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公开(公告)号:US09010202B2
公开(公告)日:2015-04-21
申请号:US13560647
申请日:2012-07-27
Applicant: Halina Stabacinskiene , Jeffrey J. Gronsky , Christine M. Thomas , Pushkarraj V. Deshmukh , Alan C. Robins , Paul E. Fischione
Inventor: Halina Stabacinskiene , Jeffrey J. Gronsky , Christine M. Thomas , Pushkarraj V. Deshmukh , Alan C. Robins , Paul E. Fischione
CPC classification number: G01N23/20033 , B01L7/50 , G01N2223/612 , H01J37/20 , H01J37/26 , H01J2237/0216 , H01J2237/2001 , H01J2237/20207 , H01J2237/204
Abstract: An improved cryogenic specimen holder for imaging and analysis facilitates imaging at very high tilt angles with a large field of view. A retractable specimen holder tip protects the specimen during transport. An optimized Dewar design is positioned at a fixed, tilted angle with respect to the axis of the holder, providing a means of continuously cooling the specimen irrespective of the high tilt angle and amount of liquid nitrogen present in the vessel. The Dewar neck design reduces entrapment of nitrogen gas bubbles and its shape prevents the spilling of liquid nitrogen at high tilt angles. The specimen holder has a retractable tip that completely encapsulates the specimen within a shielded environment internal to the specimen holder body. The cooling and specimen transfer mechanisms reduce thermal drift and the detrimental effects of vibrations generated by both the evaporation of liquid nitrogen present in the Dewar and other environmental effects.
Abstract translation: 用于成像和分析的改进的低温试样保持器便于在具有大视场的非常高的倾斜角下进行成像。 可伸缩的样品架头在运输过程中保护样品。 优化的杜瓦设计相对于保持器的轴线定位成固定的倾斜角度,提供连续冷却样品的手段,而不管存在于容器中的高的倾斜角和液氮量。 杜瓦瓶颈设计减少了氮气气泡的夹带,其形状可以防止液氮在高倾角下溢出。 样品架具有可收缩的尖端,其将样品完全包封在样品保持体内部的屏蔽环境内。 冷却和样品转移机制降低了热漂移和由杜瓦瓶中存在的液氮蒸发和其他环境影响产生的振动的不利影响。
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公开(公告)号:US20140098380A1
公开(公告)日:2014-04-10
申请号:US14099512
申请日:2013-12-06
Applicant: Paul E. Fischione , Alan C. Robins , Rocco R. Cerchiara , Joseph M. Matesa, JR.
Inventor: Paul E. Fischione , Alan C. Robins , Rocco R. Cerchiara , Joseph M. Matesa, JR.
CPC classification number: G01N1/28 , G01B11/14 , G01N1/32 , H01J37/185 , H01J37/20 , H01J37/3056 , H01J37/32082 , H01J2237/1825 , H01J2237/3174 , H01J2237/335
Abstract: An apparatus for preparing specimens for microscopy including equipment for providing two or more of each of the following specimen processing activities under continuous vacuum conditions: plasma cleaning the specimen, ion beam or reactive ion beam etching the specimen, plasma etching the specimen and coating the specimen with a conductive material. Also, an apparatus and method for detecting a position of a surface of the specimen in a processing chamber, wherein the detected position is used to automatically move the specimen to appropriate locations for subsequent processing.
Abstract translation: 包括用于在连续真空条件下提供以下两种或多种以下样品处理活性的设备的显微镜准备装置:等离子体清洗样品,离子束或反应离子束蚀刻样品,等离子体蚀刻样品并涂覆样品 与导电材料。 另外,一种用于检测处理室中样品表面的位置的装置和方法,其中检测位置用于自动将样本移动到合适的位置进行后续处理。
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公开(公告)号:US20140157914A1
公开(公告)日:2014-06-12
申请号:US14183195
申请日:2014-02-18
Applicant: Paul E Fischione , Alan C. Robins , Rocco R. Cerchiara , Joseph M. Matesa, JR.
Inventor: Paul E Fischione , Alan C. Robins , Rocco R. Cerchiara , Joseph M. Matesa, JR.
IPC: G01N1/28
CPC classification number: G01N1/28 , G01B11/14 , G01N1/32 , H01J37/185 , H01J37/20 , H01J37/3056 , H01J37/32082 , H01J2237/1825 , H01J2237/3174 , H01J2237/335
Abstract: An apparatus for preparing specimens for microscopy including equipment for providing two or more of each of the following specimen processing activities under continuous vacuum conditions: plasma cleaning the specimen, ion beam or reactive ion beam etching the specimen, plasma etching the specimen and coating the specimen with a conductive material. Also, an apparatus and method for detecting a position of a surface of the specimen in a processing chamber, wherein the detected position is used to automatically move the specimen to appropriate locations for subsequent processing.
