公开(公告)号：US08686640B2

公开(公告)日：2014-04-01

申请号：US13672871

申请日：2012-11-09

Applicant: E/G Electro-Graph Inc.

Inventor： Michael Vella

IPC: H05H1/50

CPC classification number: H05H1/50 ,  H01J37/026 ,  H01J37/3171 ,  H01J2237/0041

Abstract: An ion beam processing system includes a plasma generator with a magnetic flood system. Magnets are provided for reducing the transverse magnetic field in the ion beam transport region of the plasma flood device so as to control charging damage or to neutralize beam space charge in ion beam processing and semiconductor ion implantation. The system is especially adapted for beam lines with ribbon beams.

Abstract translation: 离子束处理系统包括具有磁力洪水系统的等离子体发生器。 提供了用于减小等离子体放电装置的离子束输送区域中的横向磁场的磁体，以便控制充电损坏或者中和离子束处理和半导体离子注入中的束空间电荷。 该系统特别适用于带状光束的光束线。

公开(公告)号：US09903016B2

公开(公告)日：2018-02-27

申请号：US15389964

申请日：2016-12-23

Applicant: E/G ELECTRO-GRAPH, INC.

Inventor： Michael Vella

IPC: C23C14/48 ,  C23C14/04 ,  H01B7/17 ,  H01B5/14 ,  H01B13/06

CPC classification number: C23C14/48 ,  C23C14/048 ,  H01B5/14 ,  H01B7/17 ,  H01B13/06 ,  H01J37/02 ,  H01J37/08 ,  H01J37/32541 ,  H01J37/3255 ,  H01J37/32871 ,  H01J2237/022 ,  H01T19/00

Abstract: In systems where insulating deposits form during normal operation, electrodes are configured with a preformed dielectric thereon, wherein the preformed dielectric is formed with a geometric feature that preforms a triple junction. These triple junctions enhance low level discharge activity to facilitate localized breakdown of the deposits and maintain electrode conductivity.

公开(公告)号：US09551061B2

公开(公告)日：2017-01-24

申请号：US14921611

申请日：2015-10-23

Applicant: E/G ELECTRO-GRAPH, INC.

Inventor： Michael Vella

IPC: C23C14/04 ,  H01B13/34 ,  C23C14/48 ,  H01B5/14 ,  H01J37/08

CPC classification number: C23C14/048 ,  C23C14/48 ,  H01B5/14 ,  H01B13/348 ,  H01J1/3046 ,  H01J9/025 ,  H01J37/08

Abstract: In systems where insulating deposits form during normal operation, electrodes are configured so the deposits have the effect of creating in-situ triple junctions. These triple junctions enhance low level discharge activity to facilitate localized breakdown of the deposits and maintain electrode conductivity.

Abstract translation: 在正常运行期间形成绝缘沉积物的系统中，电极被配置成使得沉积物具有产生原位三联的作用。 这三个连接点提高了低放电活性，以促进沉积物的局部破坏并保持电极的导电性。