Dissolved gas sensor and system
    72.
    发明授权

    公开(公告)号:US09903817B1

    公开(公告)日:2018-02-27

    申请号:US15407095

    申请日:2017-01-16

    CPC classification number: G01N21/61 B01D19/0031 G01N33/004 G01N2201/02

    Abstract: The dissolved gas sensor system includes a dissolved gas sensor partially located within a housing and partially extending through the housing lid. The sensor is created by affixing a selectively permeable membrane to a dissolved gas transducer with a waterproof polymer. This forms a membrane cavity between the membrane, polymer, and transducer. The membrane cavity allows the transducer to detect whatever gas or gases can pass through the selectively permeable membrane. These readings pass to a controller located within the housing body that can receive and process data, and store the data in a removable data storage for later retrieval by a user. The controller can also regulate overall power consumption of the system to increase the operating life of the system.

    Multi-channel backside wafer inspection

    公开(公告)号:US09689804B2

    公开(公告)日:2017-06-27

    申请号:US14577374

    申请日:2014-12-19

    Inventor: Yakov Bobrov

    Abstract: A system for inspecting a backside surface of a wafer with multi-channel focus control includes a set of inspection sub-systems including a first inspection sub-system positioned and an additional inspection sub-system. The first and additional inspection sub-systems include an optical assembly, an actuation assembly, where the optical assembly is disposed on the actuation assembly, and a positional sensor configured to sense a position characteristic between a portion of the optical assembly and the backside surface of the wafer. The system also includes a controller configured to acquire one or more wafer profile maps of the backside surface of the wafer and adjust a first focus position of the first inspection sub-system or an additional focus position of the additional inspection sub-system based on the received one or more wafer profile maps.

    SERS structures with nanoporous materials
    80.
    发明授权
    SERS structures with nanoporous materials 有权
    SERS结构与纳米多孔材料

    公开(公告)号:US09574990B2

    公开(公告)日:2017-02-21

    申请号:US14377708

    申请日:2012-02-28

    CPC classification number: G01N21/01 G01N21/658 G01N2201/02 G01N2201/068

    Abstract: The present disclosure describes a surface enhanced Raman spectroscopy (SERS) apparatus and methods of forming and using the SERS apparatus. An example of a SERS apparatus includes a nanoporous material on an upper surface of a substrate, a plurality of SERS-active structures on an upper surface of the nanoporous material, and a Raman-active material on a surface of each of SERS-active structures.

    Abstract translation: 本公开描述了表面增强拉曼光谱(SERS)装置以及形成和使用SERS装置的方法。 SERS装置的实例包括在基底的上表面上的纳米多孔材料,在纳米多孔材料的上表面上的多个SERS-活性结构,以及每个SERS活性结构的表面上的拉曼活性物质 。

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