公开(公告)号：US20030098766A1

公开(公告)日：2003-05-29

申请号：US10303401

申请日：2002-11-25

Applicant: MEMSCAP (Societe Anonyme)

Inventor： Lionel Girardie ,  Jean-Baptiste David

IPC: H01L021/00 ,  H01L021/44 ,  H01F005/00

CPC classification number: H01L28/10 ,  H01L21/2885 ,  H01L21/76838 ,  H01L27/08

Abstract: The invention relates to a process for fabricating electronic components incorporating an inductive microcomponent placed on top of a substrate. Such a component comprises: a layer (10) of material having a low relative permittivity, lying on the top face of the substrate (1); a number of metal turns (30-31) defined on top of the layer (10) of material having a low relative permittivity; and a copper-diffusion barrier layer (15) interposed between the metal turns (30-31) and the layer of material having a low relative permittivity.

Abstract translation: 本发明涉及一种用于制造电子部件的方法，该电子部件包含放置在基板顶部上的感应微元件。 这种部件包括：位于基板（1）的顶面上的具有低相对介电常数的材料层（10）; 限定在具有低相对介电常数的材料层（10）的顶部上的多个金属匝（30-31）; 以及介于所述金属匝（30-31）和所述相对介电常数低的材料层之间的铜扩散阻挡层（15）。

公开(公告)号：US20030030998A1

公开(公告)日：2003-02-13

申请号：US10186332

申请日：2002-06-28

Applicant: MEMSCAP

Inventor： Ahmed Mhani ,  Jean-Marc Fedeli

IPC: H05K007/02 ,  H05K007/06 ,  H05K007/08 ,  H05K007/10

CPC classification number: H03H9/02259 ,  H01H50/005 ,  H01H59/0009 ,  H03H9/2405 ,  H03H2009/02496

Abstract: Microelectromechanical component (1) providing filtering functions, produced on a semiconductor-based substrate, and comprising two input terminals and two output terminals, characterized in that it also comprises: a moveable element (4) connected to the substrate by at least one deformable portion, and including a region made of a ferromagnetic material; a metal coil (5) connected to the input terminals or output terminals (30, 31), capable of interacting magnetically with the ferromagnetic region of the moveable element (4); a surface forming a first electrode (6), connected to one of the output terminals or input terminals, placed opposite a complementary surface secured to the moveable element (4), this complementary surface forming a second electrode connected to the other of the output or input terminals, and being capable of interacting electrostatically with the first electrode (6).

Abstract translation: 提供过滤功能的微电子机械部件（1），其在半导体基板上制造，并且包括两个输入端子和两个输出端子，其特征在于还包括：可移动元件（4），其通过至少一个可变形部分 并且包括由铁磁材料制成的区域; 连接到能够与可移动元件（4）的铁磁区域相互作用的输入端子或输出端子（30,31）的金属线圈（5）; 形成第一电极（6）的表面，其连接到与固定到所述可移动元件（4）的互补表面相对的所述输出端子或输入端子之一，所述互补表面形成连接到所述输出端或另一端的另一个的第二电极 输入端子，并且能够与第一电极（6）静电相互作用。

公开(公告)号：US20010040250A1

公开(公告)日：2001-11-15

申请号：US09858092

申请日：2001-05-15

Applicant: Memscap

Inventor： Catherine Charrier ,  Eric Bouchon ,  Alain Campo ,  Guy Imbert ,  Francois Valentin ,  Laurent Basteres

IPC: H01L021/8234

CPC classification number: B81C1/00158 ,  B81B3/007 ,  B81B2201/018 ,  B81B2203/0127 ,  B81B2203/0307 ,  B81B2203/033 ,  B81C2201/0109 ,  B81C2201/0197 ,  H01G5/16 ,  H01H1/0036

Abstract: Process for fabricating electronic components, of the variable capacitor or microswitch type, comprising a fixed plate (1) and a deformable membrane (20) which are located opposite each other, which comprises the following steps, consisting in: depositing a first metal layer on an oxide layer (2), said first metal layer being intended to form the fixed plate; depositing a metal ribbon (10, 11) on at least part of the periphery and on each side of the fixed plate (1), said ribbon being intended to serve as a spacer between the fixed plate (1) and the deformable membrane (20); depositing a sacrificial resin layer (15) over at least the area of said fixed plate (1); generating, by lithography, a plurality of wells in the surface of said sacrificial resin layer; depositing, by electrolysis, inside the wells formed in the sacrificial resin (15), at least one metal region intended to form the deformable membrane (20), this metal region extending between sections of the metal ribbon (10, 11) which are located on each side of said fixed plate (1); removing the sacrificial resin layer (15).

