second end comprising a second end diameter according to a specific embodiment. The apparatus also has a center region provided between the first end and the second end in one or more embodiments. The center region has a center diameter, which is less than a first end diameter and/or a second end diameter.

Abstract translation: 一种等离子体灯装置。 该装置具有在一个或多个实施例中具有内部区域和外部区域的电弧管结构。 电弧管结构具有包括相关联的第一端直径的第一端和根据具体实施例的包括第二端直径的第二端。 在一个或多个实施例中，设备还具有设置在第一端和第二端之间的中心区域。 中心区域具有小于第一端直径和/或第二端直径的中心直径。

公开(公告)号：US08198792B2

公开(公告)日：2012-06-12

申请号：US12311107

申请日：2007-09-25

Applicant: Yoshinori Tsuzuki ,  Kazuhiko Sakai ,  Kohji Hiramatsu ,  Atsunori Okada

Inventor： Yoshinori Tsuzuki ,  Kazuhiko Sakai ,  Kohji Hiramatsu ,  Atsunori Okada

IPC: H01J65/04

CPC classification number: H01J65/048 ,  H01J5/56 ,  H01J61/30

Abstract: The electrodeless discharge lamp comprises: a bulb provided with a substantially-spherical spherical portion and a neck portion extending from the spherical portion; a base connected to the neck portion; a protrusion formed at an apex of the spherical portion; and an induction coil that causes light emission by discharge developed in the bulb. The electrodeless discharge lamp satisfies the formula below: t−6□10959×X+25□t+6  (Formula) where X=(B×S)/(L×A), B=W/(4×π×(D/20)2), S=π×(d/20)2, L=π×(d/10), W (W) denotes the lamp input power, D (mm) denotes the diameter of the spherical portion, d (mm) denotes the diameter of a portion at a joint surface between the neck portion and the base, and A (mm) denotes the distance from a largest-diameter portion of the spherical portion to the joint surface, and t is the temperature (° C.) at the tip of the protrusion during downward stable lighting of the electrodeless discharge lamp.

Abstract translation: 无电极放电灯包括：灯泡，设置有大致球形的球形部分和从球形部分延伸的颈部部分; 连接到颈部的基座; 形成在所述球状部的顶点的突起部; 以及通过在灯泡中产生的放电引起发光的感应线圈。 无电极放电灯满足下式：t-6□10959×X + 25□t + 6（式）其中X =（B×S）/（L×A），B = W /（4×＆ （D / 20）2），S =＆pgr;×（d / 20）2，L =＆pgr;×（d / 10），W（W）表示灯输入功率，D（mm） 球形部分d（mm）表示颈部与基部之间的接合面的部分的直径，A（mm）表示从球形部的最大直径部到接合面的距离，t 是在无电极放电灯的向下稳定照明期间在突起的尖端处的温度（℃）。

公开(公告)号：US20120119648A1

公开(公告)日：2012-05-17

申请号：US13319347

申请日：2010-05-06

Applicant: Andrew Simon Neate

Inventor： Andrew Simon Neate

IPC: H01J7/46 ,  H01J65/04

CPC classification number: H01J65/044 ,  H05B41/2806 ,  Y02B20/22

Abstract: An electrodeless, microwave lamp has a magnetron as a microwave source and an excitable material lucent crucible in whose excitable material a plasma is established. For coupling microwaves from the magnetron into the crucible, an air wave guide coupling circuit is provided, with an output of the magnetron as an input at one quarter lambda from one end and an output at one quarter from the other end as an input to a connection to the crucible.

