公开(公告)号：US5473218A

公开(公告)日：1995-12-05

申请号：US251415

申请日：1994-05-31

Applicant: Curtis D. Moyer

Inventor： Curtis D. Moyer

IPC: H01J29/04 ,  H01J1/304 ,  H01J31/12 ,  H01J19/00

CPC classification number: H01J3/021 ,  H01J1/3042 ,  H01J2201/30457

Abstract: A flat, cold-cathode electron emitter including a substrate having a relatively flat surface with a low work function electron emission material layer for emitting electrons supported on the surface of the substrate. A contact conductive layer is disposed on the electron emission material layer and defines an aperture therethrough. An insulating layer is disposed on the contact conductive layer and has an aperture defined therethrough coextensive and in peripheral alignment with the aperture in the contact conductive layer and a conductive gate layer is disposed on the insulating layer. The contact conductive layer forms the field potential so that emission occurs substantially in the center of the aperture.

Abstract translation: 一种扁平的冷阴极电子发射器，包括具有相对平坦表面的基底，具有用于发射支撑在基底表面上的电子的功函数电子发射材料层。 接触导电层设置在电子发射材料层上并限定穿过其中的孔。 绝缘层设置在接触导电层上，并且具有通过共同延伸限定的孔，并且与接触导电层中的孔周边对准，并且导电栅极层设置在绝缘层上。 接触导电层形成场电位，使得发射基本上在孔的中心。

公开(公告)号：US5382867A

公开(公告)日：1995-01-17

申请号：US954396

申请日：1992-09-30

Applicant: Marou Yuji ,  Akagi Yutaka ,  Ise Tomokazu ,  Urayama Masao

Inventor： Marou Yuji ,  Akagi Yutaka ,  Ise Tomokazu ,  Urayama Masao

IPC: H01J1/30 ,  H01J1/304 ,  H01J3/02 ,  H01J21/10 ,  H01J1/02

CPC classification number: H01J3/022 ,  H01J1/30 ,  H01J1/3042 ,  H01J21/105 ,  H01J3/021

Abstract: A field-emission electronic device works as a field-emission electron source. The field-emission electronic device comprises an anode electrode, a first insulating member disposed on the anode electrode, a cathode electrode disposed on the first insulating member, a second insulating member disposed on the anode electrode at a distance from the first insulating member, and a gate electrode disposed on the second insulating member. Therefore, the field-emission electronic device can be formed to make the distance between the electrodes smaller than that of the known field-emission electronic device. Concretely, the distances between the cathode electrode and the gate electrode and between the cathode electrode and the anode electrode are allowed to be reduced. This results in lowering a gate voltage and an anode voltage.

Abstract translation: 场致发射电子器件用作场致发射电子源。 场发射电子器件包括阳极电极，设置在阳极电极上的第一绝缘构件，设置在第一绝缘构件上的阴极电极，设置在距第一绝缘构件一定距离的阳极电极上的第二绝缘构件，以及 设置在所述第二绝缘构件上的栅电极。 因此，场致发射电子器件可以形成为使得电极之间的距离小于已知的场致发射电子器件的距离。 具体地说，可以减小阴极电极和栅电极之间以及阴极电极和阳极电极之间的距离。 这导致栅极电压和阳极电压降低。

