公开(公告)号：US20140305207A1

公开(公告)日：2014-10-16

申请号：US14242992

申请日：2014-04-02

Applicant: EM Microelectronic-Marin SA

Inventor： Christophe ENTRINGER ,  Alexandre DESCHILDRE

IPC: G01C19/5712

CPC classification number: G01C19/5712 ,  G01C19/5776 ,  H03B5/30

Abstract: The electronic circuit (1) is for driving a resonator (2) of a MEMS resonator device. The resonator includes a mass (m) connected to a spring (k) and a damping element (d), an actuation element (Cact) for actuating the mass via an actuation signal (drive), and a detection element (Cdet) for detecting motion of the mass. The electronic circuit includes a conversion means (3) connected to the detection element to supply a mass oscillation derivative signal (der), a means (4, 5, 6) of comparing the derivative signal amplitude and a reference amplitude (ref) for supplying a control signal (cmd), and a decision unit (7) for supplying a digital actuation signal (drive). The actuation signal includes rectangular pulses determined on the basis of the derivative signal and of the control signal to adapt the mass oscillation amplitude according to the reference amplitude.

Abstract translation: 电子电路（1）用于驱动MEMS谐振器装置的谐振器（2）。 谐振器包括连接到弹簧（k）和阻尼元件（d）的质量（m），用于通过致动信号（驱动器）驱动质量的致动元件（Cact）和用于检测的检测元件（Cdet） 质量的运动。 电子电路包括连接到检测元件以提供质量振荡微分信号（der）的转换装置（3），比较导数信号幅度的装置（4,5,6）和用于提供的参考振幅（ref） 控制信号（cmd）和用于提供数字致动信号（驱动器）的判定单元（7）。 致动信号包括基于导数信号和控制信号确定的矩形脉冲，以根据参考幅度调整质量振荡幅度。

公开(公告)号：US20240088066A1

公开(公告)日：2024-03-14

申请号：US18463771

申请日：2023-09-08

Applicant: EM Microelectronic-Marin SA

Inventor： Christophe ENTRINGER ,  Yves Dupraz ,  Pierre Muller ,  Zeng Wang ,  Alexis Durand ,  Arthur Hugh MacDougall

IPC: H01L23/58 ,  H01L21/78 ,  H01L23/31

CPC classification number: H01L23/585 ,  H01L21/78 ,  H01L23/3192 ,  H01L24/13

Abstract: A semiconductor wafer (1a, 1b) including a plurality of chips (2) and a separation zone (3) spacing the semiconductor chips (2) from each other in this wafer (1a, 1b), such a separation zone (3) extending from a front face (4a) to an opposite backside face (4b) of this wafer (1a, 1b), this separation zone (3) includes a scribe line (6) configured to be diced using plasma etching and an inlet area (13) of this scribe line (6), the inlet (13) being delimitated by free ends of plasma etch-resistant material layers (9) extending each from a peripheral wall (20) of a functional part (18) of a chip (2) into the scribe line (6) by overlapping a top of a seal ring (7) of this chip (2).

公开(公告)号：US20130191060A1

公开(公告)日：2013-07-25

申请号：US13733608

申请日：2013-01-03

Applicant: EM MICROELECTRONIC-MARIN SA

Inventor： Sylvain GROSJEAN ,  Christophe ENTRINGER

IPC: G01R27/26

CPC classification number: G01R27/2605 ,  G01D5/24 ,  G01L5/165 ,  G01P15/125

Abstract: The method is for measuring a physical parameter via an electronic circuit connected to a two differential capacitor sensor having two fixed electrodes and a common moving electrode. The circuit supplies first and second digital measuring signals. Each measuring cycle consists on biasing fixed electrodes by a first biasing and a second biasing reverse of the first biasing, alternated with biasing the electrodes by the measuring voltage based on first and second digital signals. Each conversion starts by a small step value added to or subtracted from each digital signal in each cycle. If the successive identical amplifier output states counted or counted down by a counter is higher than a threshold, a large step value is added to or subtracted from the digital signals in each cycle. Re-adaptation to the small step value occurs when a sign change is detected in the counter, until the conversion end.

Abstract translation: 该方法用于通过连接到具有两个固定电极和公共移动电极的两个差分电容传感器的电子电路来测量物理参数。 该电路提供第一和第二数字测量信号。 每个测量周期包括通过第一偏压的第一偏压和第二偏压的第二偏置反向来偏压固定电极，所述第一偏压与第一和第二数字信号通过测量电压偏置电极交替。 每个转换开始于在每个周期中从每个数字信号添加或减去的小步长值。 如果由计数器计数或递减计数器的连续相同的放大器输出状态高于阈值，则在每个周期中向数字信号添加或减去较大的步长值。 当在计数器中检测到符号变化时，才会重新适应小步长值，直到转换结束。

