公开(公告)号：US20160076942A1

公开(公告)日：2016-03-17

申请号：US14121491

申请日：2014-09-11

Applicant: Mazen Zawaideh ,  Chris Claypool ,  Emad Zawaideh

Inventor： Mazen Zawaideh ,  Chris Claypool ,  Emad Zawaideh

IPC: G01J4/04 ,  G01J3/447 ,  G01J3/28

CPC classification number: G01J4/04 ,  A61B5/0075 ,  A61B5/725 ,  A61B5/7257 ,  G01J3/0224 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/447 ,  G01J2003/2826 ,  G01N2021/213

Abstract: An imaging spectropolarimeter for examining targets with polarized light, the spectropolarimeter including a light source adapted to produce polarized light directed at a target. Embodiments also include a three-camera camera system defining a three-camera camera axis with a first camera unit comprising a first analyzer set at 0°, a lens and a first multi-pixel sensor, a second camera unit comprising a second analyzer set at 45°, a lens and a second multi-pixel sensor, and a third camera unit comprising a third analyzer set at 90°, a lens and a third multi-pixel sensor. At least two beam splitters adapted to direct a portion of polarized light reflected from the target to each of the first, second and third camera units. Preferred systems include a processor adapted to produce polarimetric images of the target utilizing intensity information collected by the multi-pixel sensors.

Abstract translation: 用于用偏振光检查目标的成像分光偏振计，分光偏振计包括适于产生指向目标的偏振光的光源。 实施例还包括定义三相机相机轴的三相机相机系统，第一相机单元包括设置为0°的第一分析器，透镜和第一多像素传感器，第二相机单元，包括第二分析器 45°，透镜和第二多像素传感器，以及第三相机单元，包括设置在90°的第三分析器，透镜和第三多像素传感器。 至少两个分束器，其适于将从目标反射的偏振光的一部分引导到第一，第二和第三相机单元中的每一个。 优选的系统包括适于使用由多像素传感器收集的强度信息产生目标的偏振图像的处理器。

公开(公告)号：US20160047752A1

公开(公告)日：2016-02-18

申请号：US14791607

申请日：2015-07-06

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： MYOUNG-KI AHN ,  JIN-WOO AHN ,  YOUNG-GWON KIM ,  TAE-JUN AHN ,  TAE-YONG JO ,  YOUNG HEO

IPC: G01N21/88 ,  G01J4/04

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N2021/8822 ,  G01N2021/8848 ,  G01N2201/062 ,  G01N2201/0683

Abstract: An optical module for surface inspection includes a first light source unit that illuminates a substrate with first light produced by a first light source and a first beam splitter that changes the path of the first light, a second light source unit that illuminates the substrate with second light polarized in a first direction, a direction of polarization changing unit that illuminates the substrate with the third light polarized in a second direction perpendicular to the first direction, and a detection unit that detects fourth light which is a product of the first light reflecting from the substrate, fifth light which is a product of the second light scattered from the substrate, and sixth light which is a product of the third light scattered from the substrate. The third light is produced by changing the direction of polarization of the second light reflected from the inspected substrate.

Abstract translation: 用于表面检查的光学模块包括：第一光源单元，其利用由第一光源产生的第一光和改变第一光的路径的第一分束器照射基板;第二光源单元，其用第二光源单元照亮基板; 在第一方向上偏振的光;偏振改变单元，其以与第一方向垂直的第二方向偏振的第三光照亮基板;以及检测单元，其检测作为从第一方向反射的第一光的乘积的第四光 基板，作为从基板散射的第二光的乘积的第五光和作为从基板散射的第三光的乘积的第六光。 通过改变从检查的基板反射的第二光的偏振方向来产生第三光。

公开(公告)号：US20150362369A1

公开(公告)日：2015-12-17

申请号：US14303639

申请日：2014-06-13

Applicant: GE Aviation Systems LLC

Inventor： Jerry Lynne Page

IPC: G01J4/04

CPC classification number: G01J4/04 ,  G01C3/08 ,  G01C21/00 ,  G01J2004/002

Abstract: A relative navigation system and a method of eliminating spurious signals that may be received by a relative navigation system having a first object and a second object including projecting polarized light having a first orientation to form at least one grid line projecting into space from the first object.

Abstract translation: 一种相对导航系统和一种消除可能由具有第一物体和第二物体的相对导航系统接收的杂散信号的方法，所述相关导航系统包括具有第一取向的突出偏振光，以形成从第一物体突出到空间中的至少一个栅格线 。

公开(公告)号：US20150355029A1

公开(公告)日：2015-12-10

申请号：US14121915

申请日：2014-11-04

Applicant: J.A. WOOLLAM CO., INC.

