公开(公告)号：US11081312B2

公开(公告)日：2021-08-03

申请号：US16785373

申请日：2020-02-07

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Tomokazu Kozakai ,  Yoshimi Kawanami ,  Hiroyuki Mutoh ,  Yoko Nakajima ,  Hironori Moritani ,  Shinichi Matsubara

IPC: H01J37/08 ,  H01J37/30 ,  H01J37/10 ,  H01J37/305

Abstract: A method of manufacturing an emitter is disclosed. The method enables a crystal structure of the tip of the front end of the emitter to return to its original state with high reproducibility by rearranging atoms in a treatment, and enables a long lasting emitter to be attained by suppressing extraction voltage rise after the treatment. As a method of manufacturing an emitter having a sharpened needle-shape, the method includes: performing an electropolishing process for the front end of an emitter material having conductivity to taper toward the front end; and performing an etching to make the number of atoms constituting the tip of the front end be a predetermined number or less by further sharpening the front end through an electric field-induced gas etching having constantly applied voltage, while observing the crystal structure of the front end, by a field ion microscope, in a sharp portion having the front end at its apex.