公开(公告)号：US20130207000A1

公开(公告)日：2013-08-15

申请号：US13808135

申请日：2011-07-01

Applicant: Detlef Günther ,  Bodo Hattendordf ,  Rolf Dietiker ,  Tatiana Egorova ,  Victor Varentsov

Inventor： Detlef Günther ,  Bodo Hattendordf ,  Rolf Dietiker ,  Tatiana Egorova ,  Victor Varentsov

IPC: H01J27/24 ,  H01J27/02

CPC classification number: H01J27/24 ,  H01J27/024 ,  H01J49/066 ,  H01J49/107 ,  H01J49/164

Abstract: A laser-ablation ion source for generating a low energy ion beam having low longitudinal and transverse emittance, including a supersonic nozzle, followed by an RF ion funnel. A laser source generates a laser beam which is focused by a lens to an ablation site. The ablation site is located upstream of the nozzle, at a distance of less than 10 mm from the nozzle aperture. The laser irradiates the ablation site through the nozzle aperture to generate the ions.

Abstract translation: 一种激光消融离子源，用于产生具有低纵向和横向发射率的低能量离子束，包括超音速喷嘴，随后是RF离子漏斗。 激光源产生由透镜聚焦到消融部位的激光束。 消融部位位于喷嘴的上游，距离喷嘴孔小于10mm。 激光通过喷嘴孔照射消融部位以产生离子。