公开(公告)号：US5371431A

公开(公告)日：1994-12-06

申请号：US846281

申请日：1992-03-04

Applicant: Gary W. Jones ,  Ching-Tzong Sune

Inventor： Gary W. Jones ,  Ching-Tzong Sune

IPC: H01J1/304 ,  H01J9/02 ,  H01J29/04 ,  H01J29/87 ,  H01J31/12 ,  H01J1/30

CPC classification number: H01J3/021 ,  H01J1/3042 ,  H01J9/025 ,  H01J2201/319

Abstract: A vertical microelectronic field emitter includes a conductive top portion and a resistive bottom portion in an elongated column which extends vertically from a horizontal substrate. An emitter electrode may be formed at the base of the column, and an extraction electrode may be formed adjacent the top of the column. The elongated column reduces the parasitic capacitance of the microelectronic field emitter to provide high speed operation, while providing uniform column-to-column resistance. The field emitter may be formed by first forming tips on the face of a substrate and then forming trenches in the substrate around the tips to form columns in the substrate, with the tips lying on top of the columns. The trenches are filled with a dielectric and a conductor layer is formed on the dielectric. Alternatively, trenches may be formed in the face of the substrate with the trenches defining columns in the substrate. Then, tips are formed on top of the columns. The trenches are filled with dielectric and the conductor layer is formed on the dielectric to form the extraction electrodes.

Abstract translation: 垂直微电子场发射器包括从水平衬底垂直延伸的细长柱中的导电顶部部分和电阻底部部分。 发射电极可以形成在柱的底部，并且可以在柱的顶部附近形成引出电极。 细长柱减小微电子场发射器的寄生电容，以提供高速操作，同时提供均匀的柱对列电阻。 场发射器可以通过在衬底的表面上首先形成尖端然后在衬底周围形成尖端的沟槽形成衬底中的柱，其中尖端位于柱的顶部。 沟槽填充有电介质，并且在电介质上形成导体层。 或者，可以在衬底的表面形成沟槽，其中沟槽限定在衬底中的列。 然后，尖端形成在列的顶部。 沟槽用电介质填充，并且导体层形成在电介质上以形成提取电极。

公开(公告)号：US5313138A

公开(公告)日：1994-05-17

申请号：US774708

申请日：1991-10-09

Applicant: Henri Desmur

Inventor： Henri Desmur

IPC: H01J3/02 ,  H01J23/06 ,  H01J23/34 ,  H01L31/09 ,  H03K17/10 ,  H03K17/78

CPC classification number: H03K17/78 ,  H01J23/06 ,  H01J23/34 ,  H01J3/021 ,  H01L31/09 ,  H03K17/10

Abstract: An electron gun is modulated by an optoelectronic switching device. This switching device comprises a modulated light source and at least one GaAs or Si solid-state optoelectronic switch, this switch being non-conductive when not illuminated and conductive when illuminated by the modulated light source; the device also includes components to transmit the light from the source to the switch(es). In one embodiment, the modulated light source is a laser and in a second embodiment the source is a continuous source externally modulated by a mechanical or electrooptical device. The optoelectronic switching device is connected between a high-voltage source and the cathode of an electron gun, thus modulating the cathode.The invention is particularly applicable to microwave electron tubes.

Abstract translation: 电子枪由光电开关装置调制。 该开关装置包括调制光源和至少一个GaAs或Si固态光电开关，该开关在被调制光源照射时不被照射和导通时是非导通的; 该设备还包括将光从源传输到交换机的组件。 在一个实施例中，调制光源是激光器，在第二实施例中，源极是由机械或电光器件外部调制的连续光源。 光电开关器件连接在高电压源和电子枪的阴极之间，从而调制阴极。 本发明特别适用于微波电子管。

公开(公告)号：US4749911A

公开(公告)日：1988-06-07

申请号：US31619

申请日：1987-03-30

Applicant: George Wakalopulos ,  Sherman R. Farrell

Inventor： George Wakalopulos ,  Sherman R. Farrell

IPC: H01J27/16 ,  H01J3/02 ,  H01J27/20 ,  H01J37/06 ,  H01J37/077 ,  H01J37/08 ,  H01S3/038 ,  H01S3/0959 ,  H02K39/00

CPC classification number: H01J3/021 ,  H01S3/038 ,  H01S3/0959

Abstract: An ion plasma electron gun for the generation of large area electron beams with uniform electron distribution. Positive ions generated by a wire in a plasma discharge chamber are accelerated through an extraction grid into a second chamber containing a high voltage cold cathode. These positive ions bombard a surface of the cathode causing the cathode to emit secondary electrons which form an electron beam. After passage through an extraction grid and plasma discharge chamber, the electron beam exits from the gun by way of a second grid and a foil window supported on the second grid. The gun is constructed so that the electron beam passing through the foil window has a relatively large area and uniform electron distribution which is substantially the same as the ion distribution of the ion beam impinging upon the cathode. A target and comparison circuit are functionally connected to a current control power supply for the positive ion source which in combination are capable of maintaining the output of secondary electrons emitting from the foil window substantially constant.

