Abstract:
An optical fiber is disclosed in which the core region of the optical fiber is doped with Cl and F in order to reduce the viscosity mismatch between the core region and the adjacent cladding region. In one embodiment of the invention, the optical fiber is a single-mode step index optical fiber having a core region doped with Cl and F in an amount effective to produce a difference in temperature between the glass transition temperature of the core region and the glass transition temperature of the adjacent cladding region of less than about 200null C.
Abstract:
A method for making silica includes delivering a silica precursor comprising a perfluorinated group to a conversion site and passing the silica precursor through a conversion flame to produce silica soot.
Abstract:
Even if an optical fiber obtained by drawing a preform is exposed to hydrogen atmosphere, an OH peak in the optical fiber at wavelength of about 1385 nm hardly rises regardless of the condition of drawing.
Abstract:
In a method for manufacturing a glass preform through a heating process of heating a glass particles deposit including a clad partially while moving it successively in a longitudinal direction to form the glass particles deposit, and vitrifying the glass particles deposit to form the glass preform, wherein a chlorine based gas is preferably included at least in the atmosphere of a furnace tube 2 to vitrify the glass preform 9 in the process of heating the glass particles deposit while moving at least the glass particles deposit upward or downward, using a lift 7 for traversing the glass particles deposit (glass preform 9) upward or downward throughout the process.
Abstract:
High purity direct deposit vitrified silicon oxyfluoride glass suitable for use as a photomask substrates for photolithography applications in the VUV wavelength region below 190 nm is disclosed. The inventive direct deposit vitrified silicon oxyfluoride glass is transmissive at wavelengths around 157 nm, making it particularly useful as a photomask substrate at the 157 nm wavelength region. The inventive photomask substrate is a dry direct deposit vitrified silicon oxyfluoride glass which exhibits very high transmittance in the vacuum ultraviolet (VUV) wavelength region while maintaining the excellent thermal and physical properties generally associated with high purity fused silica. In addition to containing fluorine and having little or no OH content, the inventive direct deposit vitrified silicon oxyfluoride glass suitable for use as a photomask substrate at 157 nm is also characterized by having less than 1null1017 molecules/cm3 of molecular hydrogen and low chlorine levels.
Abstract:
A method of manufacturing an optical waveguide perform includes exposing a soot preform to an atmosphere including a chlorine-containing compound and thereby doping the soot preform with chlorine, wherein the absolute pressure of the atmosphere is greater than about 1.013null102 kPa. An apparatus for manufacturing an optical waveguide preform using a soot preform includes a furnace defining a chamber adapted to contain the soot preform and including a heating device operable to heat the chamber. A fluid control system is operable to provide an atmosphere including a chlorine-containing compound in the chamber at an absolute pressure of greater than about 1.013null102 kPa.
Abstract:
A porous glass intermediate body constructed by a core original layer formed as a core portion of an optical fiber, and a first clad original layer formed as a first clad portion of the optical fiber is formed. Thereafter, a transparent glass intermediate body is made by consolidating the porous glass intermediate body within an atmospheric gas with a chlorine-based gas with no fluorine compound. Thereafter, a porous optical fiber base material is made by forming a second clad original layer as a second clad portion of the optical fiber on the circumferential surface of the transparent glass intermediate body. When a porous state is then maintained, the porous optical fiber base material is dehydrated within the atmospheric gas with a chlorine concentration higher than that during the consolidation of the porous glass intermediate body. Thereafter, an optical fiber base material is manufactured by consolidating the porous optical fiber base material within a similar atmospheric gas. The optical fiber is made by wire-drawing this optical fiber base material.
Abstract:
The present invention relates to a glass article for use as an optical waveguide fiber and more particularly to an optical waveguide fiber, the core of which is doped with a chalcogenide element to significantly increase the refractive index of the core. The subject of this invention is novel doped silica core compositions wherein a portion of the oxygen in the silica is replaced with either sulfur, selenium or tellurium using plasma enhanced chemical vapor deposition (PECVD). These compositions are designed to have higher refractive indices than silica, low coefficients of expansion, high optical transparency, and appropriate viscosity and softening points to make them ideal candidates for use as optical waveguide fibers.
Abstract:
High purity direct deposit vitrified silicon oxyfluoride glass suitable for use as a photomask substrates for photolithography applications in the VUV wavelength region below 190 nm is disclosed. The inventive direct deposit vitrified silicon oxyfluoride glass is transmissive at wavelengths around 157 nm, making it particularly useful as a photomask substrate at the 157 nm wavelength region. The inventive photomask substrate is a dry direct deposit vitrified silicon oxyfluoride glass which exhibits very high transmittance in the vacuum ultraviolet (VUV) wavelength region while maintaining the excellent thermal and physical properties generally associated with high purity fused silica. In addition to containing fluorine and having little or no OH content, the inventive direct deposit vitrified silicon oxyfluoride glass suitable for use as a photomask substrate at 157 nm is also characterized by having less than 1×1017 molecules/cm3 of molecular hydrogen and low chlorine levels.
Abstract:
A method and apparatus for forming a glass article such as an optical fiber having a substantially matching viscosity across an interface associated with a first section and a second section of the optical fiber is disclosed herein. The first section has a first halogen concentration and the second section has a second halogen concentration. At least one of a partial pressure of the second halogen provided to a substrate tube and a temperature of the substrate tube is configured to affect the concentration of the second halogen in the second section. Optical fiber embodiments are also included.