公开(公告)号：US20150214003A1

公开(公告)日：2015-07-30

申请号：US14416848

申请日：2013-06-12

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY ,  LIFESEM INC.

Inventor： Toshihiko Ogura

IPC: H01J37/26 ,  G01N23/225

CPC classification number: H01J37/261 ,  G01N23/225 ,  H01J37/20 ,  H01J2237/004 ,  H01J2237/2003

Abstract: In an upper main body of a sample holder, a laminate of an insulative thin film and a secondary electron emission protective thin film is provided. An electron beam emitted from an electron gun enters the secondary electron emission protective thin film side. The undersurface of the insulative thin film is a sample adhesion surface, where a sample to be an observation target is held by adsorption or the like. The secondary electron emission protective thin film is made of a material having a low secondary electron emission coefficient δ and, preferably, is non-insulative. That is, the secondary electron emission protective thin film is conductive even though the electric resistance is high. Accordingly, the charge level of a site irradiated with the electron beam has a low charge level.

Abstract translation: 在样品保持器的上主体中，设置绝缘薄膜和二次电子发射保护薄膜的叠层体。 从电子枪发射的电子束进入二次电子发射保护薄膜一侧。 绝缘性薄膜的下表面是样品粘合面，通过吸附等保持作为观察对象物的样品。 二次电子发射保护薄膜由二次电子发射系数δ低的材料制成，优选为非绝缘性。 也就是说，即使电阻高，二次电子发射保护薄膜也是导电的。 因此，用电子束照射的部位的电荷水平具有低的电荷水平。

公开(公告)号：US09269534B2

公开(公告)日：2016-02-23

申请号：US14416848

申请日：2013-06-12

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY ,  LIFESEM INC.

Inventor： Toshihiko Ogura

IPC: H01J37/26 ,  H01J37/28 ,  H01J37/20 ,  G01N23/225

CPC classification number: H01J37/261 ,  G01N23/225 ,  H01J37/20 ,  H01J2237/004 ,  H01J2237/2003

Abstract: In an upper main body of a sample holder, a laminate of an insulative thin film and a secondary electron emission protective thin film is provided. An electron beam emitted from an electron gun enters the secondary electron emission protective thin film side. The undersurface of the insulative thin film is a sample adhesion surface, where a sample to be an observation target is held by adsorption or the like. The secondary electron emission protective thin film is made of a material having a low secondary electron emission coefficient δ and, preferably, is non-insulative. That is, the secondary electron emission protective thin film is conductive even though the electric resistance is high. Accordingly, the charge level of a site irradiated with the electron beam has a low charge level.

Abstract translation: 在样品保持器的上主体中，设置绝缘薄膜和二次电子发射保护薄膜的叠层体。 从电子枪发射的电子束进入二次电子发射保护薄膜一侧。 绝缘性薄膜的下表面是样品粘合面，通过吸附等保持作为观察对象物的样品。 二次电子发射保护薄膜由二次电子发射系数δ低的材料制成，优选为非绝缘性。 也就是说，即使电阻高，二次电子发射保护薄膜也是导电的。 因此，用电子束照射的部位的电荷水平具有低的电荷水平。