IMAGE SENSING MODULE
    1.
    发明申请
    IMAGE SENSING MODULE 审中-公开
    图像感应模块

    公开(公告)号:US20080017940A1

    公开(公告)日:2008-01-24

    申请号:US11458103

    申请日:2006-07-18

    Inventor: Cheng-Chieh Yang

    Abstract: An image sensing module includes an image sensor chip. The image sensor chip has a first surface and an image sensing area on the first surface, where the image sensing area is utilized for sensing light rays illuminating thereon. The image sensor chip includes a plurality of input/output (I/O) terminals and a plurality of power/ground terminals outside the image sensing area on the first surface, where the I/O terminals are utilized for inputting/outputting signals. The image sensing module further includes a printed circuit board (PCB) having a first surface opposite the first surface of the image sensor chip and having an opening corresponding to the image sensing area, where the image sensing area is aligned within the opening. The image sensing module further includes a light transmissible cover bonded to a second surface of the PCB for covering the opening to protect the image sensing area.

    Abstract translation: 图像感测模块包括图像传感器芯片。 图像传感器芯片具有在第一表面上的第一表面和图像感测区域,其中图像感测区域用于感测照射在其上的光线。 图像传感器芯片包括在第一表面上的图像感测区域之外的多个输入/输出(I / O)端子和多个电源/接地端子,其中I / O端子用于输入/输出信号。 图像感测模块还包括具有与图像传感器芯片的第一表面相对的第一表面的印刷电路板(PCB),并且具有对应于图像感测区域的开口,其中图像感测区域在开口内对准。 图像感测模块还包括结合到PCB的第二表面的透光盖,用于覆盖开口以保护图像感测区域。

    THIN FILM DEPOSITION SYSTEM WITH COOLING MODULE
    3.
    发明申请
    THIN FILM DEPOSITION SYSTEM WITH COOLING MODULE 审中-公开
    具有冷却模块的薄膜沉积系统

    公开(公告)号:US20130291795A1

    公开(公告)日:2013-11-07

    申请号:US13464595

    申请日:2012-05-04

    CPC classification number: C23C16/46 C23C16/4584 C23C16/463

    Abstract: A film deposition apparatus is disclosed. The apparatus comprises: a reaction chamber, a susceptor, a heating module, a driving module, and a cooling module. The susceptor is used for bearing at least one wafer; the heating module is used for heating the wafer; the driving module is used for driving the susceptor to rotate. The cooling module is disposed between the heating module and the driving module. The cooling module is configured to make the temperature distribution between the heating module and the driving module discontinuous.

    Abstract translation: 公开了一种成膜装置。 该装置包括:反应室,基座,加热模块,驱动模块和冷却模块。 基座用于承载至少一个晶片; 加热模块用于加热晶片; 驱动模块用于驱动基座旋转。 冷却模块设置在加热模块和驱动模块之间。 冷却模块被配置为使加热模块和驱动模块之间的温度分布不连续。

    ROTATION SYSTEM FOR THIN FILM FORMATION AND METHOD THEREOF
    4.
    发明申请
    ROTATION SYSTEM FOR THIN FILM FORMATION AND METHOD THEREOF 审中-公开
    用于薄膜形成的旋转系统及其方法

    公开(公告)号:US20120321787A1

    公开(公告)日:2012-12-20

    申请号:US13162431

    申请日:2011-06-16

    Abstract: System and method for forming one or more layers of one or more materials on one or more substrates. The system includes a rotating shell, a susceptor component supported by the rotating shell, and a driving component below the susceptor component and configured to drive the rotating shell and the susceptor component to rotate around a susceptor axis. Additionally, the system includes one or more holder gears located on the susceptor component and configured to rotate around the susceptor axis with the susceptor component and support the one or more substrates, and a central gear engaged to the one or more holder gears and configured to cause the one or more holder gears to rotate around one or more holder axes respectively if the one or more holder gears rotate around the susceptor axis. The susceptor axis is different from the one or more holder axes.

    Abstract translation: 用于在一个或多个基底上形成一层或多层材料的一层或多层的系统和方法。 该系统包括旋转壳体,由旋转壳体支撑的基座部件和基座部件下方的驱动部件,并且构造成驱动旋转壳体和基座部件围绕基座轴线旋转。 另外,该系统包括位于基座部件上的一个或多个保持器齿轮,并且被配置成围绕基座轴线与基座部件一起旋转并且支撑一个或多个基板以及与一个或多个保持器齿轮接合并配置成 如果一个或多个保持器齿轮围绕基座轴线旋转,则一个或多个保持器齿轮分别围绕一个或多个保持器轴旋转。 基座轴与一个或多个保持器轴不同。

    LOADING AND UNLOADING SYSTEM FOR THIN FILM FORMATION AND METHOD THEREOF
    5.
    发明申请
    LOADING AND UNLOADING SYSTEM FOR THIN FILM FORMATION AND METHOD THEREOF 审中-公开
    用于薄膜形成的装载和卸载系统及其方法

    公开(公告)号:US20130108792A1

    公开(公告)日:2013-05-02

    申请号:US13282125

    申请日:2011-10-26

    Inventor: Cheng Chieh Yang

    CPC classification number: C23C16/45565 C23C16/4586 C23C16/54

    Abstract: A system for forming one or more layers of material on one or more substrates is described. The system includes a vacuum chamber and a showerhead located in the vacuum chamber. A door in a wall of the vacuum chamber allows for loading and unloading of the one or more substrates in the vacuum chamber while under vacuum. A drive mechanism coupled to the showerhead moves the showerhead between a first position and a second position while under vacuum. In the first position, the showerhead is positioned to allow access to the door for loading and unloading of the one or more substrates through the door. In the second position, the showerhead is positioned to inhibit access to the door inside the vacuum chamber.