Inventor： Martin M. Liphardt ,  Jeffrey S. Hale ,  Ping He ,  Galen L. Pfeiffer

IPC: G01J4/04 ,  G02B19/00

CPC classification number: G02B17/0621 ,  G01J1/0411 ,  G01J1/0414 ,  G01J4/00 ,  G01J4/04 ,  G01N21/21 ,  G02B19/0023 ,  G02B19/0076 ,  G02B27/0012 ,  G02B27/286

Abstract: A reflective optics system that preferably requires the presence of both convex and a concave mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample, (which can be along a locus differing from that of an input beam), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved.

Abstract translation: 一种反射光学系统，其优选地需要存在具有光束反射表面的凸面镜和凹面镜，其应用实现将电磁辐射束聚焦到样本上（其可以沿着不同于 输入光束），基于调整的入射角和来自各种反射镜的反射，对输入光束偏振态的偏振状态的影响最小化。

公开(公告)号：US08994943B2

公开(公告)日：2015-03-31

申请号：US13690025

申请日：2012-11-30

Applicant: Infineon Technologies AG

Inventor： Franz Darrer

IPC: G01J4/00 ,  G01J4/04

CPC classification number: G01J4/04 ,  G01S7/499 ,  G01S17/89 ,  G01S17/936

Abstract: Representative implementations of devices and techniques provide selectivity for imaging devices and systems. Polarization may be applied to emitted light radiation and/or received light radiation to select a desired imaging result. Using polarization, an imaging device or system can pass desired light radiation having desired information and reject unwanted or stray light radiation.

Abstract translation: 设备和技术的代表性实现为成像设备和系统提供了选择性。 极化可以应用于发射的光辐射和/或接收的光辐射以选择期望的成像结果。 使用偏振，成像装置或系统可以传递具有期望信息的期望的光辐射并且拒绝不需要的或杂散的光辐射。

公开(公告)号：US08947663B2

公开(公告)日：2015-02-03

申请号：US14215739

申请日：2014-03-17

Applicant: Yin Wang ,  Gerard Wysocki

Inventor： Yin Wang ,  Gerard Wysocki

IPC: G01J4/00 ,  G01J4/04 ,  G01N21/21

CPC classification number: G01N21/21 ,  G01J3/447 ,  G01N21/1717 ,  G01N2021/1727

Abstract: A dual-modulation Faraday rotation spectroscopic (FRS) system is disclosed. The FRS system uses an FRS sample cell configured to subject a sample to a low frequency modulated magnetic field. The system includes a polarized laser light source configured to generate a high frequency wavelength-modulated light beam incident on the sample, the high frequency wavelength-modulated light beam being modulated at a higher frequency than the low frequency modulated magnetic field. A polarizer is configured to receive from the sample a transmitted light beam having a modulated polarization having a polarization rotation and translate the modulated polarization of the transmitted light beam into an intensity modulated beam. A photodetector is configured to detect the intensity modulated beam and generate a photodetector signal. A dual demodulator is coupled to the photodetector and is configured to demodulate the photodetector signal.

Abstract translation: 公开了一种双调制法拉第旋转光谱（FRS）系统。 FRS系统使用被配置为使样本进入低频调制磁场的FRS采样单元。 该系统包括被配置为产生入射在样品上的高频波长调制光束的偏振激光光源，高频波长调制光束以比低频调制磁场更高的频率进行调制。 偏振器被配置为从样本接收具有具有偏振旋转的调制偏振的透射光束，并将透射光束的调制偏振转换成强度调制光束。 光电检测器被配置为检测强度调制光束并产生光电检测器信号。 双重解调器耦合到光电检测器并且被配置为解调光电检测器信号。

公开(公告)号：US08908180B2

公开(公告)日：2014-12-09

申请号：US13810791

申请日：2011-07-18

Applicant: Olivier Acher

Inventor： Olivier Acher

IPC: G01J4/04 ,  G01J4/00 ,  G02B21/00

CPC classification number: G01J4/04 ,  G01J4/00 ,  G02B21/0092

Abstract: A polarimetric measurement device and method with microscopic resolution include a polarization conversion device to modify the polarization of a beam so as to switch from a spatially uniform distribution to a distribution that is cylindrically symmetric about the optical axis, and vice versa. The conversion device is positioned on the axis of a focusing objective for focusing the cylindrically symmetric polarized beam onto the surface of a sample to be measured. The device may be incorporated into a microellipsometer, or an interference contrast microscope, or used as a polarimetric accessory for a microscope.

