公开(公告)号：US5273192A

公开(公告)日：1993-12-28

申请号：US895659

申请日：1992-06-09

Applicant: Masayuki Kamiya

Inventor： Masayuki Kamiya

IPC: B05C5/00 ,  B05B15/02 ,  B05C11/08 ,  G03F7/16 ,  H01L21/027 ,  B67B5/00

CPC classification number: G03F7/162 ,  B05B15/02 ,  B05C11/08

Abstract: An apparatus for spraying a photo-resist comprises a resist supply reservoir, a pump and a supply line from the pump to a nozzle. Further provided is a standby receptacle into which an end portion of the nozzle is inserted when not being utilized in a spraying operation. The standby receptacle is supplied with N.sub.2 gas, bubbled through a solvent which is held at a bottom portion of the container, surrounded by an air space. The nozzle rests in a nozzle holder so as to be exposed to the internal atmosphere of the container for preventing clogging of the nozzle due to drying of the solvent when the nozzle is not in use.

Abstract translation: 用于喷涂光致抗蚀剂的装置包括抗蚀剂供应储存器，泵和从泵到喷嘴的供应管线。 还提供了一种备用容器，当不喷洒操作时，喷嘴的端部插入其中。 备用容器被供给N2气体，鼓泡通过保持在容器的底部的溶剂，被空气空间包围。 喷嘴位于喷嘴保持器中，以便暴露于容器的内部气氛中，以防止当喷嘴不使用时由于溶剂的干燥而使喷嘴堵塞。

公开(公告)号：US5259877A

公开(公告)日：1993-11-09

申请号：US850040

申请日：1992-03-12

Applicant: Mitsuru Ozaki

Inventor： Mitsuru Ozaki

IPC: H01J9/22 ,  H01J9/227 ,  H01J9/24 ,  H01J9/46 ,  B05C11/08

CPC classification number: H01J9/2272 ,  Y10T74/18288 ,  Y10T74/2101

Abstract: An apparatus for forming phosphor layers in cathode-ray tubes includes a table having a plurality of operating positions for processing panels for cathode-ray tubes to coat phosphor layers thereon. A plurality of angularly spaced clamp heads for holding the panels, respectively, are supported on the table for rotation about a first axis and angular movement about a second axis in each of the operating positions. A cam, which is operatively connected to the clamp heads, has a first cam groove for angularly moving the clamp heads through different angles about the second axis in the operating positions and a second cam groove for keeping the clamp heads in a fixed angular position with respect to the second axis in the operating positions. Joint cam groove mechanisms are combined with the cam for selectively switching between the first and second cam grooves.

公开(公告)号：US5224994A

公开(公告)日：1993-07-06

申请号：US641437

申请日：1991-01-15

Applicant: Richard K. Daly

Inventor： Richard K. Daly

IPC: B05C3/04 ,  B05C11/08

CPC classification number: B05C3/04 ,  B05C11/08

Abstract: An apparatus and method is provided for liquid treating, particularly with coating materials such as paint, of an article, especially an article having a plurality of internal passages. The article is simultaneously rotated on an axis of rotation of the article and about a circular travel path into, back and forth in, and out of the liquid bath. The coated article is moved out of the bath, naturally drained under gravity, and then subjected first to low speed, then high speed rotation to clear the article of excess coating liquid and partially to dry the coating.

Abstract translation: 提供了一种用于液体处理的设备和方法，特别是用于制品的涂料，例如涂料，特别是具有多个内部通道的制品。 物品同时在物品的旋转轴线上旋转并围绕圆形的行进路径进入，前后进出液槽。 将涂覆的物品从浴中移出，在重力下自然排出，然后首先进行低速，然后高速旋转以清除多余的涂布液体，并部分地干燥涂层。

公开(公告)号：US5215130A

公开(公告)日：1993-06-01

申请号：US921390

申请日：1992-07-30

Applicant: Hisao Kojima ,  Ryoji Saeki

Inventor： Hisao Kojima ,  Ryoji Saeki

IPC: B05B7/32 ,  B05B13/02 ,  B05C9/14 ,  B05C11/08 ,  B05C13/02

CPC classification number: B05C13/025 ,  B05B12/1418 ,  B05B13/0242 ,  B05B7/32 ,  B05C11/08 ,  B05C9/14

