公开(公告)号：US20240171036A1

公开(公告)日：2024-05-23

申请号：US18430711

申请日：2024-02-02

Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

Inventor： Jian GAO ,  Junhao YI ,  Lanyu ZHANG ,  Haixiang DENG

IPC: H02K5/24 ,  F16F15/02 ,  H02K11/21 ,  H02K33/18

CPC classification number: H02K5/24 ,  F16F15/021 ,  H02K11/21 ,  F16F2228/063 ,  F16F2232/08 ,  H02K33/18

Abstract: A voice coil motor direct-driven active vibration isolation and leveling integrated platform. The voice coil motor direct-drive active vibration isolation and leveling integrated platform includes a moving platform, a base, a driving mechanism and a vibration isolation and leveling composite mechanism; the moving platform is rotatably disposed on the base around the X-axis and the Y-axis through the vibration isolation and leveling composite mechanism; the driving mechanism is used to drive the moving platform to perform leveling movement, and the force exerted by the driving mechanism on the moving platform is distributed symmetrically around the circumference of the moving platform.

公开(公告)号：US20230357016A1

公开(公告)日：2023-11-09

申请号：US18146378

申请日：2022-12-25

Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

Inventor： Huilong LIU ,  Yun CHEN ,  Xin CHEN ,  Yixin ZHENG ,  Kyoung-Sik MOON ,  Dachuang SHI ,  Jian GAO ,  Ching-Ping WONG

IPC: C01B32/184 ,  C01B32/196

CPC classification number: C01B32/184 ,  C01B32/196 ,  C01P2004/04 ,  C01P2002/82 ,  C01P2002/85

Abstract: A method for integrally forming a graphene film (GF) of a high specific surface area (SSA) by ultrafast ultraviolet (UV) laser processing, includes: selecting a carbon precursor material, where the carbon precursor material is one selected from the group consisting of a biomass/hydrogel composite and a heavy hydrocarbon compound; adding an activator solution to an inside of the carbon precursor material to obtain a composite with an activator uniformly loaded, and spreading the composite on a flexible substrate to form a carbon precursor material layer; heating and drying the carbon precursor material layer; in-situ processing with an ultrafast UV laser to obtain an activated GF of a high SSA; and cleaning and drying the activated GF. With the method of the present disclosure, a microporous activated GF of a high SSA can be directly processed in-situ on a flexible substrate.

公开(公告)号：US20230268205A1

公开(公告)日：2023-08-24

申请号：US18062025

申请日：2022-12-06

Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

Inventor： Xin CHEN ,  Zhihang LIN ,  Hui TANG ,  Hongcheng LI ,  Jian GAO ,  Qiang LIU ,  Xun CHEN

IPC: H01L21/67 ,  H01L33/00

CPC classification number: H01L21/67144 ,  H01L33/0093

Abstract: A flexure-based continuous ejector pin mechanism for Mini/Micro chip mass transfer includes a first drive frame, a second drive frame, a mounting base, a first thorn die attach drive device, a second thorn die attach drive device, first flexible hinges, second flexible hinges, and a pricking pin. The second drive frame and the first drive frame are connected through the first flexible hinge. The mounting base is connected to a left side and a right side of the second drive frame through the second flexible hinges. Compared with a laser transfer technology, the flexible movable thorn die attach device has lower cost and higher accuracy; compared with a vacuum nozzle transfer technology, the flexible movable thorn die attach device has higher transfer efficiency and quality; and compared with a conventional thorn die attach device, the flexible movable thorn die attach device has higher transfer efficiency and precision.

公开(公告)号：US20230235810A1

公开(公告)日：2023-07-27

申请号：US18154533

申请日：2023-01-13

Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

Inventor： Lanyu ZHANG ,  Jian GAO ,  Shaoxuan ZHANG ,  Yun CHEN ,  Xin CHEN ,  Kai ZHANG

IPC: F16F15/00 ,  F16F15/02

CPC classification number: F16F15/002 ,  F16F15/02 ,  F16F2222/04 ,  F16F2228/066 ,  F16F2230/18

Abstract: A rapid active vibration reduction method for a high-speed motion stage includes acquiring motion parameters of a motion body of the motion stage in current motion; determining a vibration reduction mode of a vibration reduction device according to the motion parameters; and controlling an action end of the vibration reduction device to contact with the motion body of the motion stage or contact with a driving device for driving the motion body to move based on the vibration reduction mode, so that a contact friction force used for suppressing vibration of the motion body is generated. Realizing vibration reduction by means of active friction can reduce vibration of the motion body in a specific stage needing vibration reduction, and the action end of the vibration reduction device does not need to contact with the motion body or does not need to contact with the driving device before vibration reduction.

公开(公告)号：US20220060125A1

公开(公告)日：2022-02-24

申请号：US16950062

申请日：2020-11-17

Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

Inventor： Jian GAO ,  Jindi ZHANG ,  Yuheng LUO ,  Lingwei TAN ,  Lanyu ZHANG ,  Xin CHEN

IPC: H02N2/06 ,  G05B19/19

Abstract: The present disclosure relates to the technical field of mechanical precision manufacturing, in particular to a motor tracking error reduction method and an implementation device based on a micro-drive unit. A motor tracking error reduction method based on micro-drive unit includes: providing a motor mover as the working output end, and feeding back the position information of the motor mover to the micro-drive controller in real time by the sensor; controlling the micro-drive unit to compensate the displacement of the motor mover by the micro-drive controller; correcting the tracking error of the motor mover after the displacement compensation, and feeding back the tracking error information after correction to the motor controller. The error reduction method and implementation device in the present disclosure reduce the motor tracking error and solve the problem of coupling interference. In addition, the single position feedback is used to reduce the production cost.

