System and method for drug delivery and microfluidic applications using microneedles
    71.
    发明授权
    System and method for drug delivery and microfluidic applications using microneedles 失效
    使用微针的药物递送和微流体应用的系统和方法

    公开(公告)号:US07560036B2

    公开(公告)日:2009-07-14

    申请号:US11133245

    申请日:2005-05-20

    Abstract: The invention relates to a method of fabricating a microneedle array in a substrate, a drug delivery device comprising one or more microneedles extending upwards from the front surface of the substrate, the microneedles having a generally conical-shaped body defined by a plurality of surfaces sloping upwards from a relatively broad base to a tip, and one or more substances coating the microneedles, the one or more substances being operable to be administered to a patient, wherein the tips of the one or more microneedles are sufficiently sharp to penetrate an outer layer of the skin of the patient, and a method of administering one or more substances to a patient using the device.

    Abstract translation: 本发明涉及一种在衬底中制造微针阵列的方法,药物递送装置包括从衬底的前表面向上延伸的一个或多个微针,所述微针具有由倾斜的多个表面限定的大致圆锥形体 从相对宽的基部向上延伸至尖端,以及一种或多种涂覆微针的物质,所述一种或多种物质可操作地施用于患者,其中所述一个或多个微针的尖端足够锋利以穿透外层 的患者皮肤,以及使用该装置向患者施用一种或多种物质的方法。

    Method of manufacturing master plate, method of manufacturing microneedle patch and apparatus exposure apparatus
    72.
    发明申请
    Method of manufacturing master plate, method of manufacturing microneedle patch and apparatus exposure apparatus 有权
    制造主板的方法,制造微针贴片的方法和装置曝光装置

    公开(公告)号:US20090162798A1

    公开(公告)日:2009-06-25

    申请号:US12379308

    申请日:2009-02-18

    Applicant: Takao Tomono

    Inventor: Takao Tomono

    Abstract: A method of manufacturing a master plate includes the steps of forming a photoresist film on a substrate, disposing a photomask having a plurality of island radiation shields on the photoresist film followed by integrating the photomask and the photoresist film, applying light from a light source to the photoresist film through the photomask for selectively exposing the photoresist film, and developing the photoresist film to form a master plate, in which the method includes irradiating the photoresist film with the light from plural directions through the photomask to selectively expose the photoresist film from the respective directions.

    Abstract translation: 制造母板的方法包括以下步骤:在衬底上形成光致抗蚀剂膜,将具有多个岛状辐射屏蔽的光掩模设置在光致抗蚀剂膜上,然后将光掩模和光致抗蚀剂膜整合,将来自光源的光施加到 所述光致抗蚀剂膜通过所述光掩模用于选择性地暴露所述光致抗蚀剂膜,以及显影所述光致抗蚀剂膜以形成母板,其中所述方法包括用来自多个方向的光照射所述光致抗蚀剂膜通过所述光掩模,以选择性地将所述光致抗蚀剂膜从 各自的方向。

    "> 3D SOLID OR HOLLOW SILICON MICRONEEDLE AND MICROKNIFE WITH
    74.
    发明申请
    3D SOLID OR HOLLOW SILICON MICRONEEDLE AND MICROKNIFE WITH "-" SHAPE STRUCTURE 审中-公开
    3D固体或中空硅微孔和微孔与“ - ”形状结构

    公开(公告)号:US20090093776A1

    公开(公告)日:2009-04-09

    申请号:US12296672

    申请日:2006-08-25

    Abstract: The present invention discloses a linear-edged 3D solid or hollow microneedle or microknife. A tip edge of the microneedle or microknife is a linear edge parallel to a group of (111) oriented facets of monocrystalline silicon. The linear edge extends along a straight or curved line and has a narrow width. An opening is formed on one or each side adjoining the linear tip edge, or is formed at the middle of the linear tip edge. The opening is communicated with a channel formed from the bottom surface of the microneedle or microknife, so as to form a through hole from the tip to the bottom of the microneedle or microknife. The triangular channel has six side walls of (111) oriented facets. The microneedle or microknife is used for transdermal drug delivery, body fluid withdrawing or the like. Methods for producing a microneedle or microknife are also disclosed.

    Abstract translation: 本发明公开了一种线性边缘3D实心或中空微针或微刀。 微针或微刀的尖端边缘是平行于一组(111)单晶硅定向小面的线性边缘。 线性边缘沿直线或曲线延伸并且具有窄的宽度。 开口形成在与线性末端边缘相邻的一侧或每侧上,或者形成在线状末端边缘的中间。 开口与由微针或微刀的底面形成的通道连通,以形成从微针或微刀的尖端到底部的通孔。 三角形通道具有(111)取向小面的六个侧壁。 微针或微刀用于透皮药物递送,体液抽出等。 还公开了生产微针或微刀的方法。

    MICRONEEDLE STRUCTURES AND CORRESPONDING PRODUCTION METHODS EMPLOYING A BACKSIDE WET ETCH
    75.
    发明申请
    MICRONEEDLE STRUCTURES AND CORRESPONDING PRODUCTION METHODS EMPLOYING A BACKSIDE WET ETCH 审中-公开
    麦克风结构和相应的生产方法

    公开(公告)号:US20090011158A1

    公开(公告)日:2009-01-08

    申请号:US12050209

    申请日:2008-03-18

    Abstract: A method for forming a hollow microneedle structure includes processing the front side of a wafer to form at least one microneedle projecting from a substrate with a first part of a through-bore, formed by a dry etching process, passing through the microneedle and through a part of a thickness of the substrate. The backside of the wafer is also processed to form a second part of the through-bore by a wet etching process.

