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    Charged particle beam generating apparatus, charged particle beam apparatus, high voltage generating apparatus, and high potential apparatus
    2.
    发明授权
    Charged particle beam generating apparatus, charged particle beam apparatus, high voltage generating apparatus, and high potential apparatus 有权
    带电粒子束产生装置，带电粒子束装置，高压发生装置和高电位装置

    公开(公告)号：US09548182B2

    公开(公告)日：2017-01-17

    申请号：US14406909

    申请日：2013-05-08

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Takashi Onishi ,  Shunichi Watanabe ,  Minoru Kaneda

    IPC: H01J37/04 ,  H01J37/073 ,  H01J37/02 ,  H01J37/067 ,  H01J37/248 ,  H01J37/24 ,  H01J27/02 ,  H01J29/48 ,  H01J37/16

    CPC classification number: H01J37/04 ,  H01J27/024 ,  H01J29/485 ,  H01J37/026 ,  H01J37/067 ,  H01J37/073 ,  H01J37/16 ,  H01J37/241 ,  H01J37/248 ,  H01J2237/16

    Abstract: An instrument producing a charged particle beam according to the present invention is provided with: a charged particle source; a plurality of first electrodes disposed along a direction of irradiation of charged particles from the charged particle source; a plurality of insulation members disposed between the first electrodes; and a housing mounted around the plurality of first electrodes. The housing is formed from an insulating solid material, and includes a plurality of second electrodes disposed at positions in proximity to the plurality of first electrodes. At least one of the plurality of second electrodes is electrically connected to at least one of the plurality of first electrodes, each of the plurality of second electrodes having the same potential as the potential of the proximate one of the first electrodes.

    Abstract translation: 根据本发明的产生带电粒子束的仪器具有：带电粒子源; 多个第一电极，其沿带电粒子源的带电粒子的照射方向设置; 设置在所述第一电极之间的多个绝缘构件; 以及围绕所述多个第一电极安装的壳体。 壳体由绝缘固体材料形成，并且包括设置在靠近多个第一电极的位置处的多个第二电极。 所述多个第二电极中的至少一个电连接到所述多个第一电极中的至少一个，所述多个第二电极中的每一个具有与所述第一电极中的所述第一电极的电位相同的电位。

    Method and apparatus for use with an electron gun employing a thermionic source of electrons
    3.
    发明申请
    Method and apparatus for use with an electron gun employing a thermionic source of electrons 有权
    使用电子枪的电子枪的方法和装置

    公开(公告)号：US20010000702A1

    公开(公告)日：2001-05-03

    申请号：US09735192

    申请日：2000-12-11

    Applicant: United Technologies Corporation

    Inventor： Brian E. Mensinger

    IPC: H01J037/305 ,  H01J009/18

    CPC classification number: H01J9/04 ,  H01J37/067

    Abstract: A method includes providing an electron gun having a first head with a thermionic electron source and an accelerating electrode, and further includes replacing the first head with a second head having a power rating substantially different than that of the first head, and subsequently operating the electron gun without replacing the accelerating electrode. The electron gun may further include a platform spaced apart from the accelerating electrode and having an adjustably located locating member that engages a reference member on the head to position the head in three dimensions relative to the accelerating electrode. The platform may be adjustably spaced from the accelerating electrode in order vary the distance between the electron source and the accelerating electrode.

    Abstract translation: 一种方法包括提供一种电子枪，其具有带有热离子电子源和加速电极的第一头，还包括用具有基本上不同于第一头的功率额定值的第二头替换第一头，随后操作电子 而不需要更换加速电极。 电子枪还可以包括与加速电极间隔开的平台，并且具有可调节定位的定位构件，该定位构件与头部上的参考构件接合，以相对于加速电极在三维位置定位头部。 平台可以与加速电极可调节地间隔开，以便改变电子源和加速电极之间的距离。

    Electron beam generator for an electron beam gun
    4.
    发明授权
    Electron beam generator for an electron beam gun 失效
    用于电子束枪的电子束发生器

    公开(公告)号：US5089686A

    公开(公告)日：1992-02-18

    申请号：US579794

    申请日：1990-09-10

    Applicant: Dieter Fritz

    Inventor： Dieter Fritz

    IPC: H01J3/02 ,  H01J37/067

    CPC classification number: H01J3/028 ,  H01J37/067

    Abstract: In the electron beam generator the cathode (3) the control electrode (4) and the anode (5) are provided with easily replaceable parts (12, 13, 14, 28, 29) so as to be able, by exchanging the parts, to optimize the electron beam generator in a simple manner for a selected power range within the working range of the electron beam gun.

