Mixed powder and a method for producing quartz glass using the powder
    81.
    发明授权
    Mixed powder and a method for producing quartz glass using the powder 有权
    混合粉末和使用粉末生产石英玻璃的方法

    公开(公告)号:US07905932B2

    公开(公告)日:2011-03-15

    申请号:US11897406

    申请日:2007-08-30

    Applicant: Tatsuhiro Sato

    Inventor: Tatsuhiro Sato

    Abstract: A mixed quartz powder contains quartz powder and two or more types of doping element in an amount of from 0.1 to 20 mass %. The aforementioned doped elements include a first dope element selected from the group consisting of N, C and F, and a second dope element selected from the group consisting of Mg, Ca, Sr, Ba, Sc, Y, Ti, Zr, Hf, the lanthanides and the actinides. The “quartz powder” is a powder of crystalline quartz or it is a powder of glassy SiO2 particles. It is made form natural occurring quartz or it is fabricated synthetically. The “quartz powder” may be doped. The compounding ratio of the total amount (M1) of the aforementioned first elements and the total amount (M2) of the aforementioned second elements as the ratio of the number of atoms (M1)/(M2) is preferably from 0.1 to 20. Al as well as the aforementioned doped elements is preferably included in a mixed quartz powder of this invention.

    Abstract translation: 混合石英粉含有0.1〜20质量%的石英粉和2种以上的掺杂元素。 上述掺杂元素包括选自N,C和F的第一掺杂元素和选自Mg,Ca,Sr,Ba,Sc,Y,Ti,Zr,Hf的第二掺杂元素, 镧系元素和锕系元素。 “石英粉”是结晶石英粉,或是玻璃状SiO 2粉末的粉末。 它由天然石英制成,或者由合成制成。 可以掺杂“石英粉”。 上述第一元素的总量(M1)与上述第二元素的总量(M2)的配位比优选为0.1〜20。作为原子数(M1)/(M2)的比例,优选为0.1〜20。 以及上述掺杂元素优选包括在本发明的混合石英粉末中。

    Quartz glass having excellent resistance against plasma corrosion and method for producing the same
    87.
    发明授权
    Quartz glass having excellent resistance against plasma corrosion and method for producing the same 有权
    具有优异的等离子体腐蚀性的石英玻璃及其制造方法

    公开(公告)号:US07365037B2

    公开(公告)日:2008-04-29

    申请号:US11076944

    申请日:2005-03-11

    Abstract: As a jig material to use under plasma reaction for producing semiconductors the present invention provides a quartz glass having resistance against plasma corrosion, particularly corrosion resistance against fluorine-based plasma gases, and which is usable without causing anomalies to silicon wafers; the present invention furthermore provides a quartz glass jig, and a method for producing the same. A quartz glass containing 0.1 to 20 wt % in total of two or more types of metallic elements, said metallic elements comprising at least one type of metallic element selected from Group 3B of the periodic table as a first metallic element and at least one type of metallic element selected from the group consisting of Mg, Ca, Sr, Ba, Sc, Y, Ti, Zr, Hf, lanthanoids, and actinoids as a second metallic element, provided that the maximum concentration of each of the second metallic elements is 1.0 wt % or less.

    Abstract translation: 作为用于制造半导体的等离子体反应的夹具材料,本发明提供了具有耐等离子体腐蚀性,特别是耐氟基等离子体气体的耐腐蚀性的石英玻璃,其可以在不引起硅晶片异常的情况下使用; 本发明还提供一种石英玻璃夹具及其制造方法。 含有0.1〜20重量%的两种以上金属元素的石英玻璃,所述金属元素包含选自元素周期表第3B族的至少一种金属元素作为第一金属元素和至少一种 金属元素选自Mg,Ca,Sr,Ba,Sc,Y,Ti,Zr,Hf,镧系元素和锕系元素作为第二金属元素,条件是每个第二金属元素的最大浓度为1.0 wt%以下。

    Mixed powder and a method for producing quartz glass using the powder
    88.
    发明申请
    Mixed powder and a method for producing quartz glass using the powder 有权
    混合粉末和使用粉末生产石英玻璃的方法

    公开(公告)号:US20080053151A1

    公开(公告)日:2008-03-06

    申请号:US11897406

    申请日:2007-08-30

    Applicant: Tatsuhiro Sato

    Inventor: Tatsuhiro Sato

    Abstract: A mixed quartz powder contains quartz powder and two or more types of doping element in an amount of from 0.1 to 20 mass %. The aforementioned doped elements include a first dope element selected from the group consisting of N, C and F, and a second dope element selected from the group consisting of Mg, Ca, Sr, Ba, Sc, Y, Ti, Zr, Hf, the lanthanides and the actinides. The “quartz powder” is a powder of crystalline quartz or it is a powder of glassy SiO2 particles. It is made form natural occurring quartz or it is fabricated synthetically. The “quartz powder” may be doped. The compounding ratio of the total amount (M1) of the aforementioned first elements and the total amount (M2) of the aforementioned second elements as the ratio of the number of atoms (M1)/(M2) is preferably from 0.1 to 20. Al as well as the aforementioned doped elements is preferably included in a mixed quartz powder of this invention.

