公开(公告)号：US3681226A

公开(公告)日：1972-08-01

申请号：US3681226D

申请日：1970-07-02

Applicant: IBM

Inventor： VOGEL SIEGFRIED F

IPC: C23C14/08 ,  C23C14/34 ,  C23C15/00

CPC classification number: C23C14/3414 ,  C23C14/088

Abstract: THE FABRICATION, COMPOSITION AND UTILIZATION OF SPUTTERING CATHODES OR TAGETS FOR MIXED OXIDE OR FERROELECTRIC FILMS COMPRISING TWO OR MORE METALS. SUCH CATHODES ARE MADE FROM THE BLENDED METAL POWDERS BY COMPRESSION INTO DISKS. THESE DISKS ARE SOLDERED AGAINST A METALLIC, WATER-COOLED BACKING PLATE. SPUTTERING WITH DC OR RF POWER TAKES PLACE IN A REACTIVE, SPECIFICALLY AN OXIDIZING, ATMOSPHERE.

公开(公告)号：US3532923A

公开(公告)日：1970-10-06

申请号：US3532923D

申请日：1969-03-17

Applicant: IBM

Inventor： VOGEL SIEGFRIED F

IPC: H01J1/148 ,  H01J1/15 ,  H01J19/08

CPC classification number: H01J1/148 ,  H01J1/15