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    Electron guns for electron beam tools
    1.
    发明授权
    Electron guns for electron beam tools 有权

    公开(公告)号：US10573481B1

    公开(公告)日：2020-02-25

    申请号：US16203510

    申请日：2018-11-28

    Applicant: NuFlare Technology, Inc. ,  NuFlare Technology America, Inc.

    Inventor： Victor Katsap

    IPC: H01J1/46 ,  H01J3/02 ,  H01J1/148 ,  H01J9/18

    Abstract: An electron emission apparatus, an electron gun, and a method of fabrication of the electron gun are provided. The electron gun includes a cathode, a Wehnelt, and an anode. The cathode is configured to provide an electron beam. The Wehnelt has a bore. The bore is configured to pass the electron beam. The anode is disposed proximate to the cathode. The diameter of the bore of the Wehnelt and the offset between the Wehnelt and the cathode satisfy a predetermined dimensional relationship. The predetermined dimensional relationship is at least a function of a diameter of the bore of the anode and a distance between the Wehnelt and the anode.

    Thermionic cathode with even electric field distribution on electron emitting surface
    2.
    发明授权
    Thermionic cathode with even electric field distribution on electron emitting surface 有权
    在电子发射表面具有均匀电场分布的热电阴极

    公开(公告)号：US09299525B2

    公开(公告)日：2016-03-29

    申请号：US14047827

    申请日：2013-10-07

    Applicant: NUFLARE TECHNOLOGY, INC.

    Inventor： Ryoei Kobayashi

    IPC: H01J1/148 ,  H01J9/04 ,  H01J37/065

    CPC classification number: H01J1/148 ,  H01J9/04 ,  H01J37/065 ,  H01J2237/06308 ,  H01J2237/26 ,  H01J2237/31754

    Abstract: A thermionic cathode of an embodiment includes a carbon coating applied to an outer surface of the side, the carbon coating comprising a contiguous extended portion surrounding the upper section and spaced apart from said upper section by a gap having 1 μm or more and 10 μm or less in width and having a difference of 1 μm or less in the width between a maximum value and a minimum value in a periphery of the electron emitting surface.

    Abstract translation: 实施方案的热离子阴极包括施加到侧面的外表面的碳涂层，碳涂层包括围绕上部的邻接的延伸部分并且与上部分隔开具有1μm或更大和10μm的间隙，或 宽度较小，并且在电子发射表面的周围的最大值和最小值之间的宽度上具有1μm或更小的差。

    Thermal-field type electron source composed of transition metal carbide material with artificial facet
    3.
    发明授权
    Thermal-field type electron source composed of transition metal carbide material with artificial facet 有权
    由过渡金属碳化物材料与人造面组成的热场型电子源

    公开(公告)号：US09240301B1

    公开(公告)日：2016-01-19

    申请号：US13851732

    申请日：2013-03-27

    Applicant: Applied Physics Technologies, Inc.

    Inventor： William A. Mackie ,  Gerald G. Magera

    IPC: H01J1/14 ,  H01J1/146 ,  H01J19/10 ,  H01J1/148

    CPC classification number: H01J1/148 ,  H01J1/14 ,  H01J1/146 ,  H01J19/10 ,  H01J37/06 ,  H01J2201/196 ,  H01J2201/2889 ,  H01J2201/30484 ,  H01J2201/317 ,  H01J2237/06316

    Abstract: An electron source is made from mixed-metal carbide materials of high refractory nature. Producing field-enhanced thermionic emission, i.e., thermal-field or extended Schottky emission, from these materials entails the use of a certain low work function crystallographic direction, such as, for example, (100), (210), and (310). These materials do not naturally facet because of their refractory nature. The disclosed electron source made from transition metal carbide material is especially useful when installed in a scanning electron microscope (SEM) performing advanced imaging applications that require a high brightness, high beam current source.

