MANUFACTURING METHOD OF LARGE-OUTER-DIAMETER QUARTZ CRUCIBLE FOR CZOCHRALSKI (CZ) SINGLE CRYSTAL

    公开(公告)号:US20240262734A1

    公开(公告)日:2024-08-08

    申请号:US18575887

    申请日:2022-03-31

    CPC classification number: C03B20/00 C30B35/002 C03B2201/02

    Abstract: A manufacturing method of a large-outer-diameter quartz crucible for a Czochralski (CZ) single crystal is provided. The manufacturing method is a vacuum arc method, and specifically includes: releasing a high-temperature arc with an electrode bundle composed of 2N+1 electrodes to fuse a crucible blank, and performing rapid cooling to form an initial quartz crucible product, where N is an integer greater than or equal to 2; the 2N+1 electrodes include one central main electrode and 2N auxiliary electrodes; the 2N auxiliary electrodes are equidistantly distributed on a circumference with the central main electrode as a center; the central main electrode is aligned at an axis of the crucible mold; the 2N auxiliary electrodes are connected to two phases of an industrial three-phase power, and the two phases are alternately arranged on the auxiliary electrodes; the central main electrode is connected to a remaining phase of the industrial three-phase power.

    METHOD FOR PRODUCING A PORE-CONTAINING OPAQUE QUARTZ GLASS

    公开(公告)号:US20170341968A1

    公开(公告)日:2017-11-30

    申请号:US15602919

    申请日:2017-05-23

    CPC classification number: C03B20/00 C03B19/066 C03B2201/02

    Abstract: A method for producing a pore-containing opaque quartz glass includes: (a) producing porous SiO2 granulate particles from synthetically produced SiO2, (b) thermally densifying the SiO2 granulate particles to form partly densified SiO2 granulate particles, (c) forming a dispersion from the partly densified SiO2 granulate particles, (d) comminuting the partly densified SiO2 granulate particles to form a slip containing comminuted SiO2 granulate particles, (e) shaping the slip into a shaped body and forming a porous SiO2 green body with a green density rG, and (f) sintering the SiO2 green body into opaque quartz glass. To produce opaque quartz glass that is also suited for the use of spray granulate, during step (b), partly densified SiO2 granulate particles are produced with a specific surface BET-(A) between 0.025 and 2.5 m2/g, and during step (d), comminuted SiO2 granulate particles are produced with a specific surface BET-(B) between 4 and 10 m2/g.

    METHOD FOR PRODUCING SYNTHETIC QUARTZ GLASS OF SIO2 GRANULATE AND SIO2 GRANULATE SUITED THEREFOR
    90.
    发明申请
    METHOD FOR PRODUCING SYNTHETIC QUARTZ GLASS OF SIO2 GRANULATE AND SIO2 GRANULATE SUITED THEREFOR 审中-公开
    生产SIO2颗粒和SIO2颗粒的合成石英玻璃的方法

    公开(公告)号:US20160090319A1

    公开(公告)日:2016-03-31

    申请号:US14864103

    申请日:2015-09-24

    Abstract: A method for producing synthetic quartz glass by fusion of SiO2 granulate involves synthesizing amorphous SiO2 primary particles, granulating the amorphous SiO2 primary particles to form an open-pore SiO2 granulate, sintering the open-pore SiO2 granulate by heating in a sintering atmosphere at a sintering temperature and for a sintering period to form a densified SiO2 granulate, and melting the densified SiO2 granulate at a melting temperature to form the synthetic quartz glass. To provide an inexpensive production of low-bubble transparent components of quartz glass despite the use of still open-pore SiO2 granulate, the sintering atmosphere, sintering temperature and sintering duration are adjusted such that the densified SiO2 granulate still comprises open pores but manifests a material-specific infrared transmission T1700 at a wavelength of 1700 nm. This transmission is in the range of 50-95% of the infrared transmission T1700 of quartz glass granules of the same material.

    Abstract translation: 通过SiO 2颗粒熔融制造合成石英玻璃的方法包括合成无定形SiO 2一次颗粒,造粒无定形SiO 2一次颗粒以形成开孔SiO 2颗粒,通过在烧结气氛中加热烧结开孔SiO 2颗粒 温度和烧结时间以形成致密化的SiO 2颗粒,并且在熔融温度下熔化致密的SiO 2颗粒以形成合成石英玻璃。 尽管使用仍然是开孔的SiO 2颗粒,为了提供石英玻璃的低气泡透明组分的廉价生产,调节烧结气氛,烧结温度和烧结持续时间,使得致密的SiO 2颗粒仍然包括开孔,但表现出一种材料 特定的红外透射T1700,波长为1700nm。 该透射率在相同材料的石英玻璃颗粒的红外透射率T1700的50-95%的范围内。

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