Abstract translation: 包括用于在连续真空条件下提供以下两种或多种以下样品处理活性的设备的显微镜准备装置:等离子体清洗样品,离子束或反应离子束蚀刻样品,等离子体蚀刻样品并涂覆样品 与导电材料。 另外,一种用于检测处理室中样品表面的位置的装置和方法,其中检测位置用于自动将样本移动到合适的位置进行后续处理。
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公开(公告)号:US20130014528A1
公开(公告)日:2013-01-17
申请号:US13560647
申请日:2012-07-27
Applicant: Halina Stabacinskiene , Jeffrey J. Gronsky , Christine M. Thomas , Pushkarraj V. Deshmukh , Alan C. Robins , Paul E. Fischione
Inventor: Halina Stabacinskiene , Jeffrey J. Gronsky , Christine M. Thomas , Pushkarraj V. Deshmukh , Alan C. Robins , Paul E. Fischione
IPC: F25B49/00
CPC classification number: G01N23/20033 , B01L7/50 , G01N2223/612 , H01J37/20 , H01J37/26 , H01J2237/0216 , H01J2237/2001 , H01J2237/20207 , H01J2237/204
Abstract: An improved cryogenic specimen holder for imaging and analysis facilitates imaging at very high tilt angles with a large field of view. A retractable specimen holder tip protects the specimen during transport. An optimized Dewar design is positioned at a fixed, tilted angle with respect to the axis of the holder, providing a means of continuously cooling the specimen irrespective of the high tilt angle and amount of liquid nitrogen present in the vessel. The Dewar neck design reduces entrapment of nitrogen gas bubbles and its shape prevents the spilling of liquid nitrogen at high tilt angles. The specimen holder has a retractable tip that completely encapsulates the specimen within a shielded environment internal to the specimen holder body. The cooling and specimen transfer mechanisms reduce thermal drift and the detrimental effects of vibrations generated by both the evaporation of liquid nitrogen present in the Dewar and other environmental effects.
Abstract translation: 用于成像和分析的改进的低温试样保持器便于在具有大视场的非常高的倾斜角下进行成像。 可伸缩的样品架头在运输过程中保护样品。 优化的杜瓦设计相对于保持器的轴线定位成固定的倾斜角度,提供连续冷却样品的手段,而不管存在于容器中的高的倾斜角和液氮量。 杜瓦瓶颈设计减少了氮气气泡的夹带,其形状可以防止液氮在高倾角下溢出。 样品架具有可收缩的尖端,其将样品完全包封在样品保持体内部的屏蔽环境内。 冷却和样品转移机制降低了热漂移和由杜瓦瓶中存在的液氮蒸发和其他环境影响产生的振动的不利影响。
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公开(公告)号:US08336405B2
公开(公告)日:2012-12-25
申请号:US12845486
申请日:2010-07-28
Applicant: Halina Stabacinskiene , Jeffrey J. Gronsky , Christine M. Thomas , Pushkarraj V. Deshmukh , Alan C. Robins , Paul E. Fischione
Inventor: Halina Stabacinskiene , Jeffrey J. Gronsky , Christine M. Thomas , Pushkarraj V. Deshmukh , Alan C. Robins , Paul E. Fischione
CPC classification number: G01N23/20033 , H01J37/20 , H01J37/26 , H01J2237/2001 , H01J2237/20207 , H01J2237/204
Abstract: An improved cryogenic specimen holder for imaging and analysis facilitates imaging at very high tilt angles with a large field of view. A retractable specimen holder tip protects the specimen during transport. An optimized Dewar design is positioned at a fixed, tilted angle with respect to the axis of the holder, providing a means of continuously cooling the specimen irrespective of the high tilt angle and the amount of liquid nitrogen present in the vessel. The Dewar neck design reduces the entrapment of nitrogen gas bubbles and its shape prevents the spilling of liquid nitrogen at high tilt angles. The specimen holder has a retractable tip that completely encapsulates the specimen within a shielded environment internal to the specimen holder body. The cooling and specimen transfer mechanisms reduce thermal drift and the detrimental effects of vibrations generated by both the evaporation of liquid nitrogen present in the Dewar as well as other environmental effects.
