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公开(公告)号:US20240222104A1
公开(公告)日:2024-07-04
申请号:US18684195
申请日:2022-08-16
Applicant: DH Technologies Development Pte. Ltd.
Inventor: Stanislaw POTYRALA , Bradley B. SCHNEIDER , Leigh BEDFORD
CPC classification number: H01J49/044 , H01J49/045 , H01J49/067 , H01J49/165
Abstract: A curtain chamber includes an orifice plate defining an orifice plate bore. A curtain plate is disposed adjacent to the orifice plate and defines a curtain plate bore. The orifice plate bore is disposed adjacent the curtain plate bore. A biasing element includes a first portion disposed in the orifice plate bore and a second portion disposed in the curtain plate bore. The biasing element biases the curtain plate towards the orifice plate. A race is defined by at least one of the orifice plate and the curtain plate. The race defines a race depth. A seal is disposed in the race. The seal includes an uncompressed seal depth greater than the race depth and a compressed seal depth less than the uncompressed seal depth.