    Abstract translation: 在电子束发生器中，阴极（3），控制电极（4）和阳极（5）设置有易于更换的部件（12,13,14,28,29），以便能够通过更换部件， 以电子束枪的工作范围内的选择的功率范围以简单的方式优化电子束发生器。

    ION BEAM DEVICE
    7.
    发明申请
    ION BEAM DEVICE 审中-公开
    离子束装置

    公开(公告)号：US20170076902A1

    公开(公告)日：2017-03-16

    申请号：US15361642

    申请日：2016-11-28

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Hiroyasu SHICHI ,  Shinichi MATSUBARA ,  Norihide SAHO ,  Masahiro YAMAOKA ,  Noriaki ARAI

    IPC: H01J27/26

    CPC classification number: H01J27/26 ,  H01J27/022 ,  H01J37/023 ,  H01J37/067 ,  H01J37/08 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/006 ,  H01J2237/061 ,  H01J2237/0807 ,  H01J2237/2803

    Abstract: An ion beam device according to the present invention includes a gas field ion source including an emitter tip supported by an emitter base mount, a ionization chamber including an extraction electrode and being configured to surround the emitter tip, and a gas supply tube. A center axis line of the extraction electrode overlaps or is parallel to a center axis line of the ion irradiation light system, and a center axis line passing the emitter tip and the emitter base mount is inclinable with respect to a center axis line of the ionization chamber. Accordingly, an ion beam device including a gas field ion source capable of adjusting the direction of the emitter tip is provided.

    Abstract translation: 根据本发明的离子束装置包括气体离子源，其包括由发射极基座支撑的发射极尖端，包括引出电极并被配置为围绕发射极尖端的电离室和气体供应管。 引出电极的中心轴线与离​​子照射光系统的中心轴线重叠或平行，并且通过发射极尖端和发射极基座的中心轴线相对于电离的中心轴线是可倾斜的 房间。 因此，提供了包括能够调节发射极尖端的方向的气体场离子源的离子束装置。

    ENCLOSURE AND METHOD FOR HANDLING ELECTRIC GUN OR ION GUN
    9.
    发明申请
    ENCLOSURE AND METHOD FOR HANDLING ELECTRIC GUN OR ION GUN 有权
    用于处理电枪或离子枪的外壳和方法

    公开(公告)号：US20140000104A1

    公开(公告)日：2014-01-02

    申请号：US14005469

    申请日：2012-02-21

    Applicant: Toshiyuki Morishita ,  Yoshinori Terui ,  Shimpei Hirokawa

    Inventor： Toshiyuki Morishita ,  Yoshinori Terui ,  Shimpei Hirokawa

    IPC: H01R43/26

    CPC classification number: H01R43/26 ,  H01J3/02 ,  H01J37/06 ,  H01J37/065 ,  H01J37/067 ,  H01J37/07 ,  H01J37/08 ,  Y10T29/49117

    Abstract: The present invention is a charged-particle gun (EG) in which a negative electrode (1) and a positive electrode (9) are integrated and assembled in advance, and which can be stored and transported in a state in which the negative electrode and the positive electrode are integrated, wherein the negative electrode and the positive electrode are connected by a conductor (11) during storage and transportation of the charged-particle gun. It is thereby possible to prevent an electrode tip of the charged-particle gun from being damaged by electrical discharge caused by static electricity during storage and transportation.

    Abstract translation: 本发明是一种带电粒子枪（EG），其中负极（1）和正极（9）预先集成并组装，并且可以在负极和 正极集成在一起，其中在带电粒子枪的储存和运输期间，负极和正极通过导体（11）连接。 由此，可以防止带电粒子枪的电极头在储存和运输期间由静电引起的放电损坏。

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