公开(公告)号：US20110293167A1

公开(公告)日：2011-12-01

申请号：US13052160

申请日：2011-03-21

Applicant: Hiroyuki HAYASHI

Inventor： Hiroyuki HAYASHI

IPC: G06K9/00

CPC classification number: G06T7/0004 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: According to one embodiment, a defect inspecting method includes: separately detecting an amount of first secondary electrons emitted from a semiconductor substrate at a first elevation angle and an amount of second secondary electrons emitted at a second elevation angle different from the first elevation angle; creating potential contrast images respectively from the detected amounts of the first and second secondary electrons; determining a combination ratio of the created respective potential contrast images; combining the potential contrast images respectively created from the first and second secondary electrons at the determined combination ratio; and extracting a defect based on the combined potential contrast image. The determining a combination ratio includes: calculating the luminance of the bottom between the wires; determining whether the calculated luminance exceeds a predetermined reference value; and changing the combination ratio when the calculated luminance does not exceed the predetermined reference value.

Abstract translation: 根据一个实施例，缺陷检查方法包括：分别检测在第一仰角处从半导体衬底发射的第一二次电子的量和以与第一仰角不同的第二仰角发射的第二二次电子的量; 从检测到的第一和第二二次电子的量分别产生潜在的对比度图像; 确定所创建的各个潜在对比图像的组合比; 以确定的组合比组合分别由第一和第二二次电子产生的潜在对比度图像; 以及基于组合的潜在对比图像提取缺陷。 确定组合比包括：计算电线之间底部的亮度; 确定所计算的亮度是否超过预定的参考值; 以及当所计算的亮度不超过预定参考值时改变组合比。

公开(公告)号：US20100225905A1

公开(公告)日：2010-09-09

申请号：US12560017

申请日：2009-09-15

Applicant: Hiroyuki HAYASHI

Inventor： Hiroyuki HAYASHI

IPC: G01N21/00

CPC classification number: H01L22/12 ,  H01J37/28 ,  H01J2237/24592 ,  H01J2237/2806 ,  H01J2237/2817 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An inspection method for a semiconductor substrate includes irradiating an inspection beam on wires formed on a semiconductor substrate, detecting a secondary beam emitted from the semiconductor substrate, generating a contrast image, which indicates a state of an inspection surface of the semiconductor substrate, according to a gray level corresponding to signal intensity of the secondary beam, specifying a wire as an inspection target and a wire as a non-inspection target and acquiring a position and a dimension of the wire as the non-inspection target and a gray level corresponding to a wire non-forming area, replacing an image of the wire as the non-inspection target in the contrast image with an image having the gray level corresponding to the wire non-forming area, and inspecting, based on the contrast image after the replacement processing, a defect of the wire as the inspection target.

Abstract translation: 半导体衬底的检查方法包括：将形成在半导体衬底上的导线上的检查光束照射，检测从半导体衬底发射的二次光束，产生指示半导体衬底的检查表面的状态的对比度图像，根据 对应于次级束的信号强度的灰度级，指定作为检查对象的线和作为非检查对象的线，并且获取作为不检查对象的线的位置和尺寸，以及对应于 电线非形成区域，用具有与电线非形成区域相对应的灰度级的图像替换对比图像中的作为非检查对象的线的图像，并且基于替换后的对比图像进行检查 处理，作为检查对象的电线缺陷。

公开(公告)号：US20140185087A1

公开(公告)日：2014-07-03

申请号：US14038103

申请日：2013-09-26

Applicant: Hiroyuki HAYASHI

Inventor： Hiroyuki HAYASHI

IPC: G06F3/12

CPC classification number: G06F3/122 ,  G06F3/1236 ,  G06F3/1271 ,  G06F3/1288

Abstract: A printing apparatus which communicates with a data providing apparatus includes a printing mechanism which executes a printing operation. The printing apparatus receives a number of print copies, and acquires print data from the data providing apparatus by executing a request processing of transmitting to the data providing apparatus a data request of the print data, and a reception processing of receiving the print data from the data providing apparatus. When executing a printing operation of N copies (N is an integer of 2 or larger), the acquiring executes, for each copy, the request processing and the reception processing to acquire the print data from the data providing apparatus while executing the request processing of the print data of M-th copy (M is an integer of 2 or larger and N or smaller) after the reception processing of the print data of (M−1)-th copy is completed.

