公开(公告)号：US20240128050A1

公开(公告)日：2024-04-18

申请号：US18477251

申请日：2023-09-28

Applicant: FEI Company

Inventor： Yuchen DENG ,  Holger KOHR ,  Bart VAN KNIPPENBERG ,  Peter TIEMEIJER ,  Lingbo YU

IPC: H01J37/26 ,  H01J37/295

CPC classification number: H01J37/261 ,  H01J37/295 ,  H01J2237/2803 ,  H01J2237/2814

Abstract: A method of automated data acquisition for a transmission electron microscope, the method comprising: obtaining a reference image of a sample at a first magnification; for each of a first plurality of target locations identified in the reference image: steering an electron beam of the transmission electron microscope to the target location, obtaining a calibration image of the sample at a second magnification greater than the first magnification, and using image processing techniques to identify an apparent shift between an expected position of the target location in the calibration image and an observed position of the target location in the calibration image, training a non-linear model using the first plurality of target locations and the corresponding apparent shifts; based on the non-linear model, calculating a calibrated target location for a next target location; steering the electron beam to the calibrated target location and obtaining an image at a third magnification greater than the first magnification.

公开(公告)号：US20190228949A1

公开(公告)日：2019-07-25

申请号：US16255210

申请日：2019-01-23

Applicant: FEI Company

Inventor： Bart Jozef JANSSEN ,  Lingbo YU ,  Erik Michiel FRANKEN

IPC: H01J37/26 ,  H01J37/28

Abstract: A method of using a Transmission Charged Particle Microscope, comprising: Providing a specimen on a specimen holder; Using an illumination system to direct a beam of charged particles from a source onto said specimen; Using an imaging system to direct charged particles that are transmitted through the specimen onto a detector, further comprising the following actions: In an acquisition step, lasting a time interval T, using said detector in particle counting mode to register spatiotemporal data relating to individual particle detection incidences, and to output said spatiotemporal data in raw form, without assembly into an image frame; In a subsequent rendering step, assembling a final image from said spatiotemporal data, while performing a mathematical correction operation.