公开(公告)号：US20160011014A1

公开(公告)日：2016-01-14

申请号：US14732257

申请日：2015-06-05

Applicant: EM MICROELECTRONIC-MARIN SA

Inventor： Christophe ENTRINGER ,  Sylvain GROSJEAN

IPC: G01D5/241

CPC classification number: G01D5/2417 ,  G01L1/142 ,  G01P15/125

Abstract: The present invention concerns an electronic measurement circuit for measuring a physical parameter. The circuit comprises: a measurement sensor comprising two differential mounted capacitors each comprising a fixed electrode, and a common electrode, common to the two capacitors which is arranged to be movable relative to each fixed electrode of the two capacitors in order to alter the capacitive value of each capacitor when the physical parameter is measured. The circuit further comprises a first integrator unit connected to the common electrode for integrating charge received from the measurement sensor, and comprising two integrators arranged to be connected alternately to the common electrode; a second integrator unit connected to the first integrator unit for integrating charge received from the first integrator unit; a comparator for comparing analogue output values from the second integrator unit; a switch circuit connected to the measurement sensor for switching different voltage values across the two capacitors; and a feedback circuit for feeding a digital output signal of the comparator to the switch circuit for controlling the operation of the switch circuit.

Abstract translation: 本发明涉及一种用于测量物理参数的电子测量电路。 该电路包括：测量传感器，包括两个差分安装的电容器，每个电容器包括固定电极和两个电容器共用的公共电极，该电容器布置成相对于两个电容器的每个固定电极可移动，以便改变电容值 当测量物理参数时，每个电容器。 电路还包括连接到公共电极的第一积分器单元，用于积分从测量传感器接收的电荷，并且包括两个积分器，被布置成交替地连接到公共电极; 连接到第一积分器单元的第二积分器单元，用于积分从第一积分器单元接收的电荷; 用于比较来自第二积分器单元的模拟输出值的比较器; 连接到测量传感器的开关电路，用于切换两个电容器的不同电压值; 以及用于将比较器的数字输出信号馈送到开关电路以控制开关电路的操作的反馈电路。

公开(公告)号：US20130300437A1

公开(公告)日：2013-11-14

申请号：US13867722

申请日：2013-04-22

Applicant: EM MICROELECTRONIC-MARIN SA

Inventor： Sylvain GROSJEAN ,  Christophe ENTRINGER

IPC: G01R27/26

CPC classification number: G01R27/2605 ,  G01D5/241

Abstract: A physical parameter is measured via an electronic circuit connected to a two capacitor sensor. The circuit includes an amplifier connected to the common capacitor electrode, a logic unit for digital processing amplifier data and supplying a digital measuring signal, a digital-analogue converter for supplying a measuring voltage based on the digital measuring signal, a switching unit for alternately supplying the measuring voltage to the first and second fixed capacitor electrodes, and a regulated voltage for negative biasing or a low voltage for positive biasing from a voltage supply source. A first phase consists in biasing the first fixed electrode with the measuring voltage from first binary word and reference voltage, and the second fixed electrode with low voltage, and a second phase consists in biasing the second fixed electrode with measuring voltage from second binary word, which is reverse of the first binary word, and the reference voltage.

Abstract translation: 通过连接到两个电容传感器的电子电路来测量物理参数。 该电路包括连接到公共电容器电极的放大器，用于数字处理放大器数据并提供数字测量信号的逻辑单元，用于基于数字测量信号提供测量电压的数模转换器，用于交替供应 第一和第二固定电容器电极的测量电压，以及用于负偏压的调节电压或来自电压源的正偏置的低电压。 第一相包括：利用来自第一二进制字和参考电压的测量电压和第二固定电极以低电压偏压第一固定电极，第二相包括用来自第二二进制字的测量电压来偏置第二固定电极， 与第一个二进制字相反，并且参考电压。

公开(公告)号：US20130187668A1

公开(公告)日：2013-07-25

申请号：US13733374

申请日：2013-01-03

Applicant: EM MICROELECTRONIC-MARIN SA

Inventor： Christophe ENTRINGER ,  Sylvain GROSJEAN

IPC: G01R27/26

CPC classification number: G01R27/2605 ,  G01D5/24 ,  G01L5/165 ,  G01P15/125

Abstract: The method is for measuring a physical parameter by an electronic circuit connected to a two differential capacitor sensor having two fixed electrodes and a common moving electrode. The electronic circuit supplies first and second digital measuring signals. Each measuring cycle consists on biasing the electrodes by the measuring voltage based on the first digital signal, connecting the fixed electrodes to a supply voltage source for a first biasing, biasing the electrodes by the measuring voltage based on the second digital measuring signal, and inversely connecting the fixed electrodes to a supply voltage source for a second biasing. In first successive measuring cycles, the first and second digital signals are adapted to each cycle by a large step value. In second successive measuring cycles, the first and second digital signals are adapted to each cycle by a small step value until the end of the conversion.