Abstract translation: 与数据提供装置通信的打印装置包括执行打印操作的打印机构。 打印装置接收多个打印副本，并通过执行向数据提供装置发送打印数据的数据请求的请求处理从数据提供装置获取打印数据，以及从打印数据接收打印数据的接收处理 数据提供装置。 当执行N个副本的打印操作（N是2或更大的整数）时，对于每个副本，获取执行请求处理和接收处理，以在执行请求处理的请求处理期间从数据提供装置获取打印数据 第（M-1）次复印的打印数据的接收处理完成后，第M个拷贝的打印数据（M为2以上且N以下的整数）。

公开(公告)号：US20130248705A1

公开(公告)日：2013-09-26

申请号：US13600980

申请日：2012-08-31

Applicant: Hiroyuki HAYASHI

Inventor： Hiroyuki HAYASHI

IPC: H01J37/02

CPC classification number: H01J37/02 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/24564

Abstract: In accordance with an embodiment, a defect inspection apparatus includes a charged beam irradiation unit, a detection unit, an energy filter, and an inspection unit. The charged beam irradiation unit generates a charged beam and irradiates a sample including a pattern as an inspection target thereon with the generated charged beam. The detection unit detects secondary charged particles or reflected charged particles generated from the sample by irradiation of the charged beam and outputs a signal. The energy filter is arranged between the detection unit and the sample to selectively allow the secondary charged particles or the reflected charged particles with energy associated with an applied voltage to pass therethrough. The inspection unit applies voltages different from each other to the energy filter and outputs information concerning a defect of the pattern from an intensity difference between signals obtained under application voltage different from each other.

Abstract translation: 根据实施例，缺陷检查装置包括带电束照射单元，检测单元，能量过滤器和检查单元。 充电光束照射单元产生带电光束，并且利用所产生的带电束将包括作为检查对象的图案的样本照射。 检测单元通过照射带电波束来检测从样品产生的二次带电粒子或反射带电粒子，并输出信号。 能量过滤器布置在检测单元和样品之间，以选择性地允许具有与施加电压相关联的能量通过的二次带电粒子或反射带电粒子。 检查单元向能量滤波器施加彼此不同的电压，并且从根据施加电压彼此不同获得的信号之间的强度差输出关于图案的缺陷的信息。

公开(公告)号：US20090022237A1

公开(公告)日：2009-01-22

申请号：US12175255

申请日：2008-07-17

Applicant: Jun WANG ,  Jun TIAN ,  Hiroyuki HAYASHI

Inventor： Jun WANG ,  Jun TIAN ,  Hiroyuki HAYASHI

IPC: H04L27/28

CPC classification number: H04L1/0006 ,  H04L1/007 ,  H04L1/0071 ,  H04L1/0086 ,  H04L5/0044 ,  H04L27/2601

Abstract: The present invention discloses a symbol interleaving and channel mapping device and method as well as a mobile communication system. The symbol interleaving and channel mapping device is used in a transmitter of a mobile communication system, said transmitter receiving the channel state information fed back from a receiver of the mobile communication system; the symbol interleaving and channel mapping device comprises a symbol classification unit for classifying symbols according to their importance; a symbol sub-carrier mapping unit for performing a sub-carrier mapping according to the classification result of said symbol classification unit and the channel state information such that the important symbols correspond to the non deep fading sub-carrier as much as possible.

Abstract translation: 本发明公开了一种符号交织和信道映射设备及方法以及移动通信系统。 符号交织和信道映射设备用于移动通信系统的发射机，所述发射机接收从移动通信系统的接收机反馈的信道状态信息; 符号交织和信道映射设备包括：符号分类单元，用于根据其符号对符号进行分类; 符号子载波映射单元，用于根据所述符号分类单元的分类结果和信道状态信息执行子载波映射，使得重要符号尽可能地对应于非深衰落子载波。

公开(公告)号：US20120217160A1

公开(公告)日：2012-08-30

申请号：US13406188

申请日：2012-02-27

Applicant: Hiroyuki HAYASHI ,  Masaki MIZUTANI ,  Takayuki KITOU

Inventor： Hiroyuki HAYASHI ,  Masaki MIZUTANI ,  Takayuki KITOU

IPC: G01N27/407

CPC classification number: G01N27/4071

Abstract: There is provided a gas sensor element, including a solid electrolyte layer, a pair of sensor electrodes arranged on a front side of the solid electrolyte layer, a pair of sensor leads arranged on a rear side of the solid electrolyte layer and connected to the respective sensor electrodes; and insulating layers, one of which is arranged between one of the sensor leads and the solid electrolyte layer and the other of which is arranged between the other sensor lead and the solid electrolyte layer. The sensor electrodes have rear end portions located on the insulating layers and overlapping front end portions of the sensor leads, respectively. The sensor leads are denser than the sensor electrodes and have front ends located in the same positions as or positions rear of front ends of the insulating layers, respectively. There is also provided a gas sensor with such a gas sensor element.

