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    Micro-electro-mechanical switch beam construction with minimized beam distortion and method for constructing
    81.
    发明授权
    Micro-electro-mechanical switch beam construction with minimized beam distortion and method for constructing 有权

    公开(公告)号：US08536964B2

    公开(公告)日：2013-09-17

    申请号：US13741609

    申请日：2013-01-15

    Applicant: Raymond Goggin ,  Padraig Fitzgerald

    Inventor： Raymond Goggin ,  Padraig Fitzgerald

    IPC: H01H51/22

    CPC classification number: H01H57/00 ,  B81B7/0012 ,  B81B2201/014 ,  H01H59/0009

    Abstract: Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor, an anchor beam interface and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate. The anchor beam interface coupling the anchor to the hinge. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a voltage differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

    SHUNT SWITCH AT COMMON PORT TO REDUCE HOT SWITCHING
    82.
    发明申请
    SHUNT SWITCH AT COMMON PORT TO REDUCE HOT SWITCHING 有权
    在通用端口的分流开关减少热切换

    公开(公告)号：US20130207714A1

    公开(公告)日：2013-08-15

    申请号：US13764324

    申请日：2013-02-11

    Applicant: RF MICRO DEVICES, INC.

    Inventor： Ruediger Bauder ,  Nadim Khlat ,  Julio Costa ,  Jonathan Hammond

    IPC: B81B7/00

    CPC classification number: B81B7/0022 ,  B81B2201/014 ,  B81C1/00976 ,  H01H59/0009 ,  H04W52/02

    Abstract: Pilot switch circuitry grounds a hot node (an injection node) of a microelectromechanical system (MEMS) switch to reduce or eliminate arcing between a cantilever contact and a terminal contact when the MEMS switch is opened or closed. The pilot switch circuitry grounds the hot node prior to, during, and after the cantilever contact and terminal contact of the MEMS come into contact with one another (when the MEMS switch is closed). Additionally, the pilot switch circuitry grounds the hot node prior to, during, and after the cantilever contact and terminal contact of the MEMS disengage from one another (when the MEMS switch is opened).

    Abstract translation: 导向开关电路将微机电系统（MEMS）开关的热节点（注入节点）接地，以在MEMS开关打开或关闭时减少或消除悬臂触点和端子触点之间的电弧。 在MEMS悬臂接触之前，期间和之后，导频开关电路将热节点接地，并且MEMS的端子接触彼此接触（当MEMS开关闭合时）。 此外，导频开关电路在MEMS的彼此脱离接合之前，之中和之后，以及MEMS的彼此脱离接合（当MEMS开关断开时）接地。

    Method of manufacturing a switch system
    83.
    发明授权
    Method of manufacturing a switch system 有权
    制造开关系统的方法

    公开(公告)号：US08506826B2

    公开(公告)日：2013-08-13

    申请号：US13195949

    申请日：2011-08-02

    Applicant: John E. Rogers

    Inventor： John E. Rogers

    IPC: C23F1/00

    CPC classification number: B81C1/00714 ,  B81B2201/014 ,  B81B2203/0109 ,  B81B2207/03 ,  B81B2207/99 ,  B81C1/00341 ,  B81C2201/0143 ,  B81C2203/037 ,  H01H1/0036 ,  H01H59/0009 ,  H01H2001/0073

    Abstract: A method for manufacturing a micro electro-mechanical system (MEMS) switch system (600, 700) includes etching each of a plurality of base circuit layers (425) and a plurality of passive component substrate layers (412, 418, 42, 426). The method continues with laser milling of a first dielectric film (406) to create a spacer layer (405). A metal cladding (402, 403) formed on a flexible dielectric film layer 404 is etched so as to form a plurality of switch component features. Further laser milling is performed with respect to the flexible dielectric film layer to form at least one switch structure (448, 450). Thereafter, a stack (400) is assembled which is comprised of the spacer layer disposed between the flexible dielectric film layer and the plurality of base circuit layers. Additional layers can also be included in the stack. When the stack is completed, heat and pressure are applied to join the various layers forming the stack.

