公开(公告)号：US20160167960A1

公开(公告)日：2016-06-16

申请号：US14909105

申请日：2014-07-02

Applicant: EPCOS AG

Inventor： Marcel GIESEN ,  Thomas METZGER ,  Phillip EKKELS ,  Ansgar SCHÄUFELE

IPC: B81C1/00

CPC classification number: B81C1/00682 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81C1/00666 ,  B81C99/004 ,  G01L9/0073 ,  H04R31/003

Abstract: A method can be used for producing a microelectromechanical transducer. A plurality of microelectromechanical transducers are produced on a single wafer. Each transducer includes a diaphragm. The wafer is divided into at least a first and a second region. The mechanical tensions of a random sample of diaphragms of the first region are established and the values are compared with a predetermined desired value. The mechanical tensions of a random sample of diaphragms of the second region are established and the values are compared with the predetermined desired value. The tensions of the diaphragms in the first region are adjusted to the predetermined desired value, and the tensions of the diaphragms in the second region are adjusted to the predetermined desired value.

Abstract translation: 一种方法可用于制造微机电换能器。 在单个晶片上产生多个微机电换能器。 每个换能器包括隔膜。 晶片被分成至少第一和第二区域。 建立第一区域的膜片的随机样品的机械张力，并将其与预定的期望值进行比较。 建立第二区域的膜片的随机样品的机械张力，并将其与预定的期望值进行比较。 将第一区域中的膜片的张力调整到预定的期望值，并且将第二区域中的膜片的张力调整到预定的期望值。