Abstract translation: 用于成像和分析的改进的低温试样保持器便于在具有大视场的非常高的倾斜角下进行成像。 可伸缩的样品架头在运输过程中保护样品。 优化的杜瓦设计相对于保持器的轴线定位成固定的倾斜角度,提供连续冷却样品的手段,而不管存在于容器中的高倾斜角和液氮量。 杜瓦瓶颈设计减少了氮气气泡的夹带,其形状可以防止液氮在高倾角下溢出。 样品架具有可收缩的尖端,其将样品完全包封在样品保持体内部的屏蔽环境内。 冷却和样品转移机制减少了热漂移和杜瓦瓶中存在的液氮蒸发产生的振动的不利影响以及其他环境影响。
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6.
公开(公告)号:US08679307B2
公开(公告)日:2014-03-25
申请号:US10633130
申请日:2003-08-01
Applicant: Paul E. Fischione , Alan C. Robins , David W. Smith , Rocco R. Cerchiara , Joseph M. Matesa, Jr.
Inventor: Paul E. Fischione , Alan C. Robins , David W. Smith , Rocco R. Cerchiara , Joseph M. Matesa, Jr.
IPC: C23C14/34
CPC classification number: G01N1/28 , G01B11/14 , G01N1/32 , H01J37/185 , H01J37/20 , H01J37/3056 , H01J37/32082 , H01J2237/1825 , H01J2237/3174 , H01J2237/335
Abstract: An apparatus for preparing specimens for microscopy including equipment for providing two or more of each of the following specimen processing activities under continuous vacuum conditions: plasma cleaning the specimen, ion beam or reactive ion beam etching the specimen, plasma etching the specimen and coating the specimen with a conductive material. Also, an apparatus and method for detecting a position of a surface of the specimen in a processing chamber, wherein the detected position is used to automatically move the specimen to appropriate locations for subsequent processing.
Abstract translation: 包括用于在连续真空条件下提供以下两种或多种以下样品处理活性的设备的显微镜准备装置:等离子体清洗样品,离子束或反应离子束蚀刻样品,等离子体蚀刻样品并涂覆样品 与导电材料。 另外,一种用于检测处理室中样品表面的位置的装置和方法,其中检测位置用于自动将样本移动到合适的位置进行后续处理。
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公开(公告)号:US20120024086A1
公开(公告)日:2012-02-02
申请号:US12845486
申请日:2010-07-28
Applicant: Halina Stabacinskiene , Jeffrey J. Gronsky , Christine M. Thomas , Pushkarraj V. Deshmukh , Alan C. Robins , Paul E. Fischione
Inventor: Halina Stabacinskiene , Jeffrey J. Gronsky , Christine M. Thomas , Pushkarraj V. Deshmukh , Alan C. Robins , Paul E. Fischione
IPC: B01L3/00
CPC classification number: G01N23/20033 , H01J37/20 , H01J37/26 , H01J2237/2001 , H01J2237/20207 , H01J2237/204
Abstract: An improved cryogenic specimen holder for imaging and analysis facilitates imaging at very high tilt angles with a large field of view. A retractable specimen holder tip protects the specimen during transport. An optimized Dewar design is positioned at a fixed, tilted angle with respect to the axis of the holder, providing a means of continuously cooling the specimen irrespective of the high tilt angle and the amount of liquid nitrogen present in the vessel. The Dewar neck design reduces the entrapment of nitrogen gas bubbles and its shape prevents the spilling of liquid nitrogen at high tilt angles. The specimen holder has a retractable tip that completely encapsulates the specimen within a shielded environment internal to the specimen holder body. The cooling and specimen transfer mechanisms reduce thermal drift and the detrimental effects of vibrations generated by both the evaporation of liquid nitrogen present in the Dewar as well as other environmental effects.
Abstract translation: 用于成像和分析的改进的低温试样保持器便于在具有大视场的非常高的倾斜角下进行成像。 可伸缩的样品架头在运输过程中保护样品。 优化的杜瓦设计相对于保持器的轴线定位成固定的倾斜角度,提供连续冷却样品的手段,而不管存在于容器中的高倾斜角和液氮量。 杜瓦瓶颈设计减少了氮气气泡的夹带,其形状可以防止液氮在高倾角下溢出。 样品架具有可收缩的尖端,其将样品完全包封在样品保持体内部的屏蔽环境内。 冷却和样品转移机制减少了热漂移和杜瓦瓶中存在的液氮蒸发产生的振动的不利影响以及其他环境影响。
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