公开(公告)号：US20230115177A1

公开(公告)日：2023-04-13

申请号：US17961457

申请日：2022-10-06

Applicant: ENTEGRIS, INC.

Inventor： Scott L. Battle ,  Donn K. Naito ,  John N. Gregg ,  Jacob Thomas ,  Chase Parker ,  James Schindler ,  Bryan C. Hendrix ,  Benjamin H. Olson

IPC: C23C16/448 ,  C23C16/455

Abstract: A tray for an ampoule of a delivery system of solid precursor materials used in Atomic Layer Deposition (ALD) processes, Chemical Vapor Deposition (CVD) processes or both. The tray is configured to be able to have a reduced profile size when compressed to enhance the ease of which the tray can be inserted into the ampoule, and the tray is configured to expand in size to make improved contact with inner wall surfaces of the ampoule to provide improved heat transfer from the inner wall to the tray and ultimately to the solid precursor materials disposed on the tray.

公开(公告)号：US11821087B2

公开(公告)日：2023-11-21

申请号：US16856687

申请日：2020-04-23

Applicant: ENTEGRIS, INC.

Inventor： Bryan C. Hendrix ,  Scott L Battle ,  David J. Eldridge ,  John N. Gregg ,  Jacob Thomas ,  Manuel F. Gonzales ,  Kenney R. Jordan ,  Benjamin H. Olson

IPC: C23C16/458 ,  C23C14/18 ,  H01L21/02

CPC classification number: C23C16/4583 ,  C23C14/185 ,  H01L21/02271

Abstract: A tray for a vaporization vessel that includes a tray having a side wall, a bottom plate, one or more apertures that extend through the bottom plate, and a duct that extends through and from the bottom plate. The tray configured to support a solid reagent to be vaporized. A method of assembling the tray that includes forming a first tray that has the side wall and the bottom plate. A vaporization vessel that includes one or more of the trays.

公开(公告)号：US20240002081A1

公开(公告)日：2024-01-04

申请号：US18214241

申请日：2023-06-26

Applicant: ENTEGRIS, INC.

Inventor： Benjamin H. Olson ,  Dalton Vance Locklear ,  Bryan C. Hendrix ,  Jacob Thomas ,  Aniket Joshi ,  Scott L. Battle ,  Benjamin Cardozo ,  Benjamin R. Garrett ,  Juan Valdez ,  Michael Watson

IPC: B65B1/22 ,  B65B1/06

CPC classification number: B65B1/22 ,  B65B1/06

Abstract: A system including a vessel for containing a fill material and a vibration source connected to the vessel. The vibration source can increase a bulk density of the fill material. A fill material ratio can be defined as a particle density of the fill material divided by the bulk density of the fill material after vibration. After the vibration source increases the bulk density of the fill material, the fill material ratio can range from about 0.15 to about 0.75.

公开(公告)号：US20240084452A1

公开(公告)日：2024-03-14

申请号：US18380142

申请日：2023-10-13

Applicant: ENTEGRIS, INC.

Inventor： Bryan C. HENDRIX ,  Scott L. Battle ,  David J. Eldridge ,  John N. Gregg ,  Jacob Thomas ,  Manuel F. Gonzales ,  Kenney R. Jordan ,  Benjamin H. Olson

IPC: C23C16/458 ,  C23C14/18

CPC classification number: C23C16/4583 ,  C23C14/185 ,  H01L21/02271

Abstract: A tray for a vaporization vessel that includes a tray having a side wall, a bottom plate, one or more apertures that extend through the bottom plate, and a duct that extends through and from the bottom plate. The tray configured to support a solid reagent to be vaporized. A method of assembling the tray that includes forming a first tray that has the side wall and the bottom plate. A vaporization vessel that includes one or more of the trays.

公开(公告)号：US20230112884A1

公开(公告)日：2023-04-13

申请号：US17961470

申请日：2022-10-06

Applicant: ENTEGRIS, INC.

Inventor： Scott L. Battle ,  Jacob Thomas ,  Benjamin H. Olson ,  John N. Gregg

IPC: C23C16/448 ,  C23C16/455

Abstract: A modular tray for an ampoule of a delivery system of solid precursor materials used in Atomic Layer Deposition (ALD) processes, Chemical Vapor Deposition (CVD) processes or both. The modular tray is configured with separate components which can enhance the ease of which the modular tray can be inserted into the ampoule, and the tray is configured to make improved contact with inner wall surfaces of the ampoule to provide improved heat transfer from the inner wall to the modular tray and ultimately to the solid precursor materials disposed on the modular tray.