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公开(公告)号：US20220035251A1
公开(公告)日：2022-02-03
申请号：US17033201
申请日：2020-09-25
Applicant: Applied Materials, Inc.
Inventor： Jinrui GUO , Ludovic GODET , Daihua ZHANG , Kang LUO , Rami HOURANI
Abstract: A method of forming a three dimensional feature inwardly of a surface of a material includes providing a droplet dispenser including an outlet configured to dispense discrete droplets of a liquid material having a reactant therein capable of reacting with, and thereby removing, portions of the material layer with which the droplets come into contact, providing a support configured support the material thereon, the support, and the droplet dispenser, movable with respect to one another, such that the outlet of the droplet dispenser is positionable over different discrete areas of the surface of the material, and positioning the surface of the material under the droplet dispenser, and dispensing droplets to discrete portions of the surface of the material in a desired area thereof, to remove at least a portion of the material in the desired area and thereby form a three dimensional recess inwardly of the surface of the material.
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公开(公告)号：US20240142690A1
公开(公告)日：2024-05-02
申请号：US18473079
申请日：2023-09-22
Applicant: Applied Materials, Inc.
Inventor： Yingdong LUO , Jinxin FU , Zhengping YAO , Daihua ZHANG , Ludovic GODET
IPC: F21V8/00
CPC classification number: G02B6/0016 , G02B6/002 , G02B6/0036 , G02B6/0046 , G02B6/0065
Abstract: An apparatus for waveguides and a method of fabricating a waveguide combiner having at least one grating with trenches gap-filled with variable refractive index materials. At least two trenches of at least one grating includes a first gap-fill material having a first volume and a first refractive index, and a second gap-fill material having a second volume and a second refractive index different than the first refractive index. Control of the deposition of first volume and the deposition of second volume in an inkjet deposition process provide for the formation of the grating with two trenches that have different refractive indices and different gap-fill depths. The first gap-fill material and the second gap-fill material merge to form the gap-filler. Therefore, by controlling the varied refractive indices and different gap-fill depths the waveguide combiner is optimized by efficiency or a color uniformity.
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3.发明公开公开(公告)号：US20230192971A1
公开(公告)日：2023-06-22
申请号：US18084741
申请日：2022-12-20
Applicant: Applied Materials, Inc.
Inventor： Yingdong LUO , Xiaopei DENG , Kang LUO , Rami HOURANI , Daihua ZHANG , Ludovic GODET
CPC classification number: C08J3/28 , B41M5/0047 , B41M5/0064 , C08J5/18 , C08J2333/10
Abstract: Methods of curing a deformation in a substrate are provided. In some embodiments, the method includes identifying one or more areas on the substrate with deformation. The method further includes printing a first film on a first area of a surface of the substrate via inkjet printing, the first film being a material that polymerizes and contracts when cured. The method includes printing a second film on a second area of the surface of the substrate via inkjet printing, the second film being a material that polymerizes and contracts when cured. The method further includes curing the first film and the second film to induce a bend in the substrate. In some embodiments, the method includes inkjet printing a third film and a fourth film on the surface of the substrate.
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公开(公告)号：US20240270007A1
公开(公告)日：2024-08-15
申请号：US18167682
申请日：2023-02-10
Applicant: Applied Materials, Inc.
Inventor： Yingdong LUO , Jinyu LU , Takashi KURATOMI , Alexia Adilene PORTILLO RIVERA , Xiaopei DENG , Zhengping YAO , Daihua ZHANG , Rami HOURANI , Ludovic GODET
CPC classification number: B41M3/003 , B41J11/00212 , G02B27/0172
Abstract: Embodiments of the present disclosure generally relate to optical devices. More specifically, embodiments described herein relate to optical devices and methods of manufacturing a patterned optical device film on an optical device substrate. According to certain embodiments, an inkjet deposition process is used to deposit a patterned inkjet coating layer on the optical device substrate. A deposition process may then be used to deposit an optical device material on the patterned inkjet coating and the optical device substrate. The patterned inkjet coating on the optical device substrate may then be washed with an appropriate detergent to lift-off the patterned inkjet coating layer from the optical device substrate to form the patterned optical device film.
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公开(公告)号：US20240126012A1
公开(公告)日：2024-04-18
申请号：US18381604
申请日：2023-10-18
Applicant: Applied Materials, Inc.
Inventor： Yingdong LUO , Zhengping YAO , Daihua ZHANG , David Alexander SELL , Jingyi YANG , Xiaopei DENG , Kevin MESSER , Samarth BHARGAVA , Rami HOURANI , Ludovic GODET
CPC classification number: G02B6/1228 , G02B6/12004 , G02B6/124 , G02B6/13 , G02B27/0081
Abstract: Embodiments of the present disclosure generally relate to methods for forming a waveguide. Methods may include measuring a waveguide substrate, the waveguide having a substrate thickness distribution; and depositing an index-matched layer onto a surface of the waveguide, the index-matched layer having a first surface disposed on the waveguide substrate and a second surface opposing the first surface, wherein the index-matched layer is disposed only over a portion of the waveguide substrate, and a device slope of a second surface of the index-matched layer is substantially the same as the waveguide slope of the first surface of the waveguide.
