公开(公告)号：US4255661A

公开(公告)日：1981-03-10

申请号：US60046

申请日：1979-07-24

Applicant: Helmut Liebl

Inventor： Helmut Liebl

IPC: G01Q90/00 ,  H01J37/12 ,  H01J37/285 ,  G21K1/08 ,  H01J39/00

CPC classification number: H01J37/285 ,  H01J37/12

Abstract: An electrostatic emission lens arrangement for producing a microparticle ge of a surface by means of charged particles emitted from such surface and accelerated to a predetermined final energy level. Such arrangement includes two apertured diaphragms arranged in spaced relationship to each other and to the emitting surface, and a voltage biasing source for producing a potential difference between the surface and the adjacent first apertured diaphragm electrode, and a potential difference between the first apertured diaphragm electrode and the second apertured diaphragm electrode. According to the invention the spacing distance between the emitting surface and first apertured diaphragm electrode and the spacing distance between the two apertured diaphragm electrodes and, the relationship between the potentials of the surface and of the electrodes are so dimensioned that the charged particles are accelerated between the emitting surface and the first apertured diaphragm electrodes to a multiple of the desired final energy level, and that the particles are retarded to the desired final energy level in passing between the two apertured diaphragm electrodes.

Abstract translation: 一种静电发射透镜装置，用于通过从该表面发射并加速到预定的最终能量水平的带电粒子产生表面的微粒图像。 这种布置包括彼此间隔开地布置成相对于发射表面的两个有孔隔膜，以及用于产生表面和相邻的第一有孔隔膜电极之间的电位差的电压偏压源，以及第一有孔隔膜电极 和第二有孔隔膜电极。 根据本发明，发射表面和第一有孔光阑电极之间的间隔距离和两个有孔光阑电极之间的间隔距离以及表面和电极的电位之间的关系的尺寸使得带电粒子在 发射表面和第一有孔隔膜电极达到所需最终能级的倍数，并且在两个有孔隔膜电极之间通过时，颗粒被延迟到期望的最终能级。

公开(公告)号：US4843239A

公开(公告)日：1989-06-27

申请号：US51728

申请日：1987-05-18

Applicant: Helmut Liebl

Inventor： Helmut Liebl

IPC: H01J49/32

CPC classification number: H01J49/32

Abstract: A compact double-focussing mass spectrometer comprises, in the order namedlong an ion beam path, an einzel lens for focussing ions entering through an entrance slit into an exit slit and for effecting angle focussing, further a magnetic deflection field and an electric sector field each having a deflection angle of 30 degrees and opposite directions of deflection and in combination effecting energy focussing. Since the deflection angles of the magnetic and electric fields are relatively small and have opposite directions, the net ion beam path is essentially straight, and therefore the mass spectrometer can be implemented by a compact structure.

Abstract translation: 紧凑型双重聚焦质谱仪按照离子束路径命名的顺序包括用于将通过入口狭缝进入的离子聚焦到出射狭缝中并用于进行角度聚焦的透明透镜，还有磁偏转场和电扇区场 每个具有30度的偏转角和相反的偏转方向，并且在组合中实现能量聚焦。 由于磁场和电场的偏转角相对较小并且具有相反的方向，所以净离子束路径基本上是直的，因此可以通过紧凑的结构实现质谱仪。

公开(公告)号：US4551599A

公开(公告)日：1985-11-05

申请号：US525413

申请日：1983-08-22

Applicant: Helmut Liebl

Inventor： Helmut Liebl

IPC: H01J37/12 ,  H01J37/244 ,  H01J37/252 ,  H01J37/26

CPC classification number: H01J37/252 ,  H01J37/12

Abstract: A combined objective and emission lens for a microbeam probe is described which is suitable for primary and secondary particles of the same charge sign, by which lens a bundle of primary rays of comparatively high energy can be focused on a very small spot of a plane sample surface and the secondary particles emitted by this spot can be collected into a collimated bundle of secondary rays which leaves the combined lens in a direction substantially opposite to the bundle of primary rays. In the present combined lens, the field strength between the sample surface and the lens electrode most closely adjacent to it is very high, in contrast to the known combined objective and emission lenses, so that a small emissivity of the secondary beam with a small diameter at the same time of the primary beam spot and an effective collection and collimation of the secondary particles are ensured. Certain embodiments can be changed over optionally to operation with primary and secondary particles of the same or opposite polarity.

Abstract translation: 描述了用于微束探针的组合的目标和发射透镜，其适用于相同电荷符号的初级和次级颗粒，通过该透镜，相对较高能量的一束主射线可以聚焦在平面样品的非常小的点上 表面和由该点发射的次级颗粒可以被收集成准直的二次射线束，其将组合透镜沿与主光束基本相反的方向离开。 在本发明的组合透镜中，与已知的组合物镜和发射透镜相反，样品表面与其最接近的透镜电极之间的场强非常高，使得具有小直径的次级束的小的发射率 同时保证了主光斑的有效收集和准直。 某些实施例可以任选地改变为具有相同或相反极性的初级和次级粒子的操作。