    Abstract translation: 描述了在一个或多个基底上形成一层或多层材料的系统。 该系统包括位于真空室中的真空室和喷头。 在真空室的壁上的门允许在真空下在真空室中装载和卸载一个或多个基板。 联接到喷头的驱动机构在真空下在第一位置和第二位置之间移动喷头。 在第一位置,喷头被定位成允许进入门以通过门装载和卸载一个或多个基板。 在第二位置,喷头被定位成禁止进入真空室内的门。

    ROTATION SYSTEM FOR THIN FILM FORMATION
    6.
    发明申请
    ROTATION SYSTEM FOR THIN FILM FORMATION 审中-公开
    薄膜形成旋转系统

    公开(公告)号:US20120321790A1

    公开(公告)日:2012-12-20

    申请号:US13354225

    申请日:2012-01-19

    CPC classification number: C23C16/458 C23C16/455 C30B25/12

    Abstract: A system for forming one or more layers of material on one or more substrates is disclosed. The system includes a susceptor that rotates around a central susceptor axis. One or more holder gears are located on the susceptor. The holder gears may rotate around the central susceptor axis with the susceptor. A central gear engaged to the holder gears may cause the holder gears to rotate around holder axes of the respective holder gears while the holder gears rotate around the central susceptor axis. The susceptor and the central gear may rotate independently.

    Abstract translation: 公开了一种用于在一个或多个基底上形成一层或多层材料的系统。 该系统包括围绕中心基座轴线旋转的基座。 一个或多个保持器齿轮位于基座上。 保持器齿轮可以与感受器围绕中心基座轴线旋转。 接合到保持器齿轮的中心齿轮可以使得保持器齿轮围绕相应的保持器齿轮的保持器轴线旋转,同时保持器齿轮围绕中心基座轴线旋转。 基座和中心齿轮可独立旋转。

    ROTATION SYSTEM FOR THIN FILM FORMATION
    7.
    发明申请
    ROTATION SYSTEM FOR THIN FILM FORMATION 审中-公开
    薄膜形成旋转系统

    公开(公告)号:US20120321788A1

    公开(公告)日:2012-12-20

    申请号:US13282161

    申请日:2011-10-26

    Inventor: Cheng Chieh Yang

    Abstract: A system for forming one or more layers of material on one or more substrates is disclosed. The system includes a susceptor that rotates around a central susceptor axis. One or more holder gears are located on the susceptor. The holder gears may rotate around the central susceptor axis with the susceptor. Teeth of at least two adjacent holder gears at least partially overlap without touching. A central gear engaged to the holder gears may cause the holder gears to rotate around holder axes of the respective holder gears while the holder gears rotate around the central susceptor axis.

    Abstract translation: 公开了一种用于在一个或多个基底上形成一层或多层材料的系统。 该系统包括围绕中心基座轴线旋转的基座。 一个或多个保持器齿轮位于基座上。 保持器齿轮可以与感受器围绕中心基座轴线旋转。 至少两个相邻的保持器齿轮的牙齿至少部分重叠而不接触。 接合到保持器齿轮的中心齿轮可以使得保持器齿轮围绕相应的保持器齿轮的保持器轴线旋转,同时保持器齿轮围绕中心基座轴线旋转。

    MULTICHAMBER THIN-FILM DEPOSITION APPARATUS AND GAS-EXHAUSTING MODULE
    8.
    发明申请
    MULTICHAMBER THIN-FILM DEPOSITION APPARATUS AND GAS-EXHAUSTING MODULE 审中-公开
    多层薄膜沉积装置和气体排放模块

    公开(公告)号:US20120247392A1

    公开(公告)日:2012-10-04

    申请号:US13432164

    申请日:2012-03-28

    CPC classification number: C23C16/4412 B01D45/16

    Abstract: A gas-exhausting module for a multichamber thin-film deposition apparatus, which has one or more reactor chambers, includes a collecting chamber and a plurality of gas pipes. The collecting chamber includes an upper portion and a lower portion. The cross-sectional area of the lower portion is less than the cross-sectional area of the upper portion. One end of each gas pipe communicates with one of the reactor chambers. The other end of each gas pipe communicates with the upper portion in a tangential direction. During operation, a cyclonic airflow is provided within the collecting chamber to uniformly extract the exhaust gas from each reactor chamber.

    Abstract translation: 具有一个或多个反应室的多室薄膜沉积装置的排气模块包括收集室和多个气体管道。 收集室包括上部和下部。 下部的截面积小于上部的截面积。 每个气体管道的一端与反应室之一连通。 每个气体管的另一端在切向方向上与上部连通。 在操作期间,在收集室内提供旋流气流,以均匀地从每个反应室提取废气。

    Wire spool with color identification
    9.
    发明申请
    Wire spool with color identification 审中-公开
    线轴具有颜色识别

    公开(公告)号:US20080067282A1

    公开(公告)日:2008-03-20

    申请号:US11522468

    申请日:2006-09-18

    Inventor: Cheng-Chieh Yang

    CPC classification number: B65H75/182

    Abstract: A wire spool with color identification includes an axial tube, a first flange extending from a first end of the axial tube, and a second flange extending from a second end of the axial tube. The wire spool is characterized in that the first flange has at least one depression coated with a color layer. Thus, the color layer is not easy to peel and the cost of manufacturing the wire spool can be reduced.

    Abstract translation: 具有颜色识别的线轴包括轴向管,从轴向管的第一端延伸的第一凸缘和从轴向管的第二端延伸的第二凸缘。 线卷轴的特征在于,第一凸缘具有涂覆有彩色层的至少一个凹部。 因此,着色层不容易剥离,并且可以降低制造线卷轴的成本。

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