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1.发明授权公开(公告)号：US09548182B2
公开(公告)日：2017-01-17
申请号：US14406909
申请日：2013-05-08
Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
Inventor： Takashi Onishi , Shunichi Watanabe , Minoru Kaneda
IPC: H01J37/04 , H01J37/073 , H01J37/02 , H01J37/067 , H01J37/248 , H01J37/24 , H01J27/02 , H01J29/48 , H01J37/16
CPC classification number: H01J37/04 , H01J27/024 , H01J29/485 , H01J37/026 , H01J37/067 , H01J37/073 , H01J37/16 , H01J37/241 , H01J37/248 , H01J2237/16
Abstract: An instrument producing a charged particle beam according to the present invention is provided with: a charged particle source; a plurality of first electrodes disposed along a direction of irradiation of charged particles from the charged particle source; a plurality of insulation members disposed between the first electrodes; and a housing mounted around the plurality of first electrodes. The housing is formed from an insulating solid material, and includes a plurality of second electrodes disposed at positions in proximity to the plurality of first electrodes. At least one of the plurality of second electrodes is electrically connected to at least one of the plurality of first electrodes, each of the plurality of second electrodes having the same potential as the potential of the proximate one of the first electrodes.
Abstract translation: 根据本发明的产生带电粒子束的仪器具有：带电粒子源; 多个第一电极，其沿带电粒子源的带电粒子的照射方向设置; 设置在所述第一电极之间的多个绝缘构件; 以及围绕所述多个第一电极安装的壳体。 壳体由绝缘固体材料形成，并且包括设置在靠近多个第一电极的位置处的多个第二电极。 所述多个第二电极中的至少一个电连接到所述多个第一电极中的至少一个，所述多个第二电极中的每一个具有与所述第一电极中的所述第一电极的电位相同的电位。
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2.发明申请CHARGED PARTICLE BEAM GENERATING APPARATUS, CHARGED PARTICLE BEAM APPARATUS, HIGH VOLTAGE GENERATING APPARATUS, AND HIGH POTENTIAL APPARATUS 有权充电颗粒光束发生装置，充电颗粒光束装置，高电压发生装置和高电位装置公开(公告)号：US20150179387A1
公开(公告)日：2015-06-25
申请号：US14406909
申请日：2013-05-08
Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
Inventor： Takashi Onishi , Shunichi Watanabe , Minoru Kaneda
CPC classification number: H01J37/04 , H01J27/024 , H01J29/485 , H01J37/026 , H01J37/067 , H01J37/073 , H01J37/16 , H01J37/241 , H01J37/248 , H01J2237/16
Abstract: An instrument producing a charged particle beam according to the present invention is provided with: a charged particle source; a plurality of first electrodes disposed along a direction of irradiation of charged particles from the charged particle source; a plurality of insulation members disposed between the first electrodes; and a housing mounted around the plurality of first electrodes. The housing is formed from an insulating solid material, and includes a plurality of second electrodes disposed at positions in proximity to the plurality of first electrodes. At least one of the plurality of second electrodes is electrically connected to at least one of the plurality of first electrodes, each of the plurality of second electrodes having the same potential as the potential of the proximate one of the first electrodes.
Abstract translation: 根据本发明的产生带电粒子束的仪器具有：带电粒子源; 多个第一电极，其沿带电粒子源的带电粒子的照射方向设置; 设置在所述第一电极之间的多个绝缘构件; 以及围绕所述多个第一电极安装的壳体。 壳体由绝缘固体材料形成，并且包括设置在靠近多个第一电极的位置处的多个第二电极。 所述多个第二电极中的至少一个电连接到所述多个第一电极中的至少一个，所述多个第二电极中的每一个具有与所述第一电极中的所述第一电极的电位相同的电位。
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