INSPECTION APPARATUS AND INSPECTION METHOD
    71.
    发明公开

    公开(公告)号:US20240011915A1

    公开(公告)日:2024-01-11

    申请号:US18323698

    申请日:2023-05-25

    Inventor: Hark Ryong KIM

    Abstract: The present invention relates to an inspection apparatus and an inspection method which selectively adjust a numerical aperture of illuminating light in the form of collimated light when inspecting a target object, such as a wafer or the like, using a spectrum, thereby preventing a diffraction phenomenon caused by the illuminating light. The inspection apparatus may include: a camera unit disposed above a target object; an illumination unit configured to illuminate the target object with illuminating light; and a light detection unit configured to detect reflection light of the target object illuminated with the illuminating light, wherein the illumination unit comprises a numerical aperture adjustment device which has a first optical member having a first numerical aperture that is replaceable with a second optical member having a second numerical aperture different from the first numerical aperture so as to reduce a diffraction phenomenon caused by the illuminating light.

    Long Path Cell
    73.
    发明申请
    Long Path Cell 审中-公开

    公开(公告)号:US20190049364A1

    公开(公告)日:2019-02-14

    申请号:US16077490

    申请日:2017-02-09

    Applicant: Tom Rubin

    Inventor: Tom Rubin

    Abstract: The invention relates to a long path cell (10), in particular a Herriott cell, with (a) a primary minor (12) and (b) a secondary mirror (14). According to the invention, it is provided that the primary mirror (12) has a first primary minor segment (42.1) and at least one second primary minor segment (42.2), which radially surrounds the first primary mirror segment (42.1), whereby the primary minor segments (42) differ in their curvatures (R42.1, 42.2) or focal lengths, the secondary minor (14) has a first secondary minor segment (44.1) and at least one second secondary mirror segment (44.2) which radially sur-rounds the first secondary minor segment (44.1), whereby the secondary minor segments (44) differ in their curvatures (R42.1, R42.2) or focal lengths, the first primary mirror segment (42.1) and the first secondary minor segment (44.1) are arranged in relation to each other such that a light beam is reflected back and forth between the two, and that the second primary mirror segment (42.2) and the second secondary minor segment (44.2) are arranged in relation to each other such that a light beam is reflected back and forth between the two.

    Method, Device and Sensor for Determining an Absorption Behavior of a Medium
    78.
    发明申请
    Method, Device and Sensor for Determining an Absorption Behavior of a Medium 审中-公开
    用于确定介质的吸收行为的方法,装置和传感器

    公开(公告)号:US20160178508A1

    公开(公告)日:2016-06-23

    申请号:US14975799

    申请日:2015-12-20

    Inventor: Ingo Ramsteiner

    Abstract: A method is used to determine an absorption behavior of a medium. The method includes establishing an absorption coefficient of the medium using a first intensity value and at least one second intensity value and a length different between a first measurement distance and a second measurement distance. The first intensity value represents a measured first light intensity after passing over a first measurement distance in the medium. The second intensity value represents a measured second light intensity after passing over a second measurement distance in the medium. The first intensity value and the second intensity value are measured using light with a common initial intensity.

    Abstract translation: 一种方法用于确定介质的吸收行为。 该方法包括使用第一强度值和至少一个第二强度值和在第一测量距离和第二测量距离之间不同的长度建立介质的吸收系数。 第一强度值表示在介质中经过第一测量距离之后测量的第一光强度。 第二强度值表示在介质中经过第二测量距离后的测量的第二光强度。 使用具有共同的初始强度的光来测量第一强度值和第二强度值。

    Optical spectrometers
    79.
    发明授权
    Optical spectrometers 有权
    光谱仪

    公开(公告)号:US09228937B2

    公开(公告)日:2016-01-05

    申请号:US14395756

    申请日:2012-05-25

    Abstract: An optical spectrometer may include: an adjustable sampling space having two opposing side-walls between which in use a sample for analysis is charged and in at least one of which is formed an optical interface translucent to optical energy emitted by an optical energy source; an actuator mechanically coupled to one or both of the opposing side-walls and configured to operate in response to a command signal applied thereto to effect relative movement of the opposing side-walls; and/or an optical position sensor configured to detect interference fringes generated by the optical energy traversing a distance between the side-walls a plurality of times, having passed through the at least one optical interface, and configured to generate the command signal in dependence thereof. The adjustable sampling space may be brought into an analysis position at which the side-walls are relatively inclined to form a wedge shape.

    Abstract translation: 光学光谱仪可以包括:具有两个相对的侧壁的可调节采样空间,在使用中,用于分析的样品在其之间充电,并且其中至少一个形成与由光能源发射的光能半透明的光学界面; 致动器,其机械地联接到所述相对的侧壁中的一个或两个并且被配置为响应于施加到其上的指令信号而操作以实现所述相对侧壁的相对运动; 和/或光学位置传感器,被配置为检测穿过所述侧壁之间的距离的所述光能产生的干涉条纹,所述光束穿过所述至少一个光学接口,并且被配置为根据其生成所述命令信号 。 可调取样空间可以进入分析位置,在该位置侧壁相对倾斜以形成楔形。

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