公开(公告)号：US20230394852A1

公开(公告)日：2023-12-07

申请号：US17832212

申请日：2022-06-03

Applicant: FEI COMPANY

Inventor： Radim Kríz ,  Matej Dolník ,  Marko Vrábel

IPC: G06V20/69 ,  G06T7/10 ,  G06T7/70 ,  G06T7/60 ,  G06T7/00 ,  G06V10/764 ,  H01J37/22 ,  H01J37/28 ,  H01J37/305 ,  G02B21/16

CPC classification number: G06V20/698 ,  G06V20/695 ,  G06T7/10 ,  G06T7/70 ,  G06T7/60 ,  G06T7/0012 ,  G06V10/764 ,  H01J37/222 ,  H01J37/28 ,  H01J37/3053 ,  G02B21/16 ,  G06T2207/20021 ,  G06T2207/10056 ,  G06T2207/30024

Abstract: Disclosed herein are scientific instrument support systems, as well as related methods, computing devices, and computer-readable media. For example, in some embodiments, a support apparatus is provided for a charged particle microscope. The support apparatus is configured to apply automated image processing to an image representing a lamella sample to segment the image into a plurality of segmented classes. The support apparatus is also configured to identify, based on the plurality of segmented classes, a subset of candidate structures-of-interest in the lamella sample and to select, from the subset of candidate structures-of-interest in the lamella sample, a selected structure-of-interest for milling. The support apparatus is also configured to set, based on the selected structure-of-interest for milling, at least one milling parameter for the scientific instrument. An automated method performed via a computing device for providing such scientific instrument support is also provided.