    Abstract translation: 一种用于制造微机电系统（MEMS）开关系统（600,700）的方法包括蚀刻多个基极电路层（425）和多个无源部件衬底层（412,418,42,426）中的每一个， 。 该方法继续激光研磨第一介电膜（406）以产生间隔层（405）。 形成在柔性电介质膜层404上的金属覆层（402,403）被蚀刻以形成多个开关元件特征。 相对于柔性电介质膜层进行激光研磨以形成至少一个开关结构（448,450）。 此后，组装叠层（400），其由设置在柔性电介质膜层和多个基极电路层之间的间隔层组成。 堆栈中还可以包含附加层。 当堆叠完成时，施加热和压力以连接形成堆叠的各种层。

    MICRO-ELECTRO-MECHANICAL SWITCH BEAM CONSTRUCTION WITH MINIMIZED BEAM DISTORTION AND METHOD FOR CONSTRUCTING
    84.
    发明申请
    MICRO-ELECTRO-MECHANICAL SWITCH BEAM CONSTRUCTION WITH MINIMIZED BEAM DISTORTION AND METHOD FOR CONSTRUCTING 有权
    具有最小波束失真的微机电开关梁结构和构造方法

    公开(公告)号：US20130032454A1

    公开(公告)日：2013-02-07

    申请号：US13648224

    申请日：2012-10-09

    Applicant: ANALOG DEVICES, INC.

    Inventor： Denis ELLIS ,  Padraig FITZGERALD ,  Jo-ey WONG ,  Raymond GOGGIN ,  Richard Tarik ECKL

    IPC: H01H57/00 ,  H01H11/00

    CPC classification number: H01H11/00 ,  B81B3/0081 ,  B81B2201/014 ,  H01H1/0036 ,  H01H59/0009 ,  Y10T29/49002 ,  Y10T29/49105

    Abstract: Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

    Abstract translation: 公开了一种微电子机械开关，其包括耦合到衬底的具有栅极连接的衬底，源极连接，漏极连接和开关结构。 开关结构包括梁构件，锚和铰链。 所述梁构件具有足以突出所述栅极连接和所述排出连接的长度。 所述锚将所述开关结构耦合到所述基底，所述锚具有宽度。 铰链将梁构件沿着锚固件的长度在相应位置处联接到锚固件，铰链响应于门和梁构件之间建立的电荷差异而弯曲。 开关结构在靠近铰链的区域中在基板和锚之间具有间隙。

    Micro-electro-mechanical switch beam construction with minimized beam distortion and method for constructing
    85.
    发明授权
    Micro-electro-mechanical switch beam construction with minimized beam distortion and method for constructing 有权
    微电机械开关梁结构，最小化波束失真和构造方法

    公开(公告)号：US08294539B2

    公开(公告)日：2012-10-23

    申请号：US12338767

    申请日：2008-12-18

    Applicant: Denis Ellis ,  Padraig Fitzgerald ,  Jo-ey Wong ,  Raymond Goggin ,  Richard Tarik Eckl

    Inventor： Denis Ellis ,  Padraig Fitzgerald ,  Jo-ey Wong ,  Raymond Goggin ,  Richard Tarik Eckl

    IPC: H01H51/22

    CPC classification number: H01H11/00 ,  B81B3/0081 ,  B81B2201/014 ,  H01H1/0036 ,  H01H59/0009 ,  Y10T29/49002 ,  Y10T29/49105

    Abstract: Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

    Abstract translation: 公开了一种微电子机械开关，其包括耦合到衬底的具有栅极连接的衬底，源极连接，漏极连接和开关结构。 开关结构包括梁构件，锚和铰链。 所述梁构件具有足以突出所述栅极连接和所述排出连接的长度。 所述锚将所述开关结构耦合到所述基底，所述锚具有宽度。 铰链将梁构件沿着锚固件的长度在相应位置处联接到锚固件，铰链响应于门和梁构件之间建立的电荷差异而弯曲。 开关结构在靠近铰链的区域中在基板和锚之间具有间隙。

    Large area organic LED display
    86.
    发明授权
    Large area organic LED display 有权
    大面积有机LED显示屏

    公开(公告)号：US08278828B1

    公开(公告)日：2012-10-02

    申请号：US12775529

    申请日：2010-05-07

    Applicant: James C. Rutherford

    Inventor： James C. Rutherford

    IPC: G09G3/10

    CPC classification number: B81B7/04 ,  B81B2201/014 ,  B81B2201/032 ,  B81B2207/053 ,  G09G3/2014 ,  G09G3/3225 ,  G09G3/3266 ,  G09G3/3283 ,  G09G3/3433 ,  G09G2300/08 ,  G09G2300/0809 ,  G09G2310/0256 ,  G09G2310/0259 ,  G09G2310/066 ,  G09G2330/04

    Abstract: An active matrix organic LED display having a matrix of multiple light emitting pixels and electronic drive circuitry for selectively addressing the pixels, each pixel containing an organic LED. The electronic drive circuitry includes row scan electrodes and column data electrodes that interconnect the matrix of pixels. The circuitry also includes a MEMS switching device and a memory capacitor for each pixel, the MEMS switching device connecting the memory capacitor to a column data electrode during addressing of a pixel and connecting the memory capacitor to the organic LED of each pixel during light emission.