Abstract translation: 具有微观分辨率的偏振测量装置和方法包括：偏振转换装置，用于改变光束的偏振度，以便从空间均匀分布转换成围绕光轴圆柱对称的分布，反之亦然。 转换装置位于聚焦对象的轴上，用于将圆柱对称的偏振光束聚焦到待测样品的表面上。 该装置可以结合到微计算机或干涉对比显微镜中，或用作显微镜的极化附件。

公开(公告)号：US20140268278A1

公开(公告)日：2014-09-18

申请号：US14202012

申请日：2014-03-10

Applicant: OFS Fitel, LLC

Inventor： Vitaly Mikhailov ,  Paul S. Westbrook

IPC: G01J4/04 ,  G02F1/01

CPC classification number: G01J4/04

Abstract: A polarimeter is proposed that utilizes additional Stokes parameter measurements to determine both an average Stokes vector, as well as any rotation of the state of polarization around the Stokes vector. The optical polarimeter is configured to measure the state of polarization (SOP) under multiple, different conditions that yield both averaged Stokes vector and at least one other secondary (filtered) Stokes vector, the latter thus being determined from a subset of the conditions used to create the average Stokes vector. The secondary Stokes vector created from a filtered input will necessarily exhibit changes over time as a function of polarization transformations (based on filter-dependent changes), while the average Stokes vector will retain a constant value. Thus, a comparison of the average Stokes vector to the changing secondary Stokes vector allows for these polarization-dependent transformations to be recognized.

Abstract translation: 提出了一种利用额外的斯托克斯参数测量来确定平均斯托克斯矢量以及围绕斯托克斯矢量的偏振状态的任何旋转的偏振计。 光学偏振仪被配置为在多个不同条件下测量产生两个平均斯托克斯矢量和至少一个其他次要（经过滤波的）斯托克斯矢量的极化状态（SOP），后者因此从用于 创建平均斯托克斯矢量。 从滤波输入创建的次斯托克斯矢量将随着时间的推移随着偏振变换（基于滤波器相关的变化）而发生变化，而平均斯托克斯矢量将保持恒定值。 因此，平均斯托克斯矢量与改变的次斯托克斯矢量的比较允许识别这些偏振相关的变换。

公开(公告)号：US20140268148A1

公开(公告)日：2014-09-18

申请号：US14215739

申请日：2014-03-17

Applicant: Yin Wang ,  Gerard Wysocki

Inventor： Yin Wang ,  Gerard Wysocki

IPC: G01J4/04 ,  G01N21/21

CPC classification number: G01N21/21 ,  G01J3/447 ,  G01N21/1717 ,  G01N2021/1727

Abstract: A dual-modulation Faraday rotation spectroscopic (FRS) system is disclosed. The FRS system uses an FRS sample cell configured to subject a sample to a low frequency modulated magnetic field. The system includes a polarized laser light source configured to generate a high frequency wavelength-modulated light beam incident on the sample, the high frequency wavelength-modulated light beam being modulated at a higher frequency than the low frequency modulated magnetic field. A polarizer is configured to receive from the sample a transmitted light beam having a modulated polarization having a polarization rotation and translate the modulated polarization of the transmitted light beam into an intensity modulated beam. A photodetector is configured to detect the intensity modulated beam and generate a photodetector signal. A dual demodulator is coupled to the photodetector and is configured to demodulate the photodetector signal.

Abstract translation: 公开了一种双调制法拉第旋转光谱（FRS）系统。 FRS系统使用被配置为使样本进入低频调制磁场的FRS采样单元。 该系统包括被配置为产生入射在样品上的高频波长调制光束的偏振激光光源，高频波长调制光束以比低频调制磁场更高的频率进行调制。 偏振器被配置为从样本接收具有具有偏振旋转的调制偏振的透射光束，并将透射光束的调制偏振转换成强度调制光束。 光电检测器被配置为检测强度调制光束并产生光电检测器信号。 双重解调器耦合到光电检测器并且被配置为解调光电检测器信号。

公开(公告)号：US20130044318A1

公开(公告)日：2013-02-21

申请号：US13587442

申请日：2012-08-16

Applicant: Yong Jai CHO ,  Won CHE GAL ,  Hyun Mo CHO

Inventor： Yong Jai CHO ,  Won CHE GAL ,  Hyun Mo CHO

IPC: G06F17/14 ,  G01J4/04

CPC classification number: G01N21/211 ,  G01N2021/213 ,  G06F17/141

Abstract: Provided is a real-time spectroscopic ellipsometer capable of obtaining information on properties of a sample, a nano pattern shape, in real time by measuring and analyzing, for a plurality of wavelengths, a change in a polarization state of incident light generated while being reflected or transmitted due to the sample when light having a specific polarization component is incident to the sample.

Abstract translation: 提供一种实时光谱椭偏仪，能够通过对多个波长进行测量和分析来反射所产生的入射光的偏振状态的变化，实时获得样品的性质，纳米图案形状的信息。 或者当具有特定偏振分量的光入射到样品时由于样品而被传输。