    Abstract translation: 混合石英粉含有0.1〜20质量%的石英粉和2种以上的掺杂元素。 上述掺杂元素包括选自N,C和F的第一掺杂元素和选自Mg,Ca,Sr,Ba,Sc,Y,Ti,Zr,Hf的第二掺杂元素, 镧系元素和锕系元素。 “石英粉”是结晶石英的粉末,或是玻璃状SiO 2颗粒的粉末。 它由天然石英制成,或者由合成制成。 可以掺杂“石英粉”。 上述第一元素的总量(M1)与上述第二元素的总量(M2)的配位比优选为0.1〜20。作为原子数(M1)/(M2)的比例,优选为0.1〜20。 以及上述掺杂元素优选包括在本发明的混合石英粉末中。

    Method of making an optical fiber
    89.
    发明申请
    Method of making an optical fiber 有权
    制造光纤的方法

    公开(公告)号:US20070266738A1

    公开(公告)日:2007-11-22

    申请号:US11437382

    申请日:2006-05-19

    Abstract: According to one embodiment a method of making optical fibers comprises: (i) manufacturing a core cane; (ii) situating a plurality of microstructures selected from rods, air filled tubes and glass filed tubes and placing said microstructures adjacent to the core cane, said microstructures forming no more than 3 layers; (iii) placing the core cane with said adjacent microstructures inside a holding clad tube; and (iv) placing interstitial cladding rods inside the holding (clad) tube, thereby forming an assembly comprising a tube containing a core cane, a plurality of microstructures and interstitial cladding rods. The assembly is then drawn into a microstructured cane and an optical fiber is drawn from the microstructured cane. According to several embodiments, the method of making an optical fiber includes providing at least one air hole and at least one stress rod adjacent to the core.

    Abstract translation: 根据一个实施例,制造光纤的方法包括:(i)制造芯棒; (ii)将选自杆,充气管和玻璃管的多个微结构放置在一起,并将所述微结构放置在与所述芯棒相邻的位置,所述微观结构不超过3层; (iii)将具有所述相邻微结构的芯棒放置在保持包层管内; 以及(iv)将间隙包层杆放置在保持(包覆)管内,由此形成包括含有芯棒,多个微结构和间隙包层棒的管的组件。 然后将组件拉入微结构的拐杖中,并且从微结构的拐杖中拉出光纤。 根据若干实施例,制造光纤的方法包括提供至少一个气孔和与芯相邻的至少一个应力棒。

    Apparatus and method for fabricating glass bodies using an aerosol delivery system
    90.
    发明申请
    Apparatus and method for fabricating glass bodies using an aerosol delivery system 有权
    使用气溶胶输送系统制造玻璃体的设备和方法

    公开(公告)号:US20070137257A1

    公开(公告)日:2007-06-21

    申请号:US11634002

    申请日:2006-12-05

    Abstract: A method of fabricating a glass body that includes a multiplicity of constituents, at least one of which is a dopant (e.g., a rare-earth element) having a low vapor pressure (LVP) precursor comprises the steps of: (a) generating an aerosol from the LVP precursor; (b) separately generating vapors of the other constituents; (c) convecting the aerosol and vapors to deposition system including a substrate; and (d) forming at least one doped layer on a surface of the substrate. In one embodiment, the method also includes filtering the aerosol so as to remove aerosol particles outside of a particular range of sizes. Also described is a unique aerosol generator that is particularly useful in generating aerosols of rare-earth dopants. Particular embodiments directed to the fabrication of Yb-doped optical fibers are described.

    Abstract translation: 一种制造玻璃体的方法,其包括多个组分,其中至少一个是具有低蒸气压(LVP)前体的掺杂剂(例如,稀土元素),其包括以下步骤:(a)产生 来自LVP前体的气溶胶; (b)分别生成其他成分的蒸气; (c)将气溶胶和蒸气对流到包括基底的沉积系统; 和(d)在所述衬底的表面上形成至少一个掺杂层。 在一个实施方案中,该方法还包括过滤气溶胶以除去特定范围的气溶胶颗粒。 还描述了一种独特的气溶胶发生器,其特别用于产生稀土掺杂剂的气溶胶。 描述了涉及制造掺杂Yb的光纤的特定实施例。

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