Quartz glass having excellent resistance against plasma corrosion and method for producing the same
    71.
    发明授权
    Quartz glass having excellent resistance against plasma corrosion and method for producing the same 有权
    具有优异的等离子体腐蚀性的石英玻璃及其制造方法

    公开(公告)号:US07365037B2

    公开(公告)日:2008-04-29

    申请号:US11076944

    申请日:2005-03-11

    Abstract: As a jig material to use under plasma reaction for producing semiconductors the present invention provides a quartz glass having resistance against plasma corrosion, particularly corrosion resistance against fluorine-based plasma gases, and which is usable without causing anomalies to silicon wafers; the present invention furthermore provides a quartz glass jig, and a method for producing the same. A quartz glass containing 0.1 to 20 wt % in total of two or more types of metallic elements, said metallic elements comprising at least one type of metallic element selected from Group 3B of the periodic table as a first metallic element and at least one type of metallic element selected from the group consisting of Mg, Ca, Sr, Ba, Sc, Y, Ti, Zr, Hf, lanthanoids, and actinoids as a second metallic element, provided that the maximum concentration of each of the second metallic elements is 1.0 wt % or less.

    Abstract translation: 作为用于制造半导体的等离子体反应的夹具材料,本发明提供了具有耐等离子体腐蚀性,特别是耐氟基等离子体气体的耐腐蚀性的石英玻璃,其可以在不引起硅晶片异常的情况下使用; 本发明还提供一种石英玻璃夹具及其制造方法。 含有0.1〜20重量%的两种以上金属元素的石英玻璃,所述金属元素包含选自元素周期表第3B族的至少一种金属元素作为第一金属元素和至少一种 金属元素选自Mg,Ca,Sr,Ba,Sc,Y,Ti,Zr,Hf,镧系元素和锕系元素作为第二金属元素,条件是每个第二金属元素的最大浓度为1.0 wt%以下。

    Mixed powder and a method for producing quartz glass using the powder
    72.
    发明申请
    Mixed powder and a method for producing quartz glass using the powder 有权
    混合粉末和使用粉末生产石英玻璃的方法

    公开(公告)号:US20080053151A1

    公开(公告)日:2008-03-06

    申请号:US11897406

    申请日:2007-08-30

    Applicant: Tatsuhiro Sato

    Inventor: Tatsuhiro Sato

    Abstract: A mixed quartz powder contains quartz powder and two or more types of doping element in an amount of from 0.1 to 20 mass %. The aforementioned doped elements include a first dope element selected from the group consisting of N, C and F, and a second dope element selected from the group consisting of Mg, Ca, Sr, Ba, Sc, Y, Ti, Zr, Hf, the lanthanides and the actinides. The “quartz powder” is a powder of crystalline quartz or it is a powder of glassy SiO2 particles. It is made form natural occurring quartz or it is fabricated synthetically. The “quartz powder” may be doped. The compounding ratio of the total amount (M1) of the aforementioned first elements and the total amount (M2) of the aforementioned second elements as the ratio of the number of atoms (M1)/(M2) is preferably from 0.1 to 20. Al as well as the aforementioned doped elements is preferably included in a mixed quartz powder of this invention.

    Abstract translation: 混合石英粉含有0.1〜20质量%的石英粉和2种以上的掺杂元素。 上述掺杂元素包括选自N,C和F的第一掺杂元素和选自Mg,Ca,Sr,Ba,Sc,Y,Ti,Zr,Hf的第二掺杂元素, 镧系元素和锕系元素。 “石英粉”是结晶石英的粉末,或是玻璃状SiO 2颗粒的粉末。 它由天然石英制成,或者由合成制成。 可以掺杂“石英粉”。 上述第一元素的总量(M1)与上述第二元素的总量(M2)的配位比优选为0.1〜20。作为原子数(M1)/(M2)的比例,优选为0.1〜20。 以及上述掺杂元素优选包括在本发明的混合石英粉末中。

    Light amplifying optical fiber
    79.
    发明申请
    Light amplifying optical fiber 审中-公开
    光放大光纤