Abstract translation: 该方法用于通过连接到具有两个固定电极和公共移动电极的两个差分电容传感器的电子电路来测量物理参数。 电子电路提供第一和第二数字测量信号。 每个测量周期包括通过基于第一数字信号的测量电压偏置电极，将固定电极连接到用于第一偏置的电源电压源，基于第二数字测量信号将电极偏置测量电压，并且反向 将固定电极连接到用于第二偏置的电源电压源。 在第一连续测量循环中，第一和第二数字信号通过大的步进值适应于每个循环。 在第二个连续的测量循环中，第一和第二数字信号通过一个小的步长值适应每个周期，直到转换结束。

公开(公告)号：US20230409863A1

公开(公告)日：2023-12-21

申请号：US18251043

申请日：2021-11-01

Applicant: EM Microelectronic-Marin SA

Inventor： Paul MULLER ,  Christophe ENTRINGER ,  Pierre MULLER ,  Thomas COULOT ,  Arthur Hugh MACDOUGALL

IPC: G06K19/077

CPC classification number: G06K19/07722 ,  G06K19/0775

Abstract: An RFID assembly and an assembly method thereof are provided. The assembly method for an RFID assembly comprises a step of providing at least one integrated circuit which includes at least one IC contact and at least one dielectric layer, and a deposition of at least one electrical contact and of at least one re-passivation layer. The at least one electrical contact is deposited on at least one first portion and the at least one re-passivation layer is deposited on at least one second portion, which is distinct of the at least one first portion.

公开(公告)号：US20150176992A1

公开(公告)日：2015-06-25

申请号：US14552891

申请日：2014-11-25

Applicant: EM Microelectronic-Marin SA

Inventor： Christophe ENTRINGER ,  Alexandre DESCHILDRE ,  Sylvain GROSJEAN

IPC: G01C19/567

CPC classification number: G01C19/567 ,  G01C19/5776

Abstract: The electronic circuit measures angular speed in a gyroscope, which includes a mass connected to a spring and a damping element, an actuation capacitor for actuating the mass and a detection capacitor for detecting motion of the mass. The electronic circuit includes a measurement resistor, which is connected to the moving mass and has a variation in resistive value equal to the oscillation frequency of the mass. The resistor is polarized to supply a measurement signal, which includes a carrier signal in phase with the oscillation of the mass and an angular speed signal phase shifted by π/2 relative to the carrier signal The measurement signal is supplied to an integration unit clocked by a clocking signal phase shifted by π/2 relative to the carrier signal and originating from the drive circuit. The angular speed signal is demodulated at the integration unit output.

Abstract translation: 电子电路测量陀螺仪中的角速度，其包括连接到弹簧和阻尼元件的质量，用于致动质量的致动电容器和用于检测质量块的运动的检测电容器。 电子电路包括测量电阻，其连接到移动质量块，并具有等于质量的振荡频率的电阻值的变化。 电阻器被极化以提供测量信号，其包括与质量的振荡同相的载波信号和相对于载波信号移位＆pgr / / 2的角速度信号相位。测量信号被提供给具有时钟 通过相对于载波信号移位并且来自驱动电路的时钟信号相位移位＆pgr; / 2。 角速度信号在积分单元输出处被解调。

公开(公告)号：US20140263653A1

公开(公告)日：2014-09-18

申请号：US14210762

申请日：2014-03-14

Applicant: EM Microelectronic-Marin SA

Inventor： Christophe ENTRINGER ,  Julien COLTIER

IPC: G06K7/14

CPC classification number: G06K7/1439 ,  G06K7/10772 ,  G06K7/10782

Abstract: Method for reading a barcode by means of an optical reader arranged to capture at a determined sampling frequency a series of partial images of the barcode by a sensor having at least one line of pixels. According to the invention it is provided to determine in each partial image a logical value as a function of the light intensity received by a central pixel of the line of pixels and a corresponding bar width when this bar is completely incorporated into the partial image in question. By only setting a maximum speed for the speed of movement of the barcode and dimensioning the line of pixels to ensure that each bar of this barcode is completely incorporated into a partial image at least once, the sequence of bits defined by the barcode is determined by means of an algorithm ignoring the duplications detected in consecutive partial images.

Abstract translation: 用于通过光学阅读器读取条形码的方法，该光学阅读器布置成以确定的采样频率以具有至少一行像素的传感器捕获条形码的一系列部分图像。 根据本发明，提供了在每个部分图像中确定逻辑值作为由像素线的中心像素接收的光强度的函数，以及当该条完全并入到所讨论的部分图像中时相应的条宽度 。 通过仅设置条形码移动速度的最大速度并确定像素线的尺寸，以确保该条形码的每个条形码至少一次完全合并到部分图像中，由条形码定义的比特序列由 忽略在连续部分图像中检测到的重复的算法的手段。