Abstract translation: 提供了一种气体传感器元件，包括固体电解质层，布置在固体电解质层前侧的一对传感器电极，一对传感器引线，布置在固体电解质层的后侧并连接到固体电解质层 传感器电极; 绝缘层，其中之一布置在传感器引线和固体电解质层中的一个之间，另一个布置在另一个传感器引线和固体电解质层之间。 传感器电极具有分别位于绝缘层上的后端部分和传感器引线的重叠前端部分。 传感器引线比传感器电极更致密，并且分别具有位于绝缘层的前端的相同位置或位于后端的前端。 还提供了具有这种气体传感器元件的气体传感器。

公开(公告)号：US20080298869A1

公开(公告)日：2008-12-04

申请号：US12128912

申请日：2008-05-29

Applicant: Hiroyuki HAYASHI

Inventor： Hiroyuki HAYASHI

IPC: B41J33/10

CPC classification number: B41J33/10 ,  B41J32/02

Abstract: An ink ribbon cassette includes first and second rotatable bodies that rotate with an ink ribbon held between the rotatable bodies in sandwiched relation. The second rotatable body includes a hole through which a shaft extends such that the second rotatable body is rotatably supported on the shaft. The shaft may have a circumferential surface conical toward the free end, and the hole may be a conical hole into which the conical shaft extends. The shaft may include a plurality of cylindrical shaft portions that are in line with one another and that have different diameters. The second rotatable body is formed with a plurality of cylindrical hole portions having different diameters corresponding to the cylindrical shaft portions such that the second rotatable body is rotatably supported on the shaft.

Abstract translation: 墨带盒包括第一和第二可旋转体，其以夹持在可转动体之间的墨带旋转。 第二旋转体包括孔，轴延伸穿过该孔，使得第二可旋转体可旋转地支撑在轴上。 轴可以具有朝向自由端圆锥形的圆周表面，并且孔可以是锥形轴延伸到其中的锥形孔。 轴可以包括彼此成直角且具有不同直径的多个圆柱形轴部。 第二旋转体形成有多个圆柱形孔部分，其具有与圆柱形轴部分对应的不同直径，使得第二可旋转体可旋转地支撑在轴上。

公开(公告)号：US20140061461A1

公开(公告)日：2014-03-06

申请号：US13713519

申请日：2012-12-13

Applicant: Hiroyuki HAYASHI ,  Yuichiro Yamazaki

Inventor： Hiroyuki HAYASHI ,  Yuichiro Yamazaki

IPC: H01J37/26

CPC classification number: H01J37/263 ,  H01J2237/24592 ,  H01J2237/2817

Abstract: In accordance with an embodiment, a defect inspection apparatus includes an electron beam applying unit, a detection unit, a signal processing unit, and a control unit. The electron beam applying unit applies an electron beam to a semiconductor substrate on which first to N-th (N is a natural number equal to or more than 2) patterns are periodically provided. The patterns are respectively made of first to N-th materials in descending order of the emission amount of secondary electrons or reflected electrons. The detection unit detects the secondary electrons or reflected electrons from the patterns to output a signal. The signal processing unit processes the signal to form a potential contrast image of the patterns. The control unit acquires a potential contrast signal waveform including N signal waveforms respectively corresponding to the N patterns, analyzes the potential contrast signal waveform to acquire positional information to scan the desired pattern.

Abstract translation: 根据实施例，缺陷检查装置包括电子束施加单元，检测单元，信号处理单元和控制单元。 电子束施加单元向半周期性地提供第一至第N（N为自然数等于或大于2）的半导体衬底施加电子束。 这些图案分别以二次电子或反射电子的发射量的降序的顺序由第一至第N材料制成。 检测单元从图案检测二次电子或反射电子以输出信号。 信号处理单元处理信号以形成图案的潜在对比图像。 控制单元获取包括分别对应于N个图案的N个信号波形的潜在对比度信号波形，分析潜在的对比度信号波形以获取位置信息以扫描期望的图案。