Abstract translation: 无电极微波灯具有作为微波源的磁控管和可兴奋材料的可激发材料，其可兴奋材料是等离子体。 为了将来自磁控管的微波耦合到坩埚中，提供了一种空气波导耦合电路，其中磁控管的输出作为一端的四分之一λ的输入，另一端的四分之一的输出作为输入 连接坩埚。

公开(公告)号：US20120086334A1

公开(公告)日：2012-04-12

申请号：US13250063

申请日：2011-09-30

Applicant: Marc DeVincentis

Inventor： Marc DeVincentis

IPC: H01J65/04

CPC classification number: H05B41/2806 ,  H01J65/044 ,  H01J65/048 ,  Y02B20/22

Abstract: An electrodeless plasma lamp is provided. The lamp includes a conductive enclosure including a dielectric material (e.g., air) and a bulb containing a fill to form a light emitting plasma. A radio frequency (RF) power source is coupled into to the enclosure. At least one conductive applicator applies power from the enclosure to the bulb and at least one limped inductive element is coupled between the RF feed and applicator. The lumped inductive element may be a helically wound coil. In an example embodiment, the lamp includes first and second lumped inductive elements. The first and second lumped inductive elements may extend from opposed end walls of the enclosure. The first lumped inductive element may be connected to a first conductive applicator located proximate a first end of the bulb and the second lumped inductive element may be connected to a second conductive applicator located proximate a second end of the bulb.

Abstract translation: 提供无电极等离子灯。 灯包括导电外壳，其包括电介质材料（例如空气）和包含填充物以形成发光等离子体的灯泡。 射频（RF）电源耦合到外壳。 至少一个导电施加器将来自外壳的电力施加到灯泡，并且至少一个限流电感元件耦合在RF馈送器和施加器之间。 集中的电感元件可以是螺旋缠绕的线圈。 在示例性实施例中，灯包括第一和第二集总电感元件。 第一和第二集总电感元件可以从外壳的相对端壁延伸。 第一集总电感元件可以连接到位于灯泡的第一端附近的第一导电施加器，并且第二集总电感元件可以连接到位于灯泡的第二端附近的第二导电施加器。

公开(公告)号：US07906911B2

公开(公告)日：2011-03-15

申请号：US12149447

申请日：2008-05-01

Applicant: Charles H. Wood ,  Kevin Lascola ,  David A. Sprankle ,  George Jarrard

Inventor： Charles H. Wood ,  Kevin Lascola ,  David A. Sprankle ,  George Jarrard

IPC: H01J65/04

CPC classification number: F26B3/28

Abstract: A luminaire reflector comprises a first end reflector segment, a second end reflector segment, and a main reflector segment bonded together as a single-piece. The main reflector segment, the first end reflector segment, and the second end reflector segment form a microwave cavity that can accommodate a microwave-powered bulb. The luminaire reflector is configured to be mated to at least one waveguide of a luminaire assembly. The luminaire reflector comprises at least one RF coupling slot to transmit microwave energy from the waveguide side to the microwave cavity side of the reflector assembly.

Abstract translation: 照明器反射器包括第一端反射器部分，第二端部反射器部分和作为单件粘结在一起的主反射器部分。 主反射器段，第一端反射器段和第二端反射器段形成可容纳微波功率的灯泡的微波空腔。 照明器反射器被配置为与灯具组件的至少一个波导配合。 照明器反射器包括至少一个RF耦合槽，以将微波能量从波导侧传输到反射器组件的微波腔侧。

公开(公告)号：US20100270940A1

公开(公告)日：2010-10-28

申请号：US12833062

申请日：2010-07-09

Applicant: Yutaka Takada ,  Makoto Inoguchi

Inventor： Yutaka Takada ,  Makoto Inoguchi

IPC: H05B41/24 ,  H01J65/04

CPC classification number: H01J65/044 ,  H01J61/103

Abstract: A lamp includes a light emitter enclosing a material emitting light upon receiving irradiation of microwave, and a coil formed on an outer side of the light emitter. In the lamp, a position of the coil with respect to the light emitter is changed in response to a temperature.

