公开(公告)号：US20110182150A1

公开(公告)日：2011-07-28

申请号：US13122464

申请日：2009-10-01

Applicant: Yuval Cohen ,  Shay Kaplan ,  Daniel Lewin ,  Alex Sromin ,  Meir Ben Simon

Inventor： Yuval Cohen ,  Shay Kaplan ,  Daniel Lewin ,  Alex Sromin ,  Meir Ben Simon

IPC: H04R19/00

CPC classification number: H04R19/005 ,  B81B3/0021 ,  B81B2201/0257 ,  B81B2201/033 ,  B81B2203/053 ,  H02N1/006 ,  H04R1/005 ,  H04R1/403 ,  H04R3/002 ,  H04R3/007 ,  H04R3/12 ,  H04R7/18 ,  H04R19/02 ,  H04R31/00 ,  H04R2201/401

Abstract: Actuator apparatus comprising at least one moving elements, each comprising comb drive apparatus including at least first and second comb elements at least one of which is free to be in motion in a medium, and a controller controlling the motion responsive to an input signal representing a desired sound.

Abstract translation: 致动器装置包括至少一个移动元件，每个移动元件包括梳状驱动装置，其至少包括第一和第二梳状元件，其中至少一个可以在介质中自由运动;以及控制器，响应于表示 所需的声音。

公开(公告)号：US07923894B2

公开(公告)日：2011-04-12

申请号：US12447503

申请日：2007-12-03

Applicant: Hiroshi Obi ,  Hironori Tomita ,  Akira Kurozuka

Inventor： Hiroshi Obi ,  Hironori Tomita ,  Akira Kurozuka

IPC: G02B26/08 ,  H02N1/00

CPC classification number: G02B26/0841 ,  B81B3/007 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/058 ,  B81B2207/07 ,  H02N1/006 ,  H04N1/113 ,  H04N2201/0082

Abstract: The present invention is directed to a bi-axial pivoting type actuator having a first movable section, a second movable section supporting the first movable section, and backlining. A first conductive portion and a second conductive portion for independently applying a driving voltage to each of the first movable section and the second movable section are provided on the second movable section, in a state of being split by isolation trenches and being stabilized by the backlining provided under the second movable section. By providing such backlining, mutual stabilization of the first conductive portion and the second conductive portion in an electrically isolated state, and simplification of the production steps for the actuator are realized. By providing a mirror on the first conductive portion of the actuator of the present invention as such, it becomes possible to provide a bi-axial pivoting type mirror device through a simple production process.

Abstract translation: 本发明涉及具有第一可移动部分，支撑第一可移动部分的第二可动部分和背衬的双轴向枢转型致动器。 第一可动部分和第二导电部分，用于独立施加驱动电压到第一可移动部分和第二可移动部分中的每一个，在被隔离沟槽分开的状态下设置在第二可动部分上，并且通过背衬 设置在第二可移动部分下方。 通过在电气隔离状态下提供这种背衬，相互稳定的第一导电部分和第二导电部分，并且实现致动器的制造步骤的简化。 通过在本发明的致动器的第一导电部分上设置反射镜，可以通过简单的制造工艺提供双轴向枢转型反射镜装置。

公开(公告)号：US20110050251A1

公开(公告)日：2011-03-03

申请号：US12846314

申请日：2010-07-29

Applicant: Axel FRANKE ,  Alexander Buhmann ,  Marian Keck

Inventor： Axel FRANKE ,  Alexander Buhmann ,  Marian Keck

IPC: G01R27/26

CPC classification number: G01P15/125 ,  B81B3/0094 ,  B81B2201/0221 ,  B81B2201/0235 ,  B81B2201/033 ,  G01D5/2412 ,  H02N1/008

Abstract: A capacitive sensor and a capacitive actuator having at least one seismic mass deflectably mounted on a substrate. A comb electrode having comb fingers is mounted on the seismic mass, and a comb electrode having comb fingers is mounted on the substrate in such a way that the comb fingers are situated parallel to a deflection direction of the seismic mass and interlock in a comb-like manner. The characteristic curve of the sensor or actuator is adjusted by optimizing the geometry of at least one comb electrode, in particular of at least one comb finger.

