公开(公告)号：US11815476B2

公开(公告)日：2023-11-14

申请号：US17217103

申请日：2021-03-30

Applicant: FEI Company

Inventor： Bart Buijsse ,  Jaydeep Sanjay Belapure ,  Alexander Henstra ,  Michael Patrick Janus ,  Stefano Vespucci

IPC: G01N23/205 ,  H01J37/26 ,  G01N23/2055 ,  G01N23/20025 ,  G01N23/20058 ,  H01J37/147 ,  H01J37/22 ,  H01J37/28

CPC classification number: G01N23/2055 ,  G01N23/20025 ,  G01N23/20058 ,  H01J37/1472 ,  H01J37/222 ,  H01J37/28 ,  G01N2223/03 ,  G01N2223/0565 ,  G01N2223/0566 ,  G01N2223/32 ,  G01N2223/3302 ,  H01J2237/2802

Abstract: Crystallographic information of crystalline sample can be determined from one or more three-dimensional diffraction pattern datasets generated based on diffraction patterns collected from multiple crystals. The crystals for diffraction pattern acquisition may be selected based on a sample image. At a location of each selected crystal, multiple diffraction patterns of the crystal are acquired at different angles of incidence by tilting the electron beam, wherein the sample is not rotated while the electron beam is directed at the selected crystal.