Abstract translation: 灯包括在接收微波照射时封闭材料发射光的发光体，以及形成在发光体的外侧的线圈。 在灯中，线圈相对于发光体的位置响应于温度而改变。

公开(公告)号：US20100270920A1

公开(公告)日：2010-10-28

申请号：US12780908

申请日：2010-05-16

Applicant: Andrew Simon Neate

Inventor： Andrew Simon Neate

IPC: H01J65/04 ,  H01J61/30

CPC classification number: H01J65/044

Abstract: A lucent plasma crucible having a closed body for enclosing a fill material filled in a void formed within the closed body and enclosed by the closed body, the fill material being excitable by microwave energy to generate a light-emitting plasma. The crucible is dimensioned to have low order TE or TM microwave mode properties. The orders of the modes are 0, 1 or 2. Crucibles may be regular or irregular in shape. For circular cylindrical crucibles having diameter (d) in cm, length (l) in cm, and operating frequency (f) in MHZ, (d/l)2 is between 0 and 100, and (d×f)2 is between 0 and 2×109. Also 0

Abstract translation: 一种透明等离子体坩埚，其具有封闭的主体，用于封闭填充在封闭体内形成的封闭空隙中的填充材料，并由封闭体封闭，填充材料可被微波能量激发以产生发光等离子体。 坩埚的尺寸设计为具有低阶TE或TM微波模式属性。 模式的顺序为0,1或2.坩埚的形状可能是规则的或不规则的。 对于直径（d）为cm，长度（l）（cm）和工作频率（f）在MHZ中的圆柱形坩埚，（d / l）2为0至100，（d×f）2为0 和2×109。 也可以使用0 <（d / l）2 <20和0 <（d×f）2 <1.5×109。

公开(公告)号：US20100237777A1

公开(公告)日：2010-09-23

申请号：US12599799

申请日：2008-04-18

Applicant: Hong-Seub Kim ,  Hyeon-Dong Shin

Inventor： Hong-Seub Kim ,  Hyeon-Dong Shin

IPC: H01J65/04

CPC classification number: H01J37/321 ,  H01J37/32082 ,  H01J37/32091

Abstract: Provided is a plasma generating apparatus. The apparatus includes a vacuum chamber, an ElectroStatic Chuck (ESC), an antenna holder. The vacuum chamber has a hollow interior and is sealed at its top a by a vacuum plate that has a through-hole at its center. The ESC is disposed at an internal center of the vacuum chamber. The antenna unit is disposed within the vacuum chamber under the vacuum plate. The antenna cover covers and is coupled to a top of the antenna unit and receives and forwards an external source RF to the antenna unit. The cover holder is caught by an upper surface of the vacuum plate and suspends and holds the antenna unit.

Abstract translation: 提供了一种等离子体产生装置。 该装置包括一个真空室，一个静电卡盘（ESC），一个天线座。 真空室具有中空的内部，并通过在其中心具有通孔的真空板在其顶部a密封。 ESC设置在真空室的内部中心。 天线单元设置在真空室下的真空室内。 天线盖覆盖并耦合到天线单元的顶部，并接收并转发外部源RF到天线单元。 盖保持器被真空板的上表面卡住并悬挂并保持天线单元。

公开(公告)号：US07701143B2

公开(公告)日：2010-04-20

申请号：US11553699

申请日：2006-10-27

Applicant: Marc DeVincentis

Inventor： Marc DeVincentis

IPC: H01J65/04

CPC classification number: H01P7/10 ,  H01J65/044 ,  Y02B20/22

Abstract: A plasma lamp for an electrodeless plasma lamp having a compact dielectric waveguide body. Example embodiments may use a shaped body to allow operation at a lower frequency (or at the same frequency with a body of smaller volume) than a solid cylindrical or rectangular waveguide body having the same dielectric constant. The diagonal or diameter of a cross section used for a particular frequency or range of frequencies may be reduced by shaping the waveguide.

Abstract translation: 一种具有紧凑的电介质波导体的无电极等离子体灯的等离子体灯。 示例性实施例可以使用成形体以比具有相同介电常数的实心圆柱形或矩形波导体更低频率（或与体积较小的体积相同的频率）进行操作。 用于特定频率或频率范围的横截面的对角线或直径可以通过使波导成形来减小。