Abstract translation: 一种用于产生具有均匀电子分布的大面积电子束的离子等离子体电子枪。 通过等离子体放电室中的线产生的正离子通过提取栅格被加速到包含高压冷阴极的第二室中。 这些正离子轰击阴极的表面，导致阴极发射形成电子束的二次电子。 在通过提取格栅和等离子体放电室之后，电子束通过第二格栅和支撑在第二格栅上的箔窗口从枪射出。 枪的构造使得通过箔窗的电子束具有相当大的面积和均匀的电子分布，其基本上与入射到阴极上的离子束的离子分布相同。 目标和比较电路在功能上连接到正离子源的电流控制电源，其结合能够维持从箔窗口发射的二次电子的输出基本恒定。

公开(公告)号：US4703228A

公开(公告)日：1987-10-27

申请号：US770386

申请日：1985-08-28

Applicant: William P. West

Inventor： William P. West

IPC: H01J3/02 ,  H01J23/04 ,  H05B37/02 ,  H05B39/04 ,  H05B41/36

CPC classification number: H01J23/04 ,  H01J3/021 ,  H01J2201/342

Abstract: An electron gun for emitting a modulated electron beam. The gun includes an evacuated envelope having an output end with a photocathode positioned in the envelope and responsive to light to emit electrons. An anode is positioned between the photocathode and the output end for accelerating the electrons emitted by the photocathode. The gun further includes a source of potential interconnecting the anode and the photocathode for maintaining the anode electrostatically positive relative to the photocathode. A first laser provides a first laser beam at a first frequency illuminating the photocathode, and a second laser provides a second laser beam at a second frequency illuminating the photocathode at the same time. The first frequency differs from the second frequency by a beat frequency, whereby the photocathode provides the electron beam with the electrons spacially bunched in accordance with the beat frequency. A method of providing a modulated electron beam is also disclosed.

Abstract translation: 一种用于发射调制电子束的电子枪。 枪包括具有输出端的抽真空的外壳，光电阴极定位在外壳中并且响应于光发射电子。 阳极位于光电阴极和输出端之间，用于加速由光电阴极发射的电子。 枪还包括将阳极和光电阴极相互连接的电位源，用于相对于光电阴极静电地保持阳极。 第一激光器以照射光电阴极的第一频率提供第一激光束，第二激光器以同时照射光电阴极的第二频率提供第二激光束。 第一频率与第二频率不同于拍频，由此光电阴极根据拍频提供电子束与电子空间聚束。 还公开了一种提供调制电子束的方法。

公开(公告)号：US4642522A

公开(公告)日：1987-02-10

申请号：US621420

申请日：1984-06-18

Applicant: Robin J. Harvey ,  Hayden E. Gallagher ,  Robert W. Schumacher

Inventor： Robin J. Harvey ,  Hayden E. Gallagher ,  Robert W. Schumacher

IPC: H01J3/02 ,  H01J17/38 ,  H01J17/44 ,  H01J27/06 ,  H01J37/077 ,  H01S3/097 ,  H01J7/24

CPC classification number: H01J3/021

Abstract: An improved Wire-Ion-Plasma Electron-gun (WIP E-gun) is disclosed, having a very rapid electron beam current interruption capability. An auxiliary grid is employed to provide a potential barrier to the reservoir of plasma ions in the ionization chamber, thereby containing these ions in the chamber after the wire anode is turned "OFF". The E-gun current fall time is reduced to the time required for the plasma potential to fall in the ionization chamber after the wire anode is turned "OFF". The WIP E-gun current fall time is reduced, from greater than fifteen microseconds for devices not employing the invention, to less than two microseconds.

