Examination kit for polarized lens
    81.
    发明授权
    Examination kit for polarized lens 失效
    偏光镜检查套件

    公开(公告)号:US08699010B2

    公开(公告)日:2014-04-15

    申请号:US13299344

    申请日:2011-11-17

    CPC classification number: G01M11/0228

    Abstract: An examination kit allows for discovery of the axis of direction and stress areas of polarized lenses. The kit comprises a lower light box with a transparent work surface, two polarized film sheets, a dial gauge with notches defining allowable variation of axis direction and an upper polarized lens for viewing the tested polarized lens in various states and positions.

    Abstract translation: 检查套件允许发现偏光镜片的方向和应力区域的轴。 该套件包括具有透明工作表面的下部灯箱,两个偏光膜片,具有限定轴线方向允许变化的凹口的刻度盘,以及用于观察各种状态和位置的经测试的偏光镜片的上偏振透镜。

    Inspection method and apparatus, and associated computer readable product
    82.
    发明授权
    Inspection method and apparatus, and associated computer readable product 有权
    检验方法和装置,以及相关的计算机可读产品

    公开(公告)号:US08692994B2

    公开(公告)日:2014-04-08

    申请号:US13033135

    申请日:2011-02-23

    CPC classification number: G03F7/70625

    Abstract: A system is configured to measure two separately polarized beams upon diffraction from a substrate in order to determine properties of a grating on a substrate. Linearly polarized light sources are passed via a fixed phase retarder in order to change the phase of one of two orthogonally polarized radiation beams with respect to the other of the two beams. The relative phases of the two radiation beams and other features of the beams as measured in a detector gives rise to properties of the substrate surface. The grating and the initial linear polarization of the radiation beam are angled non-orthogonally relative to each other.

    Abstract translation: 系统被配置为在从基板衍射时测量两个分离的偏振光束,以便确定衬底上的光栅的性质。 线性偏振光源通过固定相位延迟器通过,以改变两个正交偏振辐射束中的一个相对于两个光束中的另一个的相位。 在检测器中测量的两个辐射束的相对相位和光束的其它特征产生了衬底表面的性质。 辐射束的光栅和初始线性极化相对于彼此非正交成角度。

    Through silicon imaging and probing
    84.
    发明授权
    Through silicon imaging and probing 失效
    通过硅成像和探测

    公开(公告)号:US08687192B2

    公开(公告)日:2014-04-01

    申请号:US13074877

    申请日:2011-03-29

    CPC classification number: H04N5/33 G01N21/9501 G01N21/956

    Abstract: Through silicon imaging and probing. A light source provides unpolarized light to be projected on a device under test (DUT). Light reflected from the DUT may be captured by a camera or other image capture device. A pellicle is utilized to reflect light from the light source toward the DUT. The pellicle also passes light reflected by the DUT to the camera. One or more linear polarizers or half wave plates may be used to provide the desired light polarization. The ability to provide the desired polarization provides an improved image that can be captured by the camera.

    Abstract translation: 通过硅成像和探测。 光源提供待投射在待测器件(DUT)上的非偏振光。 从被测物体反射的光可以由相机或其他图像捕获装置捕获。 利用防护薄膜将来自光源的光反射到DUT。 防护薄膜组件还将DUT反射的光传递到相机。 可以使用一个或多个线性偏振器或半波片来提供期望的光偏振。 提供所需极化的能力提供了可由摄像机拍摄的改进图像。

    SNAPSHOT SPATIAL HETERODYNE IMAGING POLARIMETRY
    85.
    发明申请
    SNAPSHOT SPATIAL HETERODYNE IMAGING POLARIMETRY 有权
    SNAPSHOT空间异位成像极化

    公开(公告)号:US20140078298A1

    公开(公告)日:2014-03-20

    申请号:US14091190

    申请日:2013-11-26

    Abstract: Polarization based channeled images are optically demodulated to produce directly viewable images. A channeled image flux is converted to an unpolarized flux by a phosphor or other sensor, and the resulting converted flux is demodulated by modulating at a spatial frequency corresponding to a modulating frequency of the channeled image flux. After modulation, the converted flux is spatially filtered to remove or attenuate portions associated with the modulation frequency and harmonics thereof. The resulting baseband flux is then imaged by direct viewing, projection, or using an image sensor and a display.

    Abstract translation: 基于偏振的信道图像被光学解调以产生直接可见的图像。 通过荧光体或其它传感器将通道图像通量转换成非极化通量,并且通过在对应于通道图像通量的调制频率的空间频率下进行调制来解调所得到的转换通量。 在调制之后,转换的通量被空间滤波以去除或衰减与其调制频率和谐波相关的部分。 然后通过直接观看,投影或使用图像传感器和显示器对所得到的基带通量进行成像。

    Electromagnetic field measurement apparatus
    86.
    发明授权
    Electromagnetic field measurement apparatus 失效
    电磁场测量装置