    Abstract translation: 电子源由具有高耐火性质的混合金属碳化物材料制成。 从这些材料产生场强增强的热离子发射，即热场或延伸的肖特基发射需要使用某种低功函数的晶体学方向，例如（100），（210）和（310） 。 这些材料由于其耐火性质而不自然而然。 所披露的由过渡金属碳化物材料制成的电子源在安装在需要高亮度，远光束电流源的先进成像应用的扫描电子显微镜（SEM）中是特别有用的。

    Electron gun and electron beam device
    4.
    发明授权
    Electron gun and electron beam device 有权
    电子枪和电子束装置

    公开(公告)号：US09070527B2

    公开(公告)日：2015-06-30

    申请号：US14000988

    申请日：2011-02-25

    Applicant: Hiroshi Yasuda

    Inventor： Hiroshi Yasuda

    IPC: H01J29/48 ,  H01J1/148 ,  H01J1/26 ,  H01J37/075 ,  H01J37/317 ,  H01J37/065 ,  H01J37/07 ,  H01J37/26 ,  B82Y10/00 ,  B82Y40/00

    CPC classification number: H01J29/485 ,  B82Y10/00 ,  B82Y40/00 ,  H01J1/148 ,  H01J1/26 ,  H01J37/065 ,  H01J37/07 ,  H01J37/075 ,  H01J37/26 ,  H01J37/3174

    Abstract: An electron gun cathode (104) is column shaped, and emits electrons by being heated. A holder (103), which covers the bottom and sides of the electron gun cathode, has electrical conductivity and holds the electron gun cathode, and is composed of a material that does not easily react with the electron gun cathode when in a heated state, is provided. The tip of the electron gun cathode (104) protrudes from the holder (103) so as to be exposed, and electrons are emitted from the tip toward the front by applying an electric field to the tip.

    Abstract translation: 电子枪阴极（104）为柱状，通过加热发射电子。 覆盖电子枪阴极的底部和侧面的保持器（103）具有导电性并保持电子枪阴极，并且由处于加热状态时不易与电子枪阴极反应的材料构成， 被提供。 电子枪阴极（104）的尖端从保持器（103）突出以露出，并且通过向尖端施加电场，从尖端向前方发射电子。

    ANNULAR GAP CATHODES WITH GRAPHITE CAPS
    7.
    发明公开
    ANNULAR GAP CATHODES WITH GRAPHITE CAPS 审中-公开

    公开(公告)号：US20240161993A1

    公开(公告)日：2024-05-16

    申请号：US18388122

    申请日：2023-11-08

    Applicant: Kimball Physics, Inc.

    Inventor： George Douglas Calvey

    IPC: H01J1/15 ,  H01J1/148 ,  H01J9/04

    CPC classification number: H01J1/15 ,  H01J1/148 ,  H01J9/04

    Abstract: A cathode device including an emitter element for generating electrons. The emitter element can have an outer periphery and a distal tip. The tip can have a first angled surface that angles inwardly from the outer periphery, and a second angled surface that angles inwardly and is separated and inwardly offset from the first angled surface by a shoulder. A graphite cap which can be solid, extends around the emitter element and has an internal angled surface that engages the first angled surface of the tip of the emitter element, forming a gap of a controlled size separating the internal angled surface of the graphite cap from the second angled surface of the tip of the emitter element.

    Thermal-field type electron source composed of transition metal carbide material
    10.
    发明授权
    Thermal-field type electron source composed of transition metal carbide material 有权
    由过渡金属碳化物材料组成的热场型电子源

    公开(公告)号：US09490098B1

    公开(公告)日：2016-11-08

    申请号：US14992870

    申请日：2016-01-11

    Applicant: Applied Physics Technologies, Inc.

    Inventor： William A. Mackie ,  Gerald G. Magera

    IPC: H01J1/146 ,  H01J1/148 ,  H01J19/10 ,  H01J1/14

    CPC classification number: H01J1/148 ,  H01J1/14 ,  H01J1/146 ,  H01J19/10 ,  H01J37/06 ,  H01J2201/196 ,  H01J2201/2889 ,  H01J2201/30484 ,  H01J2201/317 ,  H01J2237/06316

    Abstract: An electron source is made from mixed-metal carbide materials of high refractory nature. Producing field-enhanced thermionic emission, i.e., thermal-field or extended Schottky emission, from these materials entails the use of a certain low work function crystallographic direction, such as, for example, (100), (210), and (310). These materials do not naturally facet because of their refractory nature. The disclosed electron source made from transition metal carbide material is especially useful when installed in a scanning electron microscope (SEM) performing advanced imaging applications that require a high brightness, high beam current source.

    Abstract translation: 电子源由具有高耐火性质的混合金属碳化物材料制成。 从这些材料产生场强增强的热离子发射，即热场或延伸的肖特基发射需要使用某种低功函数的晶体学方向，例如（100），（210）和（310） 。 这些材料由于其耐火性质而不自然而然。 所披露的由过渡金属碳化物材料制成的电子源在安装在需要高亮度，远光束电流源的先进成像应用的扫描电子显微镜（SEM）中是特别有用的。

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