Abstract: While the work-mounting sections of the work mounting member is intermittently rotated around the circle by a driving mechanism, works are fed to the work mounting sections at the first position by a work supplying device, predetermined liquid mixture is injected to and applied on works, at the third position, by a injecting mechanism, and those works which have been applied with the liquid mixture are discharged from the work mounting sections, at the second position, by a work discharging mechanism. Upon completion of injection of the liquid mixture in the works, the work mounting sections is moved and is stopped when the next work comes to the third position, and the liquid mixture is likewise injected to and applied on the work. The above operation is repeated, so that injection of the liquid mixture to works, supplying works onto the work mounting section and discharging them therefrom are sequentially executed while the work mounting sections are intermittently rotated around the circle.

Abstract translation: 当工作安装构件的工件安装部分通过驱动机构间歇地围绕着圆周旋转时，工作通过工作供给装置在第一位置被供给到工件安装部分，预定的混合物被注入并施加在工件上 在第三位置处，通过喷射机构，并且已经施加了液体混合物的那些工件通过排料机构从第二位置从工件安装部排出。 当工件中的液体混合物注入完成时，当下一个工作进入第三位置时，工件安装部分移动并停止，同时将液体混合物注入并施加到工件上。 重复上述操作，从而当工件安装部分围绕圆周间歇地旋转时，顺序地执行液体混合物的注入工作，将工件供应到工件安装部分上并将其排出。

公开(公告)号：US5127362A

公开(公告)日：1992-07-07

申请号：US525681

申请日：1990-05-21

Applicant: Haruo Iwatsu ,  Yasuhiro Sakamoto ,  Junro Iwakiri

Inventor： Haruo Iwatsu ,  Yasuhiro Sakamoto ,  Junro Iwakiri

IPC: B05B1/24 ,  B05B12/12 ,  B05C11/08

CPC classification number: B05B1/24 ,  B05B12/12 ,  B05C11/08

Abstract: A liquid coating device for coating a solution on a substrate to form a film includes a chuck for rotatably supporting the substrate, a nozzle for supplying the solution on the substrate, a heater provided in the nozzle for changing a temperature of the solution, a sensor for measuring a temperature of an ambient atmosphere of the substrate, and a controller for controlling the heater according the measured temperature. Thus, a solution having a temperature corresponding to the temperature of the ambient atmosphere is supplied from the nozzle to the substrate.

Abstract translation: 用于在基板上涂布溶液以形成薄膜的液体涂布装置包括用于可旋转地支撑基板的卡盘，用于将溶液供应到基板上的喷嘴，设置在喷嘴中用于改变溶液温度的加热器 用于测量衬底的环境气氛的温度，以及用于根据测量的温度控制加热器的控制器。 因此，具有与周围大气温度对应的温度的溶液从喷嘴供给到基板。

公开(公告)号：US5127359A

公开(公告)日：1992-07-07

申请号：US585681

申请日：1990-09-20

Applicant: Shoji Kannari ,  Hideki Imai

Inventor： Shoji Kannari ,  Hideki Imai

IPC: B05B13/02 ,  B05C11/08

CPC classification number: B05B13/0285 ,  B05C11/08 ,  Y10T74/1884

Abstract: A work holding apparatus for holding a work to be coated such as a bumper for an automobile while rotating the same is disclosed. The work holding apparatus includes a frame mounted for rotation on a support member, a work holding member mounted on the frame by means of a support bar extending perpendicularly to the longitudinal direction of a work, and a drive mechanism for rotating the frame. An axis of rotation of the frame is disposed substantially at a central position of a work held on the work holding member along a width of the work in a direction perpendicular to the longitudinal direction of the work.