公开(公告)号：US20190355587A1

公开(公告)日：2019-11-21

申请号：US16383885

申请日：2019-04-15

Applicant: Guangdong University of Technology

Inventor： Xin CHEN ,  Yun CHEN ,  Dachuang SHI ,  Xun CHEN ,  Qiang LIU ,  Jian GAO ,  Chengqiang CUI

IPC: H01L21/308 ,  H01L21/306

Abstract: A method for synchronous wet etching processing of differential microstructures, including the following steps: step a: performing photoetching on a processing surface of a workpiece to be processed to develop the workpiece; step b: affixing a mask to a surface opposite to the processing surface of the workpiece; step c: continuously cooling the mask; step d: placing the cooled mask and the workpiece in a wet etching device; and adding an etchant to the processing surface of the workpiece to start etching; step e: removing the mask and the workpiece from the wet etching device after the set etching time; separating the mask and the workpiece to obtain a workpiece with a etching structure. A temperature difference is formed between the pattern area to be processed and the retaining area.

公开(公告)号：US20240359326A1

公开(公告)日：2024-10-31

申请号：US18769309

申请日：2024-07-10

Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

Inventor： Jian GAO ,  Disai CHEN ,  Yuheng LUO ,  Lanyu ZHANG ,  Zhuojun ZHENG ,  Guoqing WU ,  Xin CHEN

IPC: B25J9/16

CPC classification number: B25J9/1664 ,  B25J9/1607 ,  B25J9/163

Abstract: The present application provides a kinematics modeling method, apparatus and device for a multi-degree-of-freedom mechanism and a storage medium. The method includes: constructing a point coordinate system, and constructing the transformation matrix; constructing transformation matrices of two rotating axes and the transformation matrix; constructing the forward kinematics model based on the transformation matrices of the point coordinate system, the two rotating axes and the workpiece coordinate system; solving the motor value of the rotating axis through the rotation matrix of the end-effector, using the translation matrix of the end-effector as a non-homogeneous linear equation set, solving the motor value of linear axis. Thus solving the technical problem in the prior arts that the redundant parameters are introduced as a cost to separate the linear axis and the rotating axis for step-by-step kinematics calibration, which affects the error calibration precision of the overall end-effector movement of the mechanism.

公开(公告)号：US20240176315A1

公开(公告)日：2024-05-30

申请号：US18430513

申请日：2024-02-01

Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

Inventor： Lanyu ZHANG ,  Boyu ZHAN ,  Jian GAO ,  Yachao LIU ,  Yun CHEN ,  Xin CHEN ,  Nan HUANG ,  Huake WANG ,  Xuanzhu CHEN

IPC: G05B13/04 ,  H02P25/06

CPC classification number: G05B13/042 ,  G05B13/048 ,  H02P25/06

Abstract: A linear motor motion control method, device, equipment and storage medium. The proposed invention uses an extended state observer constructed in advance based on the model parameters of the linear motor, and performs state estimation based on the total control amount of the linear motor and the actual displacement signal to obtain each observation signal. The phase advance controller is used to improve the estimated lag of the disturbance observation signal, and a model prediction controller built in advance based on the mathematical model of the linear motor is used to perform rolling optimization based on each observation signal to obtain the optimal control amount increment; The total control amount is updated based on the improved disturbance observation signal and the optimal control amount increment, and the corresponding drive signal is output to the drive end of the linear motor based on the updated total control amount.

公开(公告)号：US20230298914A1

公开(公告)日：2023-09-21

申请号：US18062026

申请日：2022-12-06

Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

Inventor： Hui TANG ,  Zhishen LIAO ,  Xin CHEN ,  Zhihang LIN ,  Jian GAO ,  Qiang LIU ,  Xun CHEN

IPC: H01L21/67

CPC classification number: H01L21/67144 ,  H01L21/67259

Abstract: A compliant mechanical system for Mini/Micro chip mass transfer and packaging comprises a flexure-based continuous ejector pin mechanism including a drive support plate, a mounting base, first thorn die attach drive devices, second thorn die attach drive devices, first flexible hinges, second flexible hinges, and a pricking pin. The first thorn die attach drive devices and the second thorn die attach drive devices are mounted on the drive support plate. A drive end of the first thorn die attach drive device horizontally passes rightward through the first flexible hinge at a corresponding position; a drive end of the second thorn die attach drive device horizontally passes leftward through the first flexible hinge at a corresponding position; and the mounting base is hinged to the drive ends of the two thorn die attach drive devices through the second flexible hinges.

公开(公告)号：US20190189459A1

公开(公告)日：2019-06-20

申请号：US16221456

申请日：2018-12-15

Applicant: Guangdong University of Technology

Inventor： Yun CHEN ,  Xin CHEN ,  Jian GAO ,  Zhengping WANG ,  Haidong YANG

IPC: H01L21/306 ,  H01L21/308 ,  H01L21/311 ,  H01L21/3213 ,  H01L21/67 ,  G01F23/64

CPC classification number: H01L21/30612 ,  G01F23/64 ,  H01L21/3081 ,  H01L21/311 ,  H01L21/3213 ,  H01L21/67063

Abstract: Disclosed is a processing device for the third generation semiconductor materials. The device includes a reaction device, an operating platform and a support device. A reaction chamber is located inside the reaction device and the upper and lower ends of the reaction device are covered with an upper cover and a lower cover, respectively. An etching solution injection port and an etching solution discharge port are provided at the side wall of the reaction chamber. A stirring excitation coil, a plurality of conducting rods, a plurality of heating rods, a plurality of sealing rings and a workpiece are provided inside of the reaction chamber. The stirring excitation coil is mounted just under the upper cover; the conducting rods and the heating rods are respectively mounted in a circumferentially symmetrical manner in an inner wall of the reaction chamber.