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公开(公告)号:US09362099B2
公开(公告)日:2016-06-07
申请号:US14369121
申请日:2013-01-03
Applicant: Danielle Toutoungi , Matthew Hart , John Somerville , Jon Pearson , Max Allsworth , Richard Orrell , Antoni Negri , Jeremy Spinks , Martin Holden , Andrew H. Koehl , Alastair Taylor
Inventor: Danielle Toutoungi , Matthew Hart , John Somerville , Jon Pearson , Max Allsworth , Richard Orrell , Antoni Negri , Jeremy Spinks , Martin Holden , Andrew H. Koehl , Alastair Taylor
CPC classification number: H01J49/061 , G01N27/624 , H01J49/0018 , H01J49/068 , Y10T29/49147 , Y10T29/49149
Abstract: Ion filter for FAIMS fabricated using the LIGA technique. The ion filter is manufactured using a metal layer to form the ion channels and an insulating support layer to hold the structure rigidly together after separation of the metal layer into two electrodes.
Abstract translation: 使用LIGA技术制造的FAIMS离子过滤器。 使用金属层制造离子过滤器以形成离子通道和绝缘支撑层,以将金属层分离成两个电极之后将结构刚性地保持在一起。
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公开(公告)号:US20150028196A1
公开(公告)日:2015-01-29
申请号:US14369121
申请日:2013-01-03
Applicant: Danielle Toutoungi , Matthew Hart , John Somerville , Jon Pearson , Max Allsworth , Richard Orrell , Antoni Negri , Jeremy Spinks , Martin Holden , Andrew H. Koehl , Alistair Taylor
Inventor: Danielle Toutoungi , Matthew Hart , John Somerville , Jon Pearson , Max Allsworth , Richard Orrell , Antoni Negri , Jeremy Spinks , Martin Holden , Andrew H. Koehl , Alistair Taylor
CPC classification number: H01J49/061 , G01N27/624 , H01J49/0018 , H01J49/068 , Y10T29/49147 , Y10T29/49149
Abstract: Ion filter for FAIMS fabricated using the LIGA technique. The ion filter is manufactured using a metal layer to form the ion channels and an insulating support layer to hold the structure rigidly together after separation of the metal layer into two electrodes.
Abstract translation: 使用LIGA技术制造的FAIMS离子过滤器。 使用金属层制造离子过滤器以形成离子通道和绝缘支撑层,以将金属层分离成两个电极之后将结构刚性地保持在一起。
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