    公开(公告)号:US08654331B2

    公开(公告)日:2014-02-18

    申请号:US12865908

    申请日:2009-02-04

    CPC classification number: G01R29/0885

    Abstract: There is provided an electromagnetic field measurement apparatus capable of achieving correct and timely circuit operation detection in an area where electronic devices are mounted at high density. An electromagnetic field measurement apparatus includes: a laser light source; a polarized wave controller that linearly polarizes laser light; an optical fiber probe that has an electrooptic material or a magnetooptic material at its leading end and in which the laser light reflected at the leading end is subjected to polarization modulation in accordance with an electric field intensity or a magnetic field intensity; and an analyzer that converts the laser light reflected by the optical fiber probe into intensity modulated light. The laser light source emits time-multiplexed laser light of a plurality of wavelengths different from one another. The electromagnetic field measurement apparatus further includes: an optical circulator that outputs the laser light linearly polarized by the polarized wave controller to a multiplexer/demultiplexer and outputs the laser light input from the multiplexer/demultiplexer to the analyzer; and a multiplexer/demultiplexer that outputs the laser light to different optical fiber probes according to the wavelength of the laser light and outputs the laser light to the optical circulator.

    Abstract translation: 提供一种电磁场测量装置,其能够在电子设备以高密度安装的区域中实现正确和及时的电路操作检测。 电磁场测量装置包括:激光源; 使激光线性偏振的极化波控制器; 在其前端具有电光材料或磁光材料的光纤探针,其中在前端反射的激光根据电场强度或磁场强度进行偏振调制; 以及将由光纤探针反射的激光转换成强度调制光的分析器。 激光光源发射多个彼此不同的波长的多路复用激光。 电磁场测量装置还包括:光学循环器,其将由偏振波控制器线性偏振的激光输出到多路复用器/解复用器,并将从多路复用器/解复用器输入的激光输出到分析器; 以及根据激光的波长将激光输出到不同的光纤探针的多路复用器/解复用器,并将激光输出到光循环器。

    Defect inspecting method and defect inspecting apparatus
    87.
    发明授权
    Defect inspecting method and defect inspecting apparatus 失效
    缺陷检查方法和缺陷检查装置

    公开(公告)号:US08638429B2

    公开(公告)日:2014-01-28

    申请号:US13146428

    申请日:2009-12-15

    Abstract: Provided are a defect inspecting method and a defect inspecting apparatus, wherein defect detecting sensitivity is improved and also haze measurement is performed using polarization detection, while suppressing damages to samples. The defect inspecting apparatus is provided with a light source which oscillates to a sample a laser beam having a wavelength band wherein a small energy is absorbed, and two independent detecting optical systems, i.e., a defect detecting optical system which detects defect scattered light generated by a defect, by radiating the laser beams oscillated by the light source, and a haze detecting optical system which detects roughness scattered light generated due to roughness of the wafer surface. Polarization detection is independently performed with respect to the scattered light detected by the two detecting optical systems, and based on the two different detection signals, defect determination and haze measurement are performed.

    Abstract translation: 提供了一种缺陷检查方法和缺陷检查装置,其中提高了缺陷检测灵敏度,并且在抑制对样本的损害的同时使用偏振检测进行雾度测量。 缺陷检查装置具有向样品振荡的光源,其具有吸收小能量的波长带的激光束,以及两个独立的检测光学系统,即检测由 通过照射由光源振荡的激光束的缺陷,以及检测由于晶片表面的粗糙度而产生的粗糙度散射光的雾度检测光学系统。 相对于由两个检测光学系统检测的散射光独立地进行极化检测,并且基于两个不同的检测信号,执行缺陷确定和雾度测量。

    Measurement method and measurement system for measuring birefringence
    90.
    发明授权
    Measurement method and measurement system for measuring birefringence 有权
    用于测量双折射的测量方法和测量系统

    公开(公告)号:US08542356B2

    公开(公告)日:2013-09-24

    申请号:US13237000

    申请日:2011-09-20

    CPC classification number: G01N21/23 G01M11/0257 G03F7/70566 G03F7/70591

    Abstract: A method measuring the birefringence of an object. A measurement beam having a defined input polarization state is generated, the measurement beam being directed onto the object. Polarization properties of the measurement beam after interaction with the object are detected in order to generate polarization measurement values representing an output polarization state of the measurement beam after interaction with the object. The input polarization state of the measurement beam is modulated into at least four different measurement states in accordance with a periodic modulation function of an angle parameter α, and the polarization measurement values associated with the at least four measurement states are processed to form a measurement function dependent on the angle parameter α. A two-wave portion of the measurement function is determined and analysed in order to derive at least one birefringence parameter describing the birefringence, preferably by double Fourier transformation of the measurement function.

    Abstract translation: 测量物体双折射的方法。 产生具有确定的输入偏振状态的测量光束,测量光束被引导到物体上。 检测与物体相互作用后的测量光束的极化特性,以便在与物体相互作用之后产生表示测量光束的输出偏振状态的偏振测量值。 根据角度参数α的周期性调制函数将测量光束的输入偏振状态调制成至少四个不同的测量状态,并且处理与至少四个测量状态相关联的偏振测量值以形成测量功能 取决于角度参数α。 确定和分析测量功能的两波部分,以便优选地通过测量功能的双傅里叶变换来导出描述双折射的至少一个双折射参数。

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