METHOD FOR MAKING PATTERNS ON THE SURFACE OF A SUBSTRATE USING BLOCK COPOLYMERS
    1.
    发明申请
    METHOD FOR MAKING PATTERNS ON THE SURFACE OF A SUBSTRATE USING BLOCK COPOLYMERS 有权
    使用嵌段共聚物在基材表面上形成图案的方法

    公开(公告)号:US20140193580A1

    公开(公告)日:2014-07-10

    申请号:US14122576

    申请日:2012-05-18

    Abstract: A method for making patterns on the surface of a substrate by graphoepitaxy, includes depositing a layer of resin on the surface of the substrate; making patterns in the resin on the surface of a substrate; curing the patterns in the resin by producing a layer of amorphous carbon on the surface of the patterns in the resin; depositing a layer of statistical copolymer after curing the patterns in the resin; grafting the layer of statistical copolymer onto the patterns in the resin by annealing; and depositing a layer of a block copolymer into the spaces defined by the patterns in the resin after curing the patterns and the grafting of the layer of statistical copolymer.

    Abstract translation: 一种用于通过石刻电泳法在衬底表面上制作图案的方法,包括在衬底的表面上沉积一层树脂; 在基板表面上的树脂中形成图案; 通过在树脂中的图案的表面上产生无定形碳层来固化树脂中的图案; 在固化树脂中的图案之后沉积一层统计共聚物; 通过退火将统计共聚物层接枝到树脂上的图案上; 以及在固化图案和统计共聚物层的接枝之后,将一层嵌段共聚物沉积在由树脂中的图案限定的空间中。

    Method for making patterns on the surface of a substrate using block copolymers
    4.
    发明授权
    Method for making patterns on the surface of a substrate using block copolymers 有权
    使用嵌段共聚物在基材表面上形成图案的方法

    公开(公告)号:US09566610B2

    公开(公告)日:2017-02-14

    申请号:US14122576

    申请日:2012-05-18

    Abstract: A method for making patterns on the surface of a substrate by graphoepitaxy, includes depositing a layer of resin on the surface of the substrate; making patterns in the resin on the surface of a substrate; curing the patterns in the resin by producing a layer of amorphous carbon on the surface of the patterns in the resin; depositing a layer of statistical copolymer after curing the patterns in the resin; grafting the layer of statistical copolymer onto the patterns in the resin by annealing; and depositing a layer of a block copolymer into the spaces defined by the patterns in the resin after curing the patterns and the grafting of the layer of statistical copolymer.

    Abstract translation: 一种用于通过石刻电泳法在衬底表面上制作图案的方法,包括在衬底的表面上沉积一层树脂; 在基板表面上的树脂中形成图案; 通过在树脂中的图案的表面上产生无定形碳层来固化树脂中的图案; 在固化树脂中的图案之后沉积一层统计共聚物; 通过退火将统计共聚物层接枝到树脂上的图案上; 以及在固化图案和统计共聚物层的接枝之后,将一层嵌段共聚物沉积在由树脂中的图案限定的空间中。

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