Abstract translation: 公开了一种用于保持诸如用于汽车的保险杠的被涂物的工件保持装置，同时旋转它。 工件保持装置包括：安装用于在支撑构件上旋转的框架;通过垂直于工件的纵向方向延伸的支撑杆安装在框架上的工件保持构件以及用于使框架旋转的驱动机构。 框架的旋转轴线基本上设置在沿着与工件的纵向方向垂直的方向上沿工件的宽度保持在工件保持构件上的工件的中心位置。

公开(公告)号：US5090900A

公开(公告)日：1992-02-25

申请号：US577462

申请日：1990-09-04

Applicant: Wagner Rudolf ,  Martin Bader ,  Eberhard Moll ,  Renzo Zanardo ,  J. G. Van Agtmaal

Inventor： Wagner Rudolf ,  Martin Bader ,  Eberhard Moll ,  Renzo Zanardo ,  J. G. Van Agtmaal

IPC: B05C11/08 ,  B05C13/00 ,  B65G49/00 ,  B65G49/07 ,  H01L21/00 ,  H01L21/205 ,  H01L21/3065 ,  H01L21/677 ,  H01L21/687

CPC classification number: H01L21/67167 ,  H01L21/6719 ,  H01L21/68707 ,  Y10S414/135 ,  Y10S414/137 ,  Y10S414/139

Abstract: A workpiece support for supporting a disc-shaped workpiece in a vacuum chamber, comprises a support member with a support surface for carrying the workpiece. A plurality of bores extend from the support surface and through the support member. The bores communicate with a distribution chamber defined on a side of the support member which is opposite from the support surface. The distribution chamber is substantially co-extensive with the support surface and is connected to a gas feed line for supplying gas to the distribution chamber. The bores each have respective diameters which are substantially shorter than their respective lengths through the support member. In this way, gas supplied through the bores from the distribution chamber is distributed between the support surface and the workpiece as a heat transfer medium which is substantially independent from the gas flow at an inlet of each bore in the distribution chamber.

公开(公告)号：US5069155A

公开(公告)日：1991-12-03

申请号：US358355

申请日：1989-05-23

Applicant: Horst Kunze-Concewitz ,  Roland Zaiss

Inventor： Horst Kunze-Concewitz ,  Roland Zaiss

IPC: B65G47/90 ,  B05C11/08 ,  B05C13/02 ,  B41M7/00 ,  G11B7/26 ,  H01L21/00 ,  H01L21/027

CPC classification number: H01L21/6715 ,  B05C13/025 ,  B41M7/0027 ,  B29C65/78 ,  B29C66/452 ,  B29L2017/005

Abstract: An apparatus for in-line lacquering of compact disks, having a processing apparatus for the metered application of a lacquer bead to one surface of the compact disk and for uniformly distributing the lacquer bead over the surface of the compact disc by means of centrifugal force, and having a manipulator for delivering and removing the compact disks to and from the processing apparatus. To enable such an apparatus to operate faster, with unchanged quality of the lacquering, it is provided that the processing apparatus has a lacquer metering station and spaced apart from it a lacquer bead centrifuging station; that a loading station is disposed spaced apart from the lacquer metering station and an unloading station is disposed spaced apart by the same distance from the lacquer bead centrifuging station; and that the manipulator has three parallel grippers which are driven in common, movable in harmonic fashion, between two adjacent stations.

Abstract translation: PCT No.PCT / EP88 / 00858 Sec。 371日期1989年5月23日 102（e）日期1989年5月23日PCT提交1988年9月22日PCT公布。 第WO89 / 02819号公报 日本1989年4月6日。一种用于在线压印光盘的设备，具有用于将光泽珠计量施加到光盘的一个表面上的处理设备，并且用于将清漆珠均匀地分布在压块的表面上 并且具有用于将压缩盘递送到处理装置和从处理装置移出的操作器。 为了使这种设备能够更快地操作，涂料质量不变，处理设备具有漆计量站并与其隔开漆珠离心机; 装载站与漆计量站间隔开设置，并且卸载站与漆珠离心台隔开相同的距离; 并且操纵器具有三个平行的夹持器，其被共同地驱动，可以谐波的方式在两个相邻的站之间移动。

