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公开(公告)号：US3866042A
公开(公告)日：1975-02-11
申请号：US37992573
申请日：1973-07-17
Applicant: CAMECA
Inventor： VASTEL JEAN
CPC classification number: H01J49/28 , H01J49/286 , H01J49/324
Abstract: A microanalyser operating by secondary ion emission and comprising a double magnetic-prism for deflecting the ions according to their ''''momentum-to-charge'''' ratio and electrostatic means for filtering the ions according to their ''''energy-tocharge'''' ratio. An element is provided to operate either as an electrostatic mirror allowing the production of images through ion microscopy or as a transmitting and filtering device incorporated in the make-up of a double-focussing mass spectrometer in accordance with the magnetic prism and an electrostatic condenser.
Abstract translation: 通过二次离子发射操作的微型分析仪，包括用于根据“动量与电荷”比率偏转离子的双重磁性棱镜，以及根据其“能量 - 电荷”比对过滤离子的静电装置。 提供元件以作为静电镜来操作，其允许通过离子显微镜产生图像，或作为根据磁性棱镜和静电冷凝器结合在双重聚焦质谱仪的组合中的透射和滤波装置。
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公开(公告)号：US20170372868A1
公开(公告)日：2017-12-28
申请号：US15634471
申请日：2017-06-27
Applicant: CAMECA Instruments Inc.
Inventor： Thomas F. Kelly , Mark Ronald Levesque
IPC: H01J37/18 , H01J37/285
CPC classification number: H01J37/18 , H01J37/16 , H01J37/285 , H01J2237/188 , H01J2237/244 , H01J2237/2852
Abstract: In an atom probe having a vacuum chamber containing a specimen mount and a detector for receiving ions emitted from the specimen, a high vacuum subchamber is provided about the specimen mount, with an aperture in the subchamber allowing passage of emitted ions to the detector. The high vacuum subchamber may be pumped to higher vacuum (lower pressure) than the vacuum chamber, and so long as the pressure in the vacuum chamber is below about 10−1 Pa, very little gas diffusion takes place through the aperture, allowing higher vacuum to be maintained in the subchamber despite the aperture opening to the chamber. The higher vacuum in the subchamber about the specimen assists in reducing noise in atom probe image data. The aperture may conveniently be provided by the aperture in a counter electrode, such as a local electrode, as commonly used in atom probes.
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公开(公告)号：US3659941A
公开(公告)日：1972-05-02
申请号：US3659941D
申请日：1970-07-09
Applicant: CAMECA
Inventor： TONG MATHIAS
CPC classification number: G01J3/32
Abstract: In a two-channel spectrometer, the output signal of the opticoelectrical detector is integrated, while one of the two channels is illuminated, for a duration To at the end of which the integrated signals reaches a value E, one of the two values To and E being predetermined; the output signal of the detector is thereafter integrated, while the other channel is illuminated, for a duration T1 at the end of which the integrated signal reaches the aforesaid value E; T1/To is the transmission coefficient of the first channel relatively to the other one, and a signal function of T1/To is applied to the recorder.
Abstract translation: 在双通道光谱仪中，光电检测器的输出信号被集成，同时两个通道中的一个被照亮一段持续时间To，其中积分信号达到值E，两个值之一 To和E是预定的; 之后，检测器的输出信号被集成，而另一个信道被照亮持续时间T1，其中积分信号达到上述值E; T1 / To是相对于另一个信道的第一信道的传输系数，T1 / To的信号功能被应用于记录器。
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公开(公告)号：US3630626A
公开(公告)日：1971-12-28
申请号：US3630626D
申请日：1970-07-09
Applicant: CAMECA
Inventor： ROUBEROL JEAN-MICHEL
CPC classification number: G01J3/42
Abstract: In an infrared spectrometer with two channels preceded by a device for producing monochromatic radiation and constituted by a collimator, a diffraction grating and a focusing element, the collimator can adopt two angular rest positions by pivoting about an axis perpendicular to the lines of the grating; in these two positions of the collimator, the focusing element directs a monochromatic beam whose wavelength depends solely upon the position of the grating, either onto a first slot or onto a second slot, those slots being respectively coupled to the two channels.