    Abstract translation: 一种用于形成中空微针结构的方法包括处理晶片的前侧,以形成至少一个从基底突出的微针,该微针具有通过干蚀刻工艺形成的通孔的第一部分,穿过微针并通过 基板厚度的一部分。 晶片的背面也被处理以通过湿蚀刻工艺形成通孔的第二部分。

    Methods of fabricating microneedles with bio-sensory functionality
    77.
    发明申请
    Methods of fabricating microneedles with bio-sensory functionality 审中-公开
    制造具有生物感官功能的微针的方法

    公开(公告)号:US20080097352A1

    公开(公告)日:2008-04-24

    申请号:US11520526

    申请日:2006-09-12

    Abstract: A method of fabricating a microneedle is disclosed. The method includes forming at least one recess in a substrate, the at least one recess comprising an apex, forming an electrically seed layer on the substrate including the at least one recess, forming at least one electrically nonconductive pattern on a portion of the seed layer, the at least one nonconductive pattern being a pattern for a sensory area, plating an electrically conductive material on the seed layer to create a plated layer with an opening that exposes a portion of the nonconductive pattern and separating the plated layer from the seed layer and the at least one nonconductive pattern to release a hollow microneedle comprising a tip and at least one sensory area.

    Abstract translation: 公开了一种制造微针的方法。 该方法包括在衬底中形成至少一个凹部,所述至少一个凹部包括顶点,在衬底上形成包括所述至少一个凹部的电晶种层,在种子层的一部分上形成至少一个非导电图案 所述至少一个非导电图案是用于感觉区域的图案,在所述种子层上镀覆导电材料以产生具有暴露所述非导电图案的一部分并将所述镀层与所述种子层分离的开口的镀层,以及 所述至少一个非导电图案以释放包括尖端和至少一个感觉区域的中空微针。

    Wet etch processing
    78.
    发明申请
    Wet etch processing 失效
    湿式蚀刻处理

    公开(公告)号:US20070134829A1

    公开(公告)日:2007-06-14

    申请号:US11637020

    申请日:2006-12-12

    Abstract: A method of wet etching produces high-precision microneedle arrays for use in medical applications. The method achieves precise process control over microneedle fabrication, at single wafer or batch-level, using wet etching of silicon with potassium hydroxide (KOH) solution by accurately identifying the etch time endpoint. Hence, microneedles of an exactly required height, shape, sharpness and surface quality are achieved. The outcome is a reliable, reproducible, robust and relatively inexpensive microneedle fabrication process. Microneedles formed by KOH wet etching have extremely smooth surfaces and exhibit superior mechanical and structural robustness to their dry etched counterparts. These properties afford extra reliability to such silicon microneedles, making them ideal for medical applications. The needles can also be hollowed. Wet etched silicon microneedles can then be employed as masters to replicate the improved surface and structural properties in other materials (such as polymers) by moulding.

    Abstract translation: 湿蚀刻的方法产生用于医疗应用的高精度微针阵列。 该方法通过精确地识别蚀刻时间终点,通过使用氢氧化钾(KOH)溶液对硅进行湿蚀刻,在单晶片或批次水平上实现了微针制造的精确过程控制。 因此,实现了精确要求的高度,形状,锐度和表面质量的微针。 结果是可靠,可重现,稳健且相对便宜的微针制作工艺。 通过KOH湿蚀刻形成的微针具有非常光滑的表面,并且对其干蚀刻的对应物表现出优异的机械和结构坚固性。 这些性能为这种硅微针提供了额外的可靠性,使其成为医疗应用的理想选择。 针也可以是中空的。 湿法蚀刻的硅微针可用作主机,通过模制复制其他材料(如聚合物)中改进的表面和结构性能。

    Method of fabricating micro-needle array
    80.
    发明申请
    Method of fabricating micro-needle array 失效
    微针阵列制作方法

    公开(公告)号:US20060172541A1

    公开(公告)日:2006-08-03

    申请号:US11327463

    申请日:2006-01-09

    Inventor: Chang-seung Lee

    Abstract: A method of fabricating a micro-needle array is provided. The method of fabricating a micro-needle array having a substrate having a first surface and a second surface spaced in a predetermined interval apart from the first surface, includes patterning on the first surface, thereby forming a shape of micro-needle bodies. Further, micro-passageways are formed that penetrate the first surface of the substrate from the second surface by a porous silicon process, and integrates the micro-passageways, thereby forming the bodies and channels of micro-needles.

    Abstract translation: 提供一种制造微针阵列的方法。 制造具有第一表面和与第一表面隔开预定间隔的第二表面的基底的微针阵列的方法包括在第一表面上的图案化,从而形成微针体的形状。 此外,通过多孔硅工艺形成从第二表面穿透基板的第一表面的微通道,并且将微通道整合,从而形成微针的主体和通道。

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