公开(公告)号：US11969771B2

公开(公告)日：2024-04-30

申请号：US18359139

申请日：2023-07-26

Applicant: Guangdong University of Technology

Inventor： Yun Chen ,  Biao Li ,  Aoke Song ,  Shankun Dong ,  Shengbao Lai ,  Maoxiang Hou ,  Xin Chen

IPC: B08B7/02 ,  B06B1/06 ,  G03F7/40

CPC classification number: B08B7/028 ,  B06B1/0688 ,  B06B2201/56 ,  B06B2201/71 ,  G03F7/405

Abstract: A method of fabricating a film vibration device, including: photoetching a surface of a silicon wafer to form a circular-hole array; etching an aluminum layer on the silicon wafer; etching the silicon wafer to form a through-hole array to obtain a porous silicon wafer; attaching a polyethylene terephthalate (PET) sheet to a side of the porous silicon wafer; ablating the PET sheet to obtain a porous PET film; attaching a polyvinylidene fluoride (PVDF) film to a lower side of the porous silicon wafer; performing vacuumization above the porous silicon wafer, while heating the PVDF film below the porous silicon wafer to create dome micro-structures on the PVDF film; and laminating the porous PET film on each of two sides of the PVDF film to obtain the film vibration device. This application also provides a cleaning device having the film vibration device.

公开(公告)号：US11969716B2

公开(公告)日：2024-04-30

申请号：US18339190

申请日：2023-06-21

Applicant: Guangdong University of Technology

Inventor： Yun Chen ,  Shengbao Lai ,  Biao Li ,  Zuohui Liu ,  Guanhai Wen ,  Maoxiang Hou ,  Xin Chen

IPC: B01J27/224 ,  B01J6/00 ,  B01J21/18 ,  B01J35/00 ,  B01J37/04 ,  B01J37/06 ,  B01J37/08 ,  C01B3/04

CPC classification number: B01J27/224 ,  B01J6/001 ,  B01J21/18 ,  B01J35/004 ,  B01J37/04 ,  B01J37/06 ,  B01J37/08 ,  C01B3/045

Abstract: This application discloses a silicon carbide (SiC)-loaded graphene photocatalyst for hydrogen production under visible light irradiation and a preparation method thereof. Pure SiC and pure black carbon are respectively prepared and mixed to obtain a mixture with a resistance less than 100Ω. Then the mixture was vacuumized and processed with a current pulse with an increasing voltage until a breakdown occurs, and subjected to ultrasonic stirring, centrifugal washing and vacuum drying in turn to obtain the SiC-loaded graphene photocatalyst. By means of the current pulse, a heterojunction is formed between SiC and graphene to improve the catalytic activity of the photocatalyst; and the photocatalytic hydrogen production rate of SiC nanoparticles can be enhanced after loaded on the graphene.