公开(公告)号：US20250027982A1

公开(公告)日：2025-01-23

申请号：US18355395

申请日：2023-07-19

Applicant: ADVANTEST CORPORATION

Inventor： Yang SHANG ,  Masaichi HASHIMOTO ,  Makoto SHINOHARA

IPC: G01R31/11

Abstract: A method, apparatus, and/or system for soft defects modeling of measurements using time-domain reflectometry. Electro-Optic Sampling based Time-Domain Reflectometry (EOS-TDR) may quickly detect soft defects in a chip under test. For example, EOS-TDR may detect soft defects in each pin from a trace-structure point at a relatively high resolution. To interpret the results in a time sensitive manner, a reference model for chips may be established from chips that are known to have met the expected quality standards. Through automated analysis of the features of the device under test waveform, soft defects of a chip may be detected that would be otherwise undetectable under time constraints, temperature variations, applied current variations, applied voltage variations, vibration variations, moisture variations, or any other kind of possible variation.

公开(公告)号：US20170082668A1

公开(公告)日：2017-03-23

申请号：US15231997

申请日：2016-08-09

Applicant: ADVANTEST CORPORATION

Inventor： Tsuyoshi ATAKA ,  Masaichi HASHIMOTO

IPC: G01R23/02

CPC classification number: G01R23/02 ,  G01R23/04 ,  G01R27/32

Abstract: A measuring apparatus according to the present invention includes a response signal measuring section, an input frequency domain conversion section, a response frequency domain conversion section, and a frequency characteristic acquisition section. The response signal measuring section measures a response signal within a time domain, the response signal being acquired by applying a pulse having a width of not less than one femtosecond nor more than 1000 femtoseconds to an object to be measured. The input frequency domain conversion section converts the pulse into a frequency domain. The response frequency domain conversion section converts a measurement result from the response signal measuring section into a frequency domain. The frequency characteristic acquisition section acquires a frequency characteristic of the object to be measured, from a conversion result provided from the input frequency domain conversion section and a conversion result provided from the response frequency domain conversion section.

公开(公告)号：US20140166883A1

公开(公告)日：2014-06-19

申请号：US14108882

申请日：2013-12-17

Applicant: ADVANTEST CORPORATION

Inventor： Shigeru ONO ,  Kazunori SHIOTA ,  Masaichi HASHIMOTO ,  Akiyoshi IRISAWA

IPC: G01B11/06 ,  G01N21/59

CPC classification number: G01N21/59 ,  G01B11/0633

Abstract: According to the present invention, an electromagnetic wave measurement device includes: an electromagnetic wave detector, a frequency component acquisition unit, and a thickness indication quantity deriving unit. An object to be measured is disposed on a substrate and includes at least two layers, and the electromagnetic wave detector detects a substrate-surface-reflected electromagnetic wave which has been made incident to the object, has been reflected by the substrate, and has passed through the object. The frequency component acquisition unit acquires an amplitude of a frequency component of the substrate-surface-reflected electromagnetic wave. The thickness indication quantity deriving unit derives a thickness indication quantity based on the amplitude of the frequency component of the substrate-surface-reflected electromagnetic wave and a relationship between the thickness indication quantity and the amplitude of the frequency component of the substrate-surface-reflected electromagnetic wave.

Abstract translation: 根据本发明，电磁波测量装置包括：电磁波检测器，频率分量获取单元和厚度指示量导出单元。 将被测量物体配置在基板上，至少包含两层，电磁波检测器检测出已被入射到物体的基板表面反射的电磁波已被基板反射，并且已经通过 通过对象。 频率分量获取单元获取基板表面反射电磁波的频率分量的振幅。 厚度指示量导出单元基于基板表面反射电磁波的频率分量的振幅以及基板表面反射电磁波的厚度指示量与基板表面反射的频率分量的振幅之间的关系导出厚度指示量 电磁波。