Abstract translation: 用于制造可变电容器或微型开关类型的电子部件的方法包括彼此相对定位的固定板（1）和可变形膜（20），其包括以下步骤：将第一金属层沉积在 氧化物层（2），所述第一金属层旨在形成所述固定板; 在固定板（1）的周边的至少一部分和每一侧上沉积金属带（10,11），所述带旨在用作固定板（1）和可变形膜（20）之间的间隔件 ）; 在所述固定板（1）的至少所述区域上沉积牺牲树脂层（15）; 通过光刻产生在所述牺牲树脂层的表面中的多个孔; 通过电解在形成在牺牲树脂（15）中的阱内沉积旨在形成可变形膜（20）的至少一个金属区域，该金属区域在位于金属带（10,11）的部分之间延伸 在所述固定板（1）的每一侧上; 去除牺牲树脂层（15）。

公开(公告)号：US10216150B2

公开(公告)日：2019-02-26

申请号：US15200410

申请日：2016-07-01

Applicant: MEMSCAP

Inventor： Nicolas Bertsch

IPC: H03L7/26 ,  G04F5/14 ,  G01N24/10 ,  G01R33/30 ,  G01R33/60 ,  G01R33/383

Abstract: An apparatus for an atomic clock includes first and second distinctive substrates, each having at least a planar surface substantially parallel therebetween. The apparatus also includes a medium having particles capable of undergoing energetic transition between at least two energy levels, said medium being located in the space defined between the planar surfaces. It further includes a magnetic device arranged to the first substrate and generating at least in the volume of the medium a predetermined static magnetic field B the direction of which is substantially parallel or perpendicular to the planar surfaces and an excitation device arranged to the second substrate and generating an excitation magnetic field H at, at least an excitation frequency, the direction of said excitation magnetic field H in the volume of the medium being substantially orthogonal to said direction of the static magnetic field B.

公开(公告)号：US20170003658A1

公开(公告)日：2017-01-05

申请号：US15200410

申请日：2016-07-01

Applicant: MEMSCAP

Inventor： Nicolas Bertsch

IPC: G04F5/14

CPC classification number: G04F5/14 ,  G01N24/10 ,  G01R33/302 ,  G01R33/383 ,  G01R33/60 ,  H03L7/26

Abstract: An apparatus for an atomic clock includes first and second distinctive substrates, each having at least a planar surface substantially parallel therebetween. The apparatus also includes a medium having particles capable of undergoing energetic transition between at least two energy levels, said medium being located in the space defined between the planar surfaces. It further includes a magnetic device arranged to the first substrate and generating at least in the volume of the medium a predetermined static magnetic field B the direction of which is substantially parallel or perpendicular to the planar surfaces and an excitation device arranged to the second substrate and generating an excitation magnetic field H at, at least an excitation frequency, the direction of said excitation magnetic field H in the volume of the medium being substantially orthogonal to said direction of the static magnetic field B.

Abstract translation: 一种用于原子钟的装置包括第一和第二不同的基板，每个基板至少具有平行的平面。 该装置还包括具有能够在至少两个能级之间进行能量过渡的颗粒的介质，所述介质位于限定在平面之间的空间中。 它还包括一个磁性装置，该磁性装置布置在第一基板上，并至少在介质体积中产生预定的静态磁场B，该磁场的方向基本上平行于或垂直于平面表面，激励装置布置在第二基板上， 至少在激励频率下产生激励磁场H，所述激励磁场H在所述介质的体积中与所述静磁场B的方向基本正交的方向上的所述激励磁场H的方向。

公开(公告)号：US20040199058A1

公开(公告)日：2004-10-07

申请号：US10826103

申请日：2004-04-16

Applicant: MEMSCAP ,  Laboratoires La Licorne

Inventor： Jean-Michel Karam ,  Eric Viviant

IPC: A61B005/00

CPC classification number: A61B5/14539 ,  A61B5/01 ,  A61B5/1077 ,  A61B5/441 ,  A61B2562/028

Abstract: The invention relates to a device for analysing the physico-chemical properties of a cutaneous surface comprising: a group of sensors which are assembled at an acquisition zone (4), opposite which the cutaneous surface to be analysed is positioned; and a processing unit (1) which is interfaced with the group of sensors, said unit being equipped with analysis means that can be used to determine certain physico-chemical properties of the cutaneous surface to be analysed using signals produced by said group of sensors.

Abstract translation: 本发明涉及一种用于分析皮肤表面的物理化学性质的装置，包括：一组传感器，其组装在采集区（4）处，相对于其被分析的皮肤表面定位; 以及与所述传感器组接口的处理单元（1），所述单元配备有分析装置，其可以用于使用由所述传感器组产生的信号来确定要分析的皮肤表面的某些物理化学性质。

公开(公告)号：US20020047758A1

公开(公告)日：2002-04-25

申请号：US09975352

申请日：2001-10-11

Applicant: Memscap S.A.