公开(公告)号：US4993355A

公开(公告)日：1991-02-19

申请号：US339310

申请日：1989-04-17

Applicant: Wiebe B. deBoer ,  Albert E. Ozias

Inventor： Wiebe B. deBoer ,  Albert E. Ozias

IPC: B05C11/08 ,  C23C16/44 ,  C23C16/455 ,  H01L21/00 ,  H01L21/68

CPC classification number: C23C16/45521 ,  B05C11/08 ,  H01L21/67115 ,  H01L21/68

Abstract: A rotatable substrate supporting mechanism for use in a chemical vapor deposition reaction chamber of the type used in producing semi-conductor devices is provided with a susceptor for supporting a single substrate, or wafer, for rotation about an axis normal to the center of the wafer. The mechanism is provided with a temperature sensing system for producing signals indicative of sensed temperatures taken at the center of the susceptor and at various points about the periphery thereof. A gas purging system is provided for inhibiting the flow of reactant gas in unwanted areas of the reaction chamber and in the supporting system itself. Rotational driving of the mechanism is accomplished by a variable speed motor under control of a circuit which stops and starts the rotation at controlled speeds and stops the rotation at a home position for enhancing the handling of the wafers.

Abstract translation: 在用于制造半导体器件的类型的化学气相沉积反应室中使用的可旋转衬底支撑机构设置有用于支撑单个衬底或晶片的基座，用于围绕垂直于晶片中心的轴线旋转 。 该机构设置有温度感测系统，用于产生指示在基座的中心处以及在其周边的各个点处拍摄的感测温度的信号。 提供了一种气体净化系统，用于抑制反应室的不需要的区域和支撑系统本身中的反应气体的流动。 该机构的旋转驱动是通过一个电动机控制下的可变速电动机实现的，该电路以受控的速度停止并开始转动，并且在原始位置停止旋转以增强晶片的处理。

公开(公告)号：US4703714A

公开(公告)日：1987-11-03

申请号：US669948

申请日：1984-11-09

Applicant: Imre Bajka ,  Robert Furrer

Inventor： Imre Bajka ,  Robert Furrer

IPC: B23K1/018 ,  H05K3/00 ,  H05K3/34 ,  H05K13/00 ,  B05C11/08

CPC classification number: B23K1/018 ,  H05K13/0061 ,  H05K3/3468 ,  B23K2201/42 ,  H05K2203/0271 ,  H05K2203/0292 ,  H05K2203/044 ,  H05K2203/0445 ,  H05K2203/045 ,  H05K2203/1509 ,  H05K2203/1518 ,  H05K3/0088

Abstract: During the pre-soldering or tinning of printed circuit boards, as a rule, also the drill holes or bores and, in particular, the through-metallized drill holes are filled in an undesirable manner with solder. This solder must be removed before mounting the electrical components or elements upon the printed circuit boards. A simple apparatus is disclosed for this purpose, affording a faultless de-soldering of the drill holes, without deleteriously affecting the properties of the solder material. The printed circuit boards, in a condition where the solder applied during the pre-soldering operation is still molten, are accelerated at least once and thereafter suddenly brought to standstill in such a fashion that the excess solder is knocked or propelled out of the drill holes. The apparatus serves to guide the printed circuit board essentially horizontally in a frame and to accelerate such printed circuit board in a guided vertical drop or fall in the direction of an impact location, so that upon concussion of the frame at the impact location the excess solder is downwardly knocked or propelled out.

Abstract translation: 在印刷电路板的预焊接或镀锡期间，通常，钻孔或孔，特别是贯穿金属化的钻孔也是以不期望的方式用焊料填充的。 在将电气部件或元件安装在印刷电路板上之前，必须除去该焊料。 为此目的公开了一种简单的装置，提供钻孔的无故障的脱焊，而不会有害地影响焊料材料的性质。 在预焊接操作期间施加的焊料仍然熔化的情况下，印刷电路板至少加速一次，然后突然停止，使得多余的焊料从钻孔中被敲击或推出 。 该装置用于将印刷电路板基本上水平地引导到框架中并且以引导的垂直下降或者在冲击位置的方向上下降来加速这种印刷电路板，使得在冲击位置处的框架震荡时，多余的焊料 被向下敲击或推出。