Abstract translation: 公开了一种改进的线离子等离子体电子枪（WIP E-gun），具有非常快的电子束电流中断能力。 辅助栅格用于为电离室中的等离子体离子的储存器提供势垒，从而在电极阳极“断开”之后，在室内容纳这些离子。 电子枪电流下降时间减少到电线阳极转为“关闭”后等离子体电势落入电离室所需的时间。 WIP电子枪电流下降时间从不超过十五微秒用于不使用本发明的器件减少到小于两微秒。

公开(公告)号：US4628226A

公开(公告)日：1986-12-09

申请号：US647625

申请日：1984-09-05

Applicant: Dieter Kurz ,  Norbert Schafer

Inventor： Dieter Kurz ,  Norbert Schafer

IPC: H01J3/02 ,  H01J37/073 ,  H05B39/00 ,  H01J19/32

CPC classification number: H01J37/073 ,  H01J3/021 ,  H01J2237/06316

Abstract: The invention is directed to a method of preventing cathode damage when switching on an electron gun having a field emission cathode assembly including a cathode, a first electrode and a ground electrode. During normal operation of the electron gun, an extraction voltage is applied across the cathode and the first electrode and an accelerating voltage is applied across the cathode and the ground electrode. A direct galvanic connection is established between the cathode and the first electrode prior to normal operation of the electron gun. During a burn-in period, only the accelerating voltage is applied. This accelerating voltage may include an overvoltage of up to twenty percent. Then the galvanic connection between the cathode and the first electrode is interrupted and the extraction voltage is applied. An arrangement for carrying out the invention is also disclosed.

Abstract translation: 本发明涉及一种当接通具有包括阴极，第一电极和接地电极的场致发射阴极组件的电子枪时防止阴极损伤的方法。 在电子枪的正常操作期间，在阴极和第一电极之间施加提取电压，并且跨越阴极和接地电极施加加速电压。 在电子枪正常操作之前，在阴极和第一电极之间建立直接电偶连接。 在老化期间，仅施加加速电压。 该加速电压可能包括高达百分之二十的过电压。 然后中断阴极和第一电极之间的电流连接，并施加提取电压。 还公开了用于实施本发明的装置。

公开(公告)号：US3887835A

公开(公告)日：1975-06-03

申请号：US36852073

申请日：1973-06-11

Applicant: HITACHI LTD

Inventor： NOMURA SETSUO

IPC: H01J1/304 ,  G01Q30/02 ,  H01J3/02 ,  H01J37/073 ,  H05H7/08 ,  H05B39/00

CPC classification number: H01J3/021

Abstract: A field-emission electron gun wherein, during the state under which an electric field is formed between the cathode and the first anode to thus emit electrons, a heating current is supplied to a filament mounted on the cathode, to steadily heat the cathode so as to hold it at a certain fixed temperature within a range of from 100*C. to 500*C.

Abstract translation: 一种场发射电子枪，其中在阴极和第一阳极之间形成电场以发射电子的状态下，向安装在阴极上的灯丝提供加热电流，以稳定地加热阴极，以便 将其保持在100〜500℃的一定的固定温度。

公开(公告)号：US3649868A

公开(公告)日：1972-03-14

申请号：US3649868D

申请日：1970-03-26

Applicant: THOMSON CSF

Inventor： BENSUSSAN ANDRE

IPC: H01J3/02 ,  H01J1/46 ,  H01J19/02

CPC classification number: H01J3/021 ,  H01J3/023 ,  H01J2201/342

Abstract: An electron gun comprises a photoemissive source, which is excited by a source of light such as a pulsed laser. This electron emission is amplified by a secondary emission multiplication system comprising a plurality of AC or DC biased dynodes. In the former case the gun envelope forms a resonator cavity.

Abstract translation: 电子枪包括由诸如脉冲激光的光源激发的光发射源。 该电子发射由包括多个AC或DC偏置倍增电极的二次发射倍增系统放大。 在前一种情况下，枪包络形成谐振腔。