公开(公告)号：US20130075604A1

公开(公告)日：2013-03-28

申请号：US13623829

申请日：2012-09-20

Applicant: Carl Zeiss Microscopy Ltd

Inventor： Stewart Bean ,  Mike Astley

IPC: H01J37/22

CPC classification number: H01J37/226 ,  H01J37/228 ,  H01J2237/2445 ,  H01J2237/2808

Abstract: A system includes a particle optical system and a photosensitive detector. The particle optical system includes a charged particle beam source and an objective lens. The charged particle beam source is configured to generate a charged particle beam that travels along a particle beam path, and the objective lens is configured to focus the particle beam onto an object plane of the particle optical system. The system is configured such that a light beam path of the system extends from the object plane to the photosensitive detector.

Abstract translation: 一种系统包括粒子光学系统和光敏检测器。 粒子光学系统包括带电粒子束源和物镜。 带电粒子束源被配置为产生沿粒子束路径行进的带电粒子束，并且物镜被配置为将粒子束聚焦到粒子光学系统的物平面上。 该系统被配置为使得系统的光束路径从物平面延伸到光敏检测器。

公开(公告)号：US08648301B2

公开(公告)日：2014-02-11

申请号：US13623829

申请日：2012-09-20

Applicant: Carl Zeiss Microscopy Ltd.

Inventor： Stewart Bean ,  Michael Robert Astley

IPC: H01J37/28

CPC classification number: H01J37/226 ,  H01J37/228 ,  H01J2237/2445 ,  H01J2237/2808

Abstract: A system includes a particle optical system and a photosensitive detector. The particle optical system includes a charged particle beam source and an objective lens. The charged particle beam source is configured to generate a charged particle beam that travels along a particle beam path, and the objective lens is configured to focus the particle beam onto an object plane of the particle optical system. The system is configured such that a light beam path of the system extends from the object plane to the photosensitive detector.

Abstract translation: 一种系统包括粒子光学系统和光敏检测器。 粒子光学系统包括带电粒子束源和物镜。 带电粒子束源被配置为产生沿着粒子束路径行进的带电粒子束，并且物镜被配置为将粒子束聚焦到粒子光学系统的物平面上。 该系统被配置为使得系统的光束路径从物平面延伸到光敏检测器。

公开(公告)号：US20140197310A1

公开(公告)日：2014-07-17

申请号：US14150012

申请日：2014-01-08

Applicant: CARL ZEISS MICROSCOPY LTD.

Inventor： Edward Hill ,  Stewart Bean

IPC: G01N23/22 ,  H01J37/26

CPC classification number: H01J37/26 ,  G01N23/2254 ,  H01J2237/2804 ,  H01J2237/2806 ,  H01J2237/2808 ,  H01J2237/2809

Abstract: The invention refers to a method and a charged particle beam device for analyzing an object using a charged particle beam interacting with the object. The object comprises a sample embedded in a resin. Interaction radiation in the form of cathodoluminescence light is detected for identifying areas in which the resin is arranged and in which the sample is arranged. Interaction particles are detected to identify particles within the resin and the sample for further analysis by using EDX analysis.

Abstract translation: 本发明涉及一种用于使用与物体相互作用的带电粒子束来分析物体的方法和带电粒子束装置。 该物体包括嵌入树脂中的样品。 检测呈阴极发光的形式的相互作用的放射线用于识别布置树脂的区域，其中布置样品。 通过使用EDX分析，检测相互作用颗粒以鉴定树脂和样品中的颗粒进行进一步分析。

公开(公告)号：US09159532B2

公开(公告)日：2015-10-13

申请号：US14150012

申请日：2014-01-08

Applicant: Carl Zeiss Microscopy Ltd.

Inventor： Edward Hill ,  Stewart Bean

IPC: H01J37/26 ,  G01N23/225

CPC classification number: H01J37/26 ,  G01N23/2254 ,  H01J2237/2804 ,  H01J2237/2806 ,  H01J2237/2808 ,  H01J2237/2809

Abstract: The invention refers to a method and a charged particle beam device for analyzing an object using a charged particle beam interacting with the object. The object comprises a sample embedded in a resin. Interaction radiation in the form of cathodoluminescence light is detected for identifying areas in which the resin is arranged and in which the sample is arranged. Interaction particles are detected to identify particles within the resin and the sample for further analysis by using EDX analysis.

Abstract translation: 本发明涉及一种用于使用与物体相互作用的带电粒子束来分析物体的方法和带电粒子束装置。 该物体包括嵌入树脂中的样品。 检测呈阴极发光的形式的相互作用的放射线用于识别布置树脂的区域，其中布置样品。 通过使用EDX分析，检测相互作用颗粒以鉴定树脂和样品中的颗粒进行进一步分析。