Inventor： Bertand Guillon ,  Pierre Blondy

IPC: H03H007/01

CPC classification number: H01P7/082 ,  H01P1/203

Abstract: Elementary electrical resonator (1), characterized in that it comprises: a ribbon conductor (2) forming a flat loop with at least one turn, the ends of which form two parallel segments (3, 4); a conducting bridge (6) forming an arch straddling the said segments (3, 4) of the ribbon conductor (2), the opposing surfaces of the arch (6) and of the said segments (3, 4) forming a capacitor, and in which a part (7) of the bridge (6) is capable of being displaced with respect to the said segments (3, 4) of the loop under the action of a control signal so as to cause the capacitance of the said capacitor, and therefore the tuning frequency of the resonator, to vary.

Abstract translation: 基本电气谐振器（1），其特征在于，它包括：形成具有至少一匝的扁平环的带状导体（2），其端部形成两个平行段（3,4）; 形成跨过所述带状导体（2）的所述段（3,4）的弓的导电桥（6），所述拱（6）和所述段（3,4）的相对表面形成电容器，以及 其中在控制信号的作用下，桥（6）的部分（7）能够相对于所述环的所述段（3,4）移位，以便引起所述电容器的电容， 因此谐振器的调谐频率发生变化。

公开(公告)号：US20040263297A1

公开(公告)日：2004-12-30

申请号：US10859633

申请日：2004-06-03

Applicant: MEMSCAP, Inc.

Inventor： Konstantin Glukh ,  Robert L. Wood ,  Vivek Agrawal

IPC: H01H051/22

CPC classification number: H01H1/0036 ,  H01H36/00 ,  H01H2001/0042 ,  H01H2001/0047 ,  H01H2036/0093

Abstract: A magnetic switch includes a substrate having a recess therein. A rotor or rotors are provided on the substrate. The rotor includes a tail portion that overlies the recess, and a head portion that extends on the substrate outside the recess. The rotor may be fabricated from ferromagnetic material, and is configured to rotate the tail in the recess in response to a changed magnetic field. First and second magnetic switch contacts also are provided that are configured to make or break electrical connection between one another in response to rotation of the tail in the recess, in response to the changed magnetic field. Related operation and fabrication methods also are described.

Abstract translation: 磁开关包括其中具有凹部的基板。 转子或转子设置在基板上。 转子包括覆盖凹部的尾部和在凹部外部的衬底上延伸的头部。 转子可以由铁磁材料制成，并且被配置为响应于改变的磁场而使凹部中的尾部旋转。 第一和第二磁性开关触点还被设置成响应于改变的磁场而响应于凹部中的尾部的旋转而使彼此之间的电连接彼此形成或断开。 还描述了相关操作和制造方法。

公开(公告)号：US20040168530A1

公开(公告)日：2004-09-02

申请号：US10798607

申请日：2004-03-11

Applicant: MEMSCAP AS

Inventor： Manfred Adolfs ,  Raymond Glocker

IPC: G01D011/00 ,  G01L019/06 ,  A61M039/00 ,  A61M005/48

CPC classification number: A61B5/0215

Abstract: The invention relates to a pressure dome for connecting a transducer with a fluid system comprising an inlet channel and an outflow channel as well as a measuring chamber in which a fluid is able to circulate and which has a measuring membrane. To improve fluid circulation and simplify handling, the measuring chamber ceiling is configured in the shape of a calotte and the pressure dome is removably coupled to the transducer housing by means of a snap connection.

Abstract translation: 本发明涉及一种用于将换能器与包括入口通道和流出通道的流体系统连接的压力圆顶，以及其中流体能够循环并具有测量膜的测量室。 为了改善流体循环并简化处理，测量室顶部被配置成calotte的形状，并且压力圆顶通过卡扣连接可拆卸地耦合到换能器壳体。

公开(公告)号：US20030109133A1

公开(公告)日：2003-06-12

申请号：US10303627

申请日：2002-11-25

Applicant: MEMSCAP (Societe Anonyme) Parc Technologique des Fontaines Bernin

Inventor： Lionel Girardie ,  Jean-Baptiste David

IPC: H01L021/4763 ,  H01L023/48

CPC classification number: H01L28/10 ,  H01L21/28568 ,  H01L21/76895 ,  H01L27/08

Abstract: The invention relates to a process for fabricating electronic components, incorporating an inductive microcomponent placed on top of a substrate. Such a component comprises: at least one superposition of a layer (10, 10a) of material having a low relative permittivity and of a hard mask layer, the first layer (10) of material having a low relative permittivity resting on the upper face of the substrate (1); a number of defined metal turns (39) on top of the superposition of layers (10, 10a) of material having a low relative permittivity; and a copper diffusion barrier layer (35) present on the lower and lateral faces of the metal turns (39).

Abstract translation: 本发明涉及一种用于制造电子部件的方法，该方法包括放置在基板顶部上的感应微元件。 这种组件包括：具有低相对介电常数的材料层（10,10a）和硬掩模层的至少一个叠加层，第一层（10）的材料具有低相对介电常数， 基板（1）; 在具有低相对介电常数的材料的层（10,10a）的叠加之上的多个限定的金属匝（39） 以及存在于金属匝（39）的下表面和外侧面上的铜扩散阻挡层（35）。