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Patent Agency Ranking
公开(公告)号：US20230273355A1
公开(公告)日：2023-08-31
申请号：US18173365
申请日：2023-02-23
Applicant: Applied Materials, Inc.
Inventor： Yingdong LUO , Kangkang WANG , Wei-Sheng LEI , Xiaopei DENG , Erica CHEN , Kang LUO , Daihua ZHANG , Rami HOURANI , Ludovic GODET
IPC: G02B5/18 , G02B1/14 , B23K26/402 , B23K26/60
CPC classification number: G02B5/1847 , G02B1/14 , B23K26/402 , B23K26/60
Abstract: Methods of dicing optical devices from an optical device substrate are disclosed. The methods include disposing a protective coating only over the optical devices. The optical device substrate includes the optical devices disposed on the surface of the optical device substrate with areas therebetween. The areas of the optical device substrate are exposed by the protective coating. The protective coating includes a polymer, a solvent, and an additive. The methods further include curing the protective coating via a cure process so that the protective coating is water-soluble after the solvent is removed by the cure process, dicing the optical devices from the optical device substrate by projecting a laser beam to the areas between the optical devices, and exposing the protective coating to water to remove the protective coating from the optical devices that are diced.
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公开(公告)号：US20220111579A1
公开(公告)日：2022-04-14
申请号：US17070854
申请日：2020-10-14
Applicant: Applied Materials, Inc.
Inventor： Daihua ZHANG , Uma SRIDHAR , Hou T. NG , Sivapackia GANAPATHIAPPAN , Nag B. PATIBANDLA
IPC: B29C64/112 , B29C64/264 , B29C64/209 , B29C64/245 , B29C64/232 , B33Y70/00 , A61F2/02
Abstract: A method of forming a three dimensional object includes dispensing droplets of an electromagnetic energy curable liquid onto a surface to form a plurality of layers of the three dimensional object in liquid form, wherein each droplet forms a layer of liquid on the surface which is larger than a minimum feature size of a structure to be formed by curing the curable liquid, and directing electromagnetic energy capable of curing the liquid and having a beam width intersecting the layer of liquid which is at least as small as the smallest feature of a structure to be formed in the curable liquid.
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公开(公告)号：US20240295693A1
公开(公告)日：2024-09-05
申请号：US18629636
申请日：2024-04-08
Applicant: Applied Materials, Inc.
Inventor： Yingdong LUO , Zhengping YAO , Daihua ZHANG , David Alexander SELL , Jingyi YANG , Xiaopei DENG , Kevin MESSER , Samarth BHARGAVA , Rami HOURANI , Ludovic GODET
CPC classification number: G02B6/1228 , G02B6/12004 , G02B6/124 , G02B6/13 , G02B27/0081
Abstract: Embodiments of the present disclosure generally relate to methods for forming a waveguide. Methods may include measuring a waveguide substrate, the waveguide having a substrate thickness distribution; and depositing an index-matched layer onto a surface of the waveguide, the index-matched layer having a first surface disposed on the waveguide substrate and a second surface opposing the first surface, wherein the index-matched layer is disposed only over a portion of the waveguide substrate, and a device slope of a second surface of the index-matched layer is substantially the same as the waveguide slope of the first surface of the waveguide.
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公开(公告)号：US20240001398A1
公开(公告)日：2024-01-04
申请号：US18337246
申请日：2023-06-19
Applicant: Applied Materials, Inc.
Inventor： Russell Chin Yee TEO , Yingdong LUO , Ludovic GODET , Daihua ZHANG , Zhengping YAO , James D. STRASSNER
CPC classification number: B05C5/0291 , B05D3/007 , B05D3/067 , B05D7/24 , B05D2203/30
Abstract: A method of forming a substrate carrier is provided. The method includes forming a first electrode over a first surface of a substrate, the first electrode arranged in a first pattern including a plurality of segments, wherein portions of the plurality of segments are spaced apart from each other by a plurality of gaps; and dispensing a plurality of droplets of a dielectric material over the substrate and into the plurality of gaps. The plurality of droplets includes a first droplet and a second droplet, the first droplet is dispensed onto a first location over the substrate, the second droplet is dispensed onto a second location over the substrate, a size of the first droplet is at least 10% larger than a size of the second droplet.
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公开(公告)号：US20230229086A1
公开(公告)日：2023-07-20
申请号：US18085649
申请日：2022-12-21
Applicant: Applied Materials, Inc.
Inventor： Michael David-Scott KEMP , Daihua ZHANG , Ludovic GODET , Mahendran CHIDAMBARAM , Sumedh Dattatraya ACHARYA
CPC classification number: G03F7/2002 , B41M7/0081
Abstract: A method and apparatus for curing a substrate are described. The apparatus includes a curing apparatus with a casing and an ultraviolet (UV) radiation assembly coupled to the casing. The ultraviolet radiation assembly further includes a line UV radiation source. The casing includes an opening on one end. A substrate passes by the opening and is exposed to the UV radiation of the line UV radiation source. The curing apparatus further includes a purge assembly configured to continuously purge the process volume and the volume directly above the exposed portion of the substrate. The curing apparatus is configured to only cure a portion of the substrate at any one point in time, such that the curing apparatus is a scanning curing apparatus and includes a small process volume.
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