公开(公告)号：US4030573A

公开(公告)日：1977-06-21

申请号：US647119

申请日：1976-01-07

Applicant: Leo Buzzi ,  Valentin Buzzi ,  Walter Opietnik ,  Helmut Liebl ,  Peter Malobabic

Inventor： Leo Buzzi ,  Valentin Buzzi ,  Walter Opietnik ,  Helmut Liebl ,  Peter Malobabic

IPC: B26B19/28 ,  A45D29/14 ,  A61H23/02 ,  B26B19/04 ,  H02K7/075 ,  F16F7/10

CPC classification number: B26B19/04 ,  A45D29/14

Abstract: In an electromotorically driven apparatus with an apparatus component which can be driven by a drive element and which performs a reciprocating vibratory movement, strip-shaped integral hinges are provided for the parallel guidance of said apparatus component. To increase the life of the integral hinges, at least one spring which exerts a force component in the direction of the vibratory movement is provided for each of the integral hinges.

Abstract translation: 在具有可由驱动元件驱动并且执行往复振动运动的装置部件的电动驱动装置中，为所述装置部件的平行引导提供带状整体铰链。 为了增加整体铰链的寿命，为每个整体式铰链提供至少一个弹簧，该弹簧对振动运动的方向施加力分量。

公开(公告)号：US3935453A

公开(公告)日：1976-01-27

申请号：US506707

申请日：1974-09-17

Applicant: Helmut Liebl

Inventor： Helmut Liebl

IPC: H01J49/00 ,  H01J49/42 ,  H01J39/34

CPC classification number: H01J49/009 ,  H01J49/06 ,  H01J49/4215 ,  H01J49/48

Abstract: A mass spectrometry apparatus, a quadrupole field mass analyser, is discld together with a novel method of investigating ions in or for mass spectrometry. The apparatus and method employ multiple-channel quadrupole mass filter devices to which the ions are fed via a relatively large entry aperture afforded preferably by a transverseley-split spherical or cylindrical capacitance analyser arranged in conjunction with a stop aperture device to remove ions having energies which are not within a predetermined energy band. The ions are accelerated into the first half of the capacitance analyser, decelerated to pass into the filter devices, and then reaccelerated to the ion detection device.

Abstract translation: 公开了一种质谱装置，四极场质量分析仪以及用于质谱法测定离子的新方法。 该装置和方法采用多通道四极质量过滤装置，离子通过相对较大的入口孔被提供给该离子，优选地通过与止动孔装置结合排列的横切分离的球形或圆柱形电容分析器来提供，以去除具有能量 不在预定的能带内。 离子被加速到电容分析仪的前半部分，减速进入过滤装置，然后重新加速到离子检测装置。

公开(公告)号：US4978855A

公开(公告)日：1990-12-18

申请号：US476973

申请日：1990-02-07

Applicant: Helmut Liebl ,  Bertold Senetinger

Inventor： Helmut Liebl ,  Bertold Senetinger

IPC: H01J37/147 ,  H01J37/153 ,  H01J37/28 ,  H01J37/29

CPC classification number: H01J37/29 ,  H01J2237/2482

Abstract: Electron microscope for investigation of surfaces of solid bodies with a primary beam path along which are arranged sequentially an electron beam source, an electron lens, an energy-selective electrostatic deflecting field, a magnetic deflecting field, a cathode lens, in whose object plane lies the test surface to be investigated, further with a secondary beam path, which passes in sequence through the cathode lens, the magnetic deflecting field, an energy filter, which includes a decelerating lens, a contrast stop, an electrical sector field, an energy stop and an accelerating lens, and two projection lenses, to a detector, such as a luminescent screen. The first-mentioned electrostatic deflecting field compensates for the energy dispersion of the magnetic deflecting field in the entrance side focal plane of the cathode lens. The energy filter limits the energy range of the electrons in the secondary beam path.

Abstract translation: 用于研究具有主光束路径的实体的表面的电子显微镜，其依次布置在其物平面中的电子束源，电子透镜，能量选择性静电偏转场，磁偏转场，阴极透镜 待测试的测试表面，进一步具有次级光束路径，其顺次通过阴极透镜，磁偏转场，能量滤波器，其包括减速透镜，对比度停止，电扇区场，能量停止 以及加速透镜和两个投影透镜，到诸如发光屏的检测器。 首先提到的静电偏转场补偿阴极透镜的入射侧焦平面中的磁偏转场的能量分散。 能量过滤器限制了次光束路径中电子的能量范围。

公开(公告)号：US4246481A

公开(公告)日：1981-01-20

申请号：US10409

申请日：1979-02-08

Applicant: Helmut Liebl

Inventor： Helmut Liebl

IPC: H01J27/20 ,  H01J27/00

CPC classification number: H01J27/20

Abstract: An arrangement wherein atoms are ionized by contact with a heated ionizing surface and the ions are accelerated along an acceleration path towards an acceleration electrode, and wherein, in order to achieve high current densities, the heated surface is convexly curved towards the acceleration electrode and has a radius of curvature which is substantially smaller than the length of the acceleration path.

Abstract translation: 其中原子通过与加热的电离表面接触离子化并且离子沿着加速路径加速到加速电极，其中为了实现高电流密度，加热的表面向加速电极凸形弯曲并具有 曲率半径基本上小于加速路径的长度。