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Patent Agency Ranking
公开(公告)号：US11340256B2
公开(公告)日：2022-05-24
申请号：US16319620
申请日：2018-01-31
Applicant: CAMECA INSTRUMENTS INC.
Inventor： Joseph Hale Bunton , Daniel Robert Lenz , Dana Jeffrey Shepard
IPC: H01J37/285 , G01Q60/30 , G01N27/626 , G01N27/66 , G01Q60/38
Abstract: An atom probe directs two or more pulsed laser beams onto a specimen, with each laser beam being on a different side of the specimen, and with each laser beam supplying pulses at a time different from the other laser beams. The laser beams are preferably generated by splitting a single beam provided by a laser source. The laser beams are preferably successively aligned incident with the specimen by one or more beam steering mirrors, which may also scan each laser beam over the specimen to achieve a desired degree of specimen ionization.
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公开(公告)号：US20210333306A1
公开(公告)日：2021-10-28
申请号：US16319620
申请日：2018-01-31
Applicant: CAMECA INSTRUMENTS INC.
Inventor： Joseph Hale Bunton , Daniel Robert LENZ , Dana Jeffrey SHEPARD
Abstract: An atom probe directs two or more pulsed laser beams onto a specimen, with each laser beam being on a different side of the specimen, and with each laser beam supplying pulses at a time different from the other laser beams. The laser beams are preferably generated by splitting a single beam provided by a laser source. The laser beams are preferably successively aligned incident with the specimen by one or more beam steering mirrors, which may also scan each laser beam over the specimen to achieve a desired degree of specimen ionization.
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公开(公告)号：US20180130636A1
公开(公告)日：2018-05-10
申请号：US15566769
申请日：2015-04-21
Applicant: CAMECA INSTRUMENTS, INC.
Inventor： Joseph Hale BUNTON , Michael Steven VAN DYKE
IPC: H01J37/285
CPC classification number: H01J37/285 , H01J2237/2626
Abstract: In an atom probe having a specimen mount spaced from a detector, and preferably having a local electrode situated next to the specimen mount, a lens assembly is insertable between the specimen (and any local electrode) and detector. The lens assembly includes a decelerating electrode biased to decelerate ions from the specimen mount and an accelerating mesh biased to accelerate ions from the specimen mount, with the decelerating electrode being situated closer to the specimen mount and the decelerating electrode being situated closer to the detector. The decelerating electrode and accelerating mesh cooperate to divert the outermost ions from the specimen mount—which correspond to the peripheral areas of a specimen—so that they reach the detector, whereas they would ordinarily be lost. Because the detector now detects the outermost ions, the peripheral areas of the specimen are now imaged by the detector, providing the detector with a greatly increased field of view of the specimen, as much as 100 degrees (full angle) or more.
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8.发明授权Device for displacing and replacing a specimen in vacuum-tight analysis equipment 失效用于在真空分析设备中移位和替换样品的装置
公开(公告)号：US3587879A
公开(公告)日：1971-06-28
申请号：US3587879D
申请日：1969-07-29
Applicant: CAMECA
Inventor： GUERNET JACQUES
IPC: G01N1/00 , G01N23/225 , H01J37/18 , H01J37/20 , H01J31/26
Abstract: IN A VACUUM TIGHT ANALYSIS EQUIPMENT, THE MECHANISM USED FOR VARYING THE POSITION OF THE STAGE WITH A VIEW TO VARYINGL THE ANALYZED PORTION OF THE SYSTEM ALSO MAKES IT POSSIBLE TO POSITION THIS STAGE OPPOSITE THE INTERNAL OPENING THROUGH WHICH THE SPECIMEN CHAMBER COMMUNICATES WITH THE AIR-LOCK
CHAMBER. AN AUXILIARY MECHANISM THEREAFTER IMPARTS TO THE STAGE A TRANSLATION MOVEMENT AT THE END OF WHICH THIS INTERNAL APERTURE IS OBTURATED BY THE STAGE AFTER A SPECIMEN FIXED THERETO HAS PENETRATED INTO THE AIR-LOCK CHAMBER.-
9.发明授权Apparatus for inserting a constantly oriented specimen chamber in a microanalyser 失效用于在微型计算机中插入永久性的样本室的装置
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