Abstract translation: 电容式传感器和电容式致动器，其具有可偏转地安装在基板上的至少一个地震质量块。 具有梳齿的梳状电极安装在地震块上，并且具有梳齿的梳形电极以这样的方式安装在基底上，使得梳齿平行于抗震块的偏转方向定位， 喜欢的方式 通过优化至少一个梳状电极，特别是至少一个梳齿的几何形状来调节传感器或致动器的特性曲线。

公开(公告)号：US07893596B2

公开(公告)日：2011-02-22

申请号：US12761123

申请日：2010-04-15

Applicant: Osamu Tsuboi ,  Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto

Inventor： Osamu Tsuboi ,  Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto

IPC: H02N2/00

CPC classification number: B81B3/0086 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/058 ,  G02B26/0841

Abstract: A micro movable device suitable for suppressing deterioration of driving characteristics, and a micro movable device array including such a micro movable device are provided. The micro movable device (X1) of the present invention includes a movable portion including a first driving electrode, a second driving electrode for generating electrostatic attraction between the first driving electrode and the second driving electrode, a first conductor portion (22c) electrically connected to the first driving electrode, a second conductor portion (22b) electrically connected to the second driving electrode, and a third conductor portion (21a) which is not electrically connected to the first and the second driving electrodes and which is bonded to the first conductor portion (22c) via an insulating film (23) and bonded to the second conductor portion (22b) via the insulating film (23).

Abstract translation: 提供一种适用于抑制驱动特性的劣化的微型可移动装置，以及包括这种微型可移动装置的微型可移动装置阵列。 本发明的微型可移动装置（X1）包括可动部，包括第一驱动电极，用于在第一驱动电极和第二驱动电极之间产生静电吸引力的第二驱动电极，第一导体部分（22c），电连接到 第一驱动电极，与第二驱动电极电连接的第二导体部分（22b）和不与第一和第二驱动电极电连接并且连接到第一导体部分的第三导体部分（21a） （22c）经由绝缘膜（23）经由绝缘膜（23）与第二导体部（22b）接合。

公开(公告)号：US07847995B2

公开(公告)日：2010-12-07

申请号：US12500665

申请日：2009-07-10

Applicant: Takashi Shimizu ,  Kazuyuki Mori

Inventor： Takashi Shimizu ,  Kazuyuki Mori

IPC: G02B26/08 ,  G02B26/00 ,  G02B6/26

CPC classification number: G02B26/0841 ,  B81B3/0086 ,  B81B2201/033

Abstract: A micro electro mechanical system device includes a fixed electrode that includes a first electrode group, and a movable electrode that moves with respect to the fixed electrode as voltage is applied and includes a second electrode group that opposes the first electrode group, wherein electrodes of at least one among the first electrode group and the second electrode group are connected via a resistor.

Abstract translation: 微电子机械系统装置包括：固定电极，其包括第一电极组;以及可动电极，其在施加电压时相对于固定电极移动，并且包括与所述第一电极组相对的第二电极组， 第一电极组和第二电极组中的至少一个经由电阻器连接。

公开(公告)号：US07715076B2

公开(公告)日：2010-05-11

申请号：US11945307

申请日：2007-11-27

Applicant: AbdulJaleel K. Moidu

Inventor： AbdulJaleel K. Moidu

IPC: G02B26/08

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/058

Abstract: A hybrid electro-static actuator for rotating a two-dimensional micro-electro-mechanical micro-mirror device about two perpendicular axes includes a vertical comb drive for rotating the micro-mirror about a tilt axis, and a parallel plate drive for rotating the micro-mirror about a roll axis. The rotor comb fingers of the comb drive extend from a sub-frame of the micro-mirror, which is only rotatable about the tilt axis, while one of the parallel plate electrodes is mounted on the underside of a main platform, which generally surrounds the sub-frame. The vertical comb drive rotates both the sub-frame and the main platform about the tilt axis, while the parallel plate drive only rotates the main platform about the roll axis.

Abstract translation: 用于围绕两个垂直轴旋转二维微机电微反射镜装置的混合静电致动器包括用于围绕倾斜轴旋转微镜的垂直梳齿驱动器和用于旋转微型 - 关于卷轴的镜像。 梳状驱动器的转子梳齿从微镜的子框架延伸，该微镜仅能绕倾斜轴线旋转，而平行板电极中的一个安装在主平台的下侧，主平台通常围绕 子框架 垂直梳齿驱动器使副框架和主平台围绕倾斜轴线旋转，而平行板驱动器仅使主平台围绕辊轴线旋转。

公开(公告)号：US20090315217A1

公开(公告)日：2009-12-24

申请号：US12486749

申请日：2009-06-18

Applicant: Yoshitaka Zaitsu ,  Chienliu Chang ,  Masao Majima ,  Hironobu Maeda

Inventor： Yoshitaka Zaitsu ,  Chienliu Chang ,  Masao Majima ,  Hironobu Maeda

IPC: B29C53/84

CPC classification number: B81C1/00634 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/019 ,  G02B26/0833 ,  Y10T29/49833 ,  Y10T29/49861 ,  Y10T29/49908

Abstract: In a method of fabricating a structure by plastically deforming a processing portion provided at a movable segment, a restraint segment configured to restrain movement of the movable segment is provided before an external force is applied to the processing portion. After processing of the processing portion is completed, the restraint segment is removed.