    公开(公告)号:US20020003937A1

    公开(公告)日:2002-01-10

    申请号:US09897140

    申请日:2001-07-03

    Inventor: Keiichi Aiso

    Abstract: In an optical communication and the like, a light amplifying optical fiber is capable of amplifying an optical signal having a wavelength in the vicinity of at least 1.57 to 1.62 nullm by a high gain. A cladding (5) is formed on the side of an outer peripheral portion of a core (1) to which erbium is added, and a refractive index of the cladding is smaller than that of the core (1). A relative refractive index difference nullnullnull of the core (1) with respect to the cladding (5) is made equal to 0.3% or larger, and also equal to 1% or smaller. While a composition of the core (1) is made of ErnullAl2O3nullGeO2nullSiO2, a composition of the cladding (5) is made of SiO2, erbium is added to the entire region of the core, and concentration of this erbium is selected to be 1,000 wtppm, and also a cut-off wavelength of the optical fiber is selected to be 1,400 nm. While the cut-off wavelength of the optical fiber is made constant, since the relative refractive index difference nullnullnull is selected to be an optimum value, a diameter of the core may become an optimum value. Lowering of the gain caused by a bending loss of the optical fiber can be avoided, and an erbium absorption amount per unit length of the optical fiber can be increased, and further, a gain per unit length of the optical fiber can be increased

    Abstract translation: 在光通信等中,光放大光纤能够通过高增益来放大波长在1.57〜1.62附近的光信号。 在添加有铒的芯(1)的外周部分的一侧形成包层(5),并且包层的折射率小于芯(1)的折射率。 芯(1)相对于包层(5)的相对折射率差“DELTA”等于或大于0.3%,也等于1%或更小。 虽然芯(1)的组成由Er-Al 2 O 3 -GeO 2 -SiO 2制成,但是包层(5)的组成由SiO 2制成,铒被加入到芯的整个区域,该铒的浓度为 选择为1,000重量ppm,并且光纤的截止波长也选择为1400nm。 当光纤的截止波长保持恒定时,由于相对折射率差“DELTA”被选择为最佳值,所以芯的直径可以成为最佳值。 可以避免由于光纤的弯曲损耗引起的增益的降低,并且能够提高光纤的每单位长度的铒吸收量,进一步增加光纤的单位长度的增益

    Ultraviolet absorbing and yellow light filtering glass article
    80.
    发明申请
    Ultraviolet absorbing and yellow light filtering glass article 失效
    紫外吸收和黄光过滤玻璃制品

    公开(公告)号:US20010044370A1

    公开(公告)日:2001-11-22

    申请号:US09886764

    申请日:2001-06-21

    Abstract: The present invention is directed at a family of glasses capable of absorbing UV radiation and filtering yellow light in the visible region of the spectrum, the family of glasses having a composition consisting essentially, in terms of weight percent on the oxide basis, of: 55-95.7% SiO2, 0-28% B2O3, 0.5-18% Al2O3, 0-4% SrO, 0-13% BaO, 0-13% CaO, 0-8% MgO, 0-7.5% Na2O, 0-9.5% K2O, 0-1.5% Li2O, 0-1.5% Sb2O3, 0.4-4.5% Nd2O3, and 0.1-1% CeO2. Glasses of the present invention are capable of employment as envelopes for tungsten-halogen lamps and other high temperature light sources, as well as sealed-beam incandescent headlights. Also, the glasses can be used as for other applications where high contrast and enhanced visible properties of transmitted or reflected visible light can be a benefit, such as opthalmic glass, computer screens with enhanced contrast properties, or glass hosts for lasers.

    Abstract translation: 本发明涉及能够吸收紫外辐射并过滤光谱可见光区域中的黄光的玻璃系列,具有以氧化物为基准的基本上以重量百分数计的组成的玻璃系列为:55 -95.7%SiO 2,0-28%B 2 O 3,0.5-18%Al 2 O 3,0-4%SrO,0-13%BaO,0-13%CaO,0-8%MgO,0-7.5%Na 2 O,0-9.5 %K2O,0-1.5%Li2O,0-1.5%Sb2O3,0.4-4.5%Nd2O3和0.1-1%CeO2。 本发明的玻璃能够用作钨卤素灯和其他高温光源以及密封束白炽灯的信封。 此外,眼镜可以用于其他应用,其中透射或反射的可见光的高对比度和增强的可见性可以是有益的,例如眼镜玻璃,具有增强的对比度性质的计算机屏幕或用于激光的玻璃主机。

Patent Agency Ranking