    Abstract translation: 一种具有多个发光像素矩阵的有源矩阵有机LED显示器和用于选择性寻址像素的电子驱动电路，每个像素包含有机LED。 电子驱动电路包括互连像素矩阵的行扫描电极和列数据电极。 电路还包括用于每个像素的MEMS开关器件和存储器电容器，MEMS开关器件在寻址像素期间将存储器电容器连接到列数据电极，并且在发光期间将存储器电容器连接到每个像素的有机LED。

    Thermal actuator for a MEMS-based relay switch
    87.
    发明授权
    Thermal actuator for a MEMS-based relay switch 有权
    用于基于MEMS的继电器开关的热致动器

    公开(公告)号：US08154378B2

    公开(公告)日：2012-04-10

    申请号：US11836860

    申请日：2007-08-10

    Applicant: Validmir Anatolyevich Aksyuk ,  Flavio Pardo ,  Maria Elina Simon

    Inventor： Validmir Anatolyevich Aksyuk ,  Flavio Pardo ,  Maria Elina Simon

    IPC: H01H61/00 ,  H01H71/16 ,  H01H71/18 ,  H01H61/02 ,  F01B29/10 ,  F02G1/04

    CPC classification number: H01H61/02 ,  B81B3/0024 ,  B81B2201/014 ,  B81B2201/031 ,  H01H2061/008

    Abstract: A representative embodiment of the invention provides a thermal actuator for a MEMS-based relay switch. The thermal actuator has an “active” arm that is movably mounted on a substrate. The “active” arm has (i) a thermal expansion layer and (ii) a resistive heater that is electrically isolated from the thermal expansion layer. The thermal expansion layer is adapted to expand in response to a temperature change induced by a control current flowing through the resistive heater, thereby bending the “active” arm and moving that arm with respect to the substrate. Due to the fact that mechanical and electrical characteristics of the “active” arm are primarily controlled by the thermal expansion layer and the resistive heater, respectively, those characteristics can be optimized independently to obtain better operating characteristics for MEMS-based relay switches of the invention compared to those attained in the prior art.

    Abstract translation: 本发明的代表性实施例提供了一种用于基于MEMS的继电器开关的热致动器。 热致动器具有可移动地安装在基板上的“主动”臂。 “主动”臂具有（i）热膨胀层和（ii）与热膨胀层电隔离的电阻加热器。 热膨胀层适应于由流过电阻加热器的控制电流引起的温度变化而膨胀，从而弯曲“主动”臂并相对于基板移动该臂。 由于“主动”臂的机械和电气特性分别主要由热膨胀层和电阻加热器控制，可以独立地优化这些特性以获得本发明的基于MEMS的继电器开关更好的工作特性 与现有技术中获得的相比。

    MEMS device with bi-directional element
    90.
    发明授权
    MEMS device with bi-directional element 有权
    具有双向元件的MEMS器件

    公开(公告)号：US07973637B2

    公开(公告)日：2011-07-05

    申请号：US12732752

    申请日：2010-03-26

    Applicant: Arman Gasparyan ,  John VanAtta Gates, II ,  Maria Elina Simon

    Inventor： Arman Gasparyan ,  John VanAtta Gates, II ,  Maria Elina Simon

    IPC: H01H61/01

    CPC classification number: H01H1/0036 ,  B81B3/0024 ,  B81B2201/014 ,  B81B2201/031 ,  H01H37/00 ,  H01H2001/0047 ,  H01H2037/008 ,  H01H2061/006 ,  H01H2061/008

    Abstract: The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.

    Abstract translation: 本发明提供一种双向微电子机械元件，包括双向元件的微机电开关，以及减少双向元件中机械蠕变的方法。 在一个实施例中，双向微机电元件包括​​具有自由端的冷梁和连接到冷束锚的第一端。 冷梁锚附接到基板。 第一束对通过自由端系绳连接到冷束，并且被构造成在被加热时延伸到比冷束的温度更大的温度。 第二光束对位于与第一光束对的冷光束的相对侧上，并且通过自由端系绳耦合到第一光束对和冷光束。 第二束对被配置成在被加热时延长到更高的温度。

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