Abstract translation: 在通过使设置在可移动部分处的处理部分发生塑性变形来制造结构的方法中，在对加工部分施加外力之前，设置限制可动部分的移动的约束部分。 在处理部分的处理完成之后，约束段被去除。

公开(公告)号：US07476950B2

公开(公告)日：2009-01-13

申请号：US11352200

申请日：2006-02-13

Applicant: Norinao Kouma ,  Osamu Tsuboi ,  Hiromitsu Soneda ,  Satoshi Ueda

Inventor： Norinao Kouma ,  Osamu Tsuboi ,  Hiromitsu Soneda ,  Satoshi Ueda

IPC: H01L27/14 ,  H01L29/82 ,  H01L29/84

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/047 ,  B81B2203/0109 ,  B81B2203/058

Abstract: A micro-oscillating element includes a frame, a movable functional portion, and a torsional joint for joining the frame and the functional portion. The micro-oscillating element also includes first and second comb-tooth electrodes for generation of the driving force for the oscillating motion of the movable functional portion about the torsional joint. The first comb-tooth electrode includes a plurality of first electrode teeth each having a first conductor, an insulator and a second conductor laminated in the direction of the oscillating motion, where the first conductor and the second conductor are electrically connected with each other. The second comb-tooth electrode includes a plurality of second electrode teeth caused not to face the second conductor but to face the first conductor of the first electrode teeth during non-operation. The second electrode teeth are longer than the first conductor in the direction of the oscillating motion.

公开(公告)号：US07439184B2

公开(公告)日：2008-10-21

申请号：US11371089

申请日：2006-03-09

Applicant: Norinao Kouma ,  Osamu Tsuboi ,  Hiromitsu Soneda ,  Satoshi Ueda

Inventor： Norinao Kouma ,  Osamu Tsuboi ,  Hiromitsu Soneda ,  Satoshi Ueda

IPC: H01L21/311

CPC classification number: B81C1/00547 ,  B81B2201/033

Abstract: A pair of comb-teeth electrodes are made from a material substrate including a first conduction layer, a second conduction layer and an intervening insulation layer. The paired electrodes includes first and second comb-teeth electrodes. The first comb-teeth electrode is composed of a first conductor derived from the first conduction layer, a second conductor derived from the second conduction layer and an insulator derived from the insulation layer. The second comb-teeth electrode is derived from the second conduction layer.

Abstract translation: 一对梳齿电极由包括第一导电层，第二导电层和中间绝缘层的材料基板制成。 成对电极包括第一和第二梳齿电极。 第一梳齿电极由衍生自第一导电层的第一导体，源自第二导电层的第二导体和源自绝缘层的绝缘体构成。 第二梳齿电极源自第二导电层。

公开(公告)号：US20080192406A1

公开(公告)日：2008-08-14

申请号：US11917810

申请日：2006-07-06

Applicant: Ghislain Despesse ,  Jean-Jacques Chaillout ,  Thomas Jager

Inventor： Ghislain Despesse ,  Jean-Jacques Chaillout ,  Thomas Jager

IPC: H01G5/00 ,  H01G7/00

CPC classification number: H01G5/16 ,  B81B3/0086 ,  B81B2201/033 ,  G01C19/56 ,  G01P15/125 ,  G01P2015/0814

Abstract: A capacitive device comprising at least one first and one second comb, respectively provided with interdigital fingers, adapted to be mobile relative to each other depending on the closing-spacing apart of the axes of the fingers, at least one finger of the first comb including a face opposite a face of a finger of the second comb wherein the axis of the finger of the first comb and the axis of the finger of the second comb are inclined relative to a plane orthogonal to the first direction of displacement of the combs, the plane being defined by the second and third directions perpendicular to the direction, and perpendicular to each other.

Abstract translation: 一种电容式装置，包括分别设置有叉指的至少一个第一梳和第二梳，适于相对于彼此移动，取决于手指的轴线的闭合间隔，第一梳的至少一个手指包括 与第二梳子的手指的面相反的面，其中第一梳子的手指的轴线和第二梳子的手指的轴线相对于与梳子的第一移位方向正交的平面倾斜， 平面由垂直于方向的第二和第三方向限定，并且彼此垂直。