公开(公告)号：US20140166883A1

公开(公告)日：2014-06-19

申请号：US14108882

申请日：2013-12-17

Applicant: ADVANTEST CORPORATION

Inventor： Shigeru ONO ,  Kazunori SHIOTA ,  Masaichi HASHIMOTO ,  Akiyoshi IRISAWA

IPC: G01B11/06 ,  G01N21/59

CPC classification number: G01N21/59 ,  G01B11/0633

Abstract: According to the present invention, an electromagnetic wave measurement device includes: an electromagnetic wave detector, a frequency component acquisition unit, and a thickness indication quantity deriving unit. An object to be measured is disposed on a substrate and includes at least two layers, and the electromagnetic wave detector detects a substrate-surface-reflected electromagnetic wave which has been made incident to the object, has been reflected by the substrate, and has passed through the object. The frequency component acquisition unit acquires an amplitude of a frequency component of the substrate-surface-reflected electromagnetic wave. The thickness indication quantity deriving unit derives a thickness indication quantity based on the amplitude of the frequency component of the substrate-surface-reflected electromagnetic wave and a relationship between the thickness indication quantity and the amplitude of the frequency component of the substrate-surface-reflected electromagnetic wave.

Abstract translation: 根据本发明，电磁波测量装置包括：电磁波检测器，频率分量获取单元和厚度指示量导出单元。 将被测量物体配置在基板上，至少包含两层，电磁波检测器检测出已被入射到物体的基板表面反射的电磁波已被基板反射，并且已经通过 通过对象。 频率分量获取单元获取基板表面反射电磁波的频率分量的振幅。 厚度指示量导出单元基于基板表面反射电磁波的频率分量的振幅以及基板表面反射电磁波的厚度指示量与基板表面反射的频率分量的振幅之间的关系导出厚度指示量 电磁波。