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公开(公告)号:US20240124969A1
公开(公告)日:2024-04-18
申请号:US18537504
申请日:2023-12-12
Applicant: Applied Materials, Inc.
Inventor: Nai-Wen PI , Jinxin FU , Kang LUO , Ludovic GODET
CPC classification number: C23C14/48 , C03C23/0095 , C23C14/0031 , C23C14/021 , C23C14/5873 , G02B6/10
Abstract: Embodiments described herein provide for optical devices with methods of forming optical device substrates having at least one area of increased refractive index or scratch resistance. One method includes disposing an etch material on a discrete area of an optical device substrate or an optical device layer, disposing a diffusion material in the discrete area, and removing excess diffusion material to form an optical material in the optical device substrate or the optical device layer having a refractive index greater than or equal to 2.0 or a hardness greater than or equal to 5.5 Mohs.
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公开(公告)号:US20220291083A1
公开(公告)日:2022-09-15
申请号:US17692573
申请日:2022-03-11
Applicant: Applied Materials, Inc.
Inventor: Jinxin FU , Kang LUO , Fariah HAYEE , Ludovic GODET
IPC: G01M11/02
Abstract: A method of optical device metrology is provided. The method includes introducing a first type of light into a first optical device during a first time period, the first optical device including an optical substrate and an optical film disposed on the optical substrate, the first optical device further including a first surface, a second surface, and one or more sides connecting the first surface with the second surface; and measuring, during the first time period, a quantity of the first type of light transmitted from a plurality of locations on the first surface or the second surface during the first time period, wherein the measuring is performed by a detector coupled to one or more fiber heads positioned to collect the light transmitted from the plurality of locations.
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公开(公告)号:US20230273355A1
公开(公告)日:2023-08-31
申请号:US18173365
申请日:2023-02-23
Applicant: Applied Materials, Inc.
Inventor: Yingdong LUO , Kangkang WANG , Wei-Sheng LEI , Xiaopei DENG , Erica CHEN , Kang LUO , Daihua ZHANG , Rami HOURANI , Ludovic GODET
IPC: G02B5/18 , G02B1/14 , B23K26/402 , B23K26/60
CPC classification number: G02B5/1847 , G02B1/14 , B23K26/402 , B23K26/60
Abstract: Methods of dicing optical devices from an optical device substrate are disclosed. The methods include disposing a protective coating only over the optical devices. The optical device substrate includes the optical devices disposed on the surface of the optical device substrate with areas therebetween. The areas of the optical device substrate are exposed by the protective coating. The protective coating includes a polymer, a solvent, and an additive. The methods further include curing the protective coating via a cure process so that the protective coating is water-soluble after the solvent is removed by the cure process, dicing the optical devices from the optical device substrate by projecting a laser beam to the areas between the optical devices, and exposing the protective coating to water to remove the protective coating from the optical devices that are diced.
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公开(公告)号:US20220357656A1
公开(公告)日:2022-11-10
申请号:US17740116
申请日:2022-05-09
Applicant: Applied Materials, Inc.
Inventor: Hao TANG , Kang LUO , Erica CHEN , Yongan XU
Abstract: A method of imprinting a pattern on a substrate is provided. The method includes forming a first pattern on a plurality of masters using a method other than imprinting, the first pattern including a plurality of patterned features of varying sizes; measuring the patterned features at a plurality of locations on each of the masters; selecting a first master of the plurality of masters based on the measurements of the patterned features on each of the masters; using the first master to form a second pattern on an imprint template; and imprinting the first pattern on a first device with the imprint template.
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公开(公告)号:US20240125670A1
公开(公告)日:2024-04-18
申请号:US18397977
申请日:2023-12-27
Applicant: Applied Materials, Inc.
Inventor: Jinxin FU , Kang LUO , Fariah HAYEE , Ludovic GODET
IPC: G01M11/02
CPC classification number: G01M11/0285 , G01M11/0207
Abstract: A method of optical device metrology is provided. The method includes introducing a first type of light into a first optical device during a first time period, the first optical device including an optical substrate and an optical film disposed on the optical substrate, the first optical device further including a first surface, a second surface, and one or more sides connecting the first surface with the second surface; and measuring, during the first time period, a quantity of the first type of light transmitted from a plurality of locations on the first surface or the second surface during the first time period, wherein the measuring is performed by a detector coupled to one or more fiber heads positioned to collect the light transmitted from the plurality of locations.
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公开(公告)号:US20230192971A1
公开(公告)日:2023-06-22
申请号:US18084741
申请日:2022-12-20
Applicant: Applied Materials, Inc.
Inventor: Yingdong LUO , Xiaopei DENG , Kang LUO , Rami HOURANI , Daihua ZHANG , Ludovic GODET
CPC classification number: C08J3/28 , B41M5/0047 , B41M5/0064 , C08J5/18 , C08J2333/10
Abstract: Methods of curing a deformation in a substrate are provided. In some embodiments, the method includes identifying one or more areas on the substrate with deformation. The method further includes printing a first film on a first area of a surface of the substrate via inkjet printing, the first film being a material that polymerizes and contracts when cured. The method includes printing a second film on a second area of the surface of the substrate via inkjet printing, the second film being a material that polymerizes and contracts when cured. The method further includes curing the first film and the second film to induce a bend in the substrate. In some embodiments, the method includes inkjet printing a third film and a fourth film on the surface of the substrate.
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公开(公告)号:US20230193064A1
公开(公告)日:2023-06-22
申请号:US17989961
申请日:2022-11-18
Applicant: Applied Materials, Inc.
Inventor: Yingdong LUO , Xiaopei DENG , Kang LUO , Rami HOURANI , Daihua ZHANG , Ludovic GODET
CPC classification number: C09D11/38 , H01L51/0005 , B41M5/5209
Abstract: A method and apparatus for forming an optical device are described. The optical device is formed by depositing a plurality of ink drops on a surface of a substrate. The plurality of ink drops are contained within a chemical stopper, such that the chemical stopper surrounds each individual ink drop. The chemical stopper is configured to reduce reflow of the ink drops and is a fraction of the height of each of the ink drops. The ink drops are baked after being deposited within the chemical stoppers as liquid ink drops.
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公开(公告)号:US20220363060A1
公开(公告)日:2022-11-17
申请号:US17647780
申请日:2022-01-12
Applicant: Applied Materials, Inc.
Inventor: Daihua ZHANG , Kang LUO , Kazuya DAITO , Kenneth S. LEDFORD , Elsa MASSONNEAU , Alexey STEPANOV , Ludovic GODET , Mahendran CHIDAMBARAM , Visweswaren SIVARAMAKRISHNAN , Bahubali S. UPADHYE , Hemantha RAJU
IPC: B41J2/165
Abstract: Embodiments described herein relate to an inkjet service station and methods of servicing an inkjet printer with the inkjet service station. The inkjet service station is disposed in an inkjet printer of an inkjet chamber. The inkjet service station is operable to perform servicing operations on a processing apparatus of the inkjet printer. The servicing operations include at least one of printhead spitting, printhead purging, printhead flushing, printhead cleaning, printhead drying, or vacuum suction.
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公开(公告)号:US20220355589A1
公开(公告)日:2022-11-10
申请号:US17647791
申请日:2022-01-12
Applicant: Applied Materials, Inc.
Inventor: Daihua ZHANG , Kazuya DAITO , Kang LUO , Elsa MASSONNEAU , Alexey STEPANOV , Ludovic GODET
IPC: B41J2/165
Abstract: Embodiments described herein provide for a fluid management system and a method of utilizing the fluid management system. The fluid management system includes a servicing fluid management system and an ink management system. The servicing fluid management system and the ink management system run in parallel within an inkjet chamber. The ink management system supports the flow of inkjet materials between a waste tank, one or more inkjet material supply tanks, an ink management module, and the inkjet printer. The servicing fluid management system supports the flow of servicing fluids between the waste tank, one or more servicing fluid supply tanks, a servicing fluid management module, and the inkjet printer.
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公开(公告)号:US20220307127A1
公开(公告)日:2022-09-29
申请号:US17655849
申请日:2022-03-22
Applicant: Applied Materials, Inc.
Inventor: Nai-Wen PI , Jinxin FU , Kang LUO , Ludovic GODET
Abstract: Embodiments described herein provide for optical devices with methods of forming optical device substrates having at least one area of increased refractive index or scratch resistance. One method includes disposing an etch material on a discrete area of an optical device substrate or an optical device layer, disposing a diffusion material in the discrete area, and removing excess diffusion material to form an optical material in the optical device substrate or the optical device layer having a refractive index greater than or equal to 2.0 or a hardness greater than or equal to 5.5 Mohs.
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