公开(公告)号：US20220275506A1

公开(公告)日：2022-09-01

申请号：US17681186

申请日：2022-02-25

Applicant: ENTEGRIS, INC.

Inventor： Benjamin Cardozo ,  Jacob Thomas

IPC: C23C16/448 ,  C23C16/455 ,  C23C16/50

Abstract: Vaporizer vessels include one or more reagent support panels, serving as dividers of interior space of the vessel, in a vertical orientation such as when filling the vaporizer vessels, and when rotated into a horizontal orientation, the panels support the vaporizable solid materials placed in one or more chambers formed by the panels and interior walls of the vessels and enable transfer of heat to those solid materials. The chambers are such that any or all chambers filled with the vaporizable solid materials provide a void space to allow the solid materials to vaporize and for gas to move through the vaporizer vessels when heated, to allow effective vaporization of the solid materials and further allow the vapor resulting from the solid materials to move to an outlet of the vessels where it can be provided as part of a process.

公开(公告)号：US20230298909A1

公开(公告)日：2023-09-21

申请号：US18123447

申请日：2023-03-20

Applicant: ENTEGRIS, INC.

Inventor： Michael Watson ,  Christopher Calhoun ,  Cristian Ocampo ,  Scott L. Battle ,  Benjamin Cardozo ,  Benjamin R. Garrett

IPC: H01L21/67 ,  C23C16/448 ,  C23C16/455 ,  C23C16/08

CPC classification number: H01L21/67017 ,  C23C16/448 ,  C23C16/45561 ,  C23C16/08

Abstract: Systems and methods for controlling precursor delivery. The systems and methods may comprise a precursor delivery vessel in fluid communication with a gas flow line. The precursor delivery vessel may comprise at least one tray containing a vaporizable precursor. An amount of thermal energy may be supplied to the at least one tray in an amount sufficient to vaporize the vaporizable precursor. The vaporized precursor may be dispensed from the precursor delivery vessel to the gas flow line. The amount of thermal energy supplied to the at least one tray may be adjusted sufficient to maintain a pressure of the vaporized precursor, in the gas flow line, within a pressure range.

公开(公告)号：US20240002081A1

公开(公告)日：2024-01-04

申请号：US18214241

申请日：2023-06-26

Applicant: ENTEGRIS, INC.

Inventor： Benjamin H. Olson ,  Dalton Vance Locklear ,  Bryan C. Hendrix ,  Jacob Thomas ,  Aniket Joshi ,  Scott L. Battle ,  Benjamin Cardozo ,  Benjamin R. Garrett ,  Juan Valdez ,  Michael Watson

IPC: B65B1/22 ,  B65B1/06

CPC classification number: B65B1/22 ,  B65B1/06

Abstract: A system including a vessel for containing a fill material and a vibration source connected to the vessel. The vibration source can increase a bulk density of the fill material. A fill material ratio can be defined as a particle density of the fill material divided by the bulk density of the fill material after vibration. After the vibration source increases the bulk density of the fill material, the fill material ratio can range from about 0.15 to about 0.75.

公开(公告)号：US20230062455A1

公开(公告)日：2023-03-02

申请号：US17900713

申请日：2022-08-31

Applicant: ENTEGRIS, INC.

Inventor： Benjamin Cardozo ,  Scott L. Battle

IPC: C23C16/48

Abstract: An assembly includes a vaporizer vessel. In some embodiments, the vaporizer vessel defines an interior volume. In some embodiments, the vaporizer vessel is configured to hold at least one source reagent within the interior volume. In some embodiments, the assembly includes a heater. In some embodiments, the heater is configured to vaporize the at least one source reagent. In some embodiments, the heater is a radiant heat source configured to vaporize the at least one source reagent without heating the vaporizer vessel.

公开(公告)号：US20240327978A1

公开(公告)日：2024-10-03

申请号：US18740411

申请日：2024-06-11

Applicant: ENTEGRIS, INC.

Inventor： Benjamin Cardozo ,  Jacob Thomas

IPC: C23C16/448 ,  C23C16/455 ,  C23C16/50

CPC classification number: C23C16/4481 ,  C23C16/448 ,  C23C16/45544 ,  C23C16/45553 ,  C23C16/50

Abstract: Vaporizer vessels include one or more reagent support panels, serving as dividers of interior space of the vessel, in a vertical orientation such as when filling the vaporizer vessels, and when rotated into a horizontal orientation, the panels support the vaporizable solid materials placed in one or more chambers formed by the panels and interior walls of the vessels and enable transfer of heat to those solid materials. The chambers are such that any or all chambers filled with the vaporizable solid materials provide a void space to allow the solid materials to vaporize and for gas to move through the vaporizer vessels when heated, to allow effective vaporization of the solid materials and further allow the vapor resulting from the solid materials to move to an outlet of the vessels where it can be provided as part of a process.

公开(公告)号：US12037684B2

公开(公告)日：2024-07-16

申请号：US17681186

申请日：2022-02-25

Applicant: ENTEGRIS, INC.

Inventor： Benjamin Cardozo ,  Jacob Thomas

IPC: C23C16/448 ,  C23C16/455 ,  C23C16/50

CPC classification number: C23C16/4481 ,  C23C16/448 ,  C23C16/45544 ,  C23C16/45553 ,  C23C16/50

Abstract: Vaporizer vessels include one or more reagent support panels, serving as dividers of interior space of the vessel, in a vertical orientation such as when filling the vaporizer vessels, and when rotated into a horizontal orientation, the panels support the vaporizable solid materials placed in one or more chambers formed by the panels and interior walls of the vessels and enable transfer of heat to those solid materials. The chambers are such that any or all chambers filled with the vaporizable solid materials provide a void space to allow the solid materials to vaporize and for gas to move through the vaporizer vessels when heated, to allow effective vaporization of the solid materials and further allow the vapor resulting from the solid materials to move to an outlet of the vessels where it can be provided as part of a process.

公开(公告)号：US20230113646A1

公开(公告)日：2023-04-13

申请号：US17959792

申请日：2022-10-04

Applicant: ENTEGRIS, INC.

Inventor： Scott L. Battle ,  Benjamin Cardozo ,  Chase Parker

IPC: C23C16/455 ,  G01G17/04

Abstract: A precursor delivery system for determining material levels and related methods can include an ampoule and at least one tray disposed in the ampoule. The at least one tray may be configured to hold an amount of a precursor material. A load cell assembly is also included. The load cell assembly may include a load cell. The load cell assembly may be coupled to the at least one tray in a configuration sufficient for the at least one tray to exert a mechanical force upon the load cell. This mechanical force may be correlative to the amount of precursor material present on the at